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Effects of Inductively Coupled Plasma Assistance and H2/N2 Atmosphere Regulation on Luminescence Properties of Amorphous Ga2O3 Thin Films
Synthesis and Properties of Materials | 更新时间：2026-09-30

    • Effects of Inductively Coupled Plasma Assistance and H2/N2 Atmosphere Regulation on Luminescence Properties of Amorphous Ga2O3 Thin Films

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    • Chinese Journal of Luminescence   Vol. 47, Issue 9, Pages: 1705-1716(2026)

    • DOI：10.3724/CJL.20260127    

      CLC： O482.31
    • CSTR：32170.14.CJL.20260127    

    • Received：08 April 2026，

      Revised：2026-04-25，

      Published：25 September 2026

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  • CHEN Shuzhen,LU Xinzhou,YANG Fan,et al.Effects of Inductively Coupled Plasma Assistance and H2/N2 Atmosphere Regulation on Luminescence Properties of Amorphous Ga2O3 Thin Films[J].Chinese Journal of Luminescence,2026,47(09):1705-1716. DOI: 10.3724/CJL.20260127. CSTR: 32170.14.CJL.20260127. DOI：

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