Liu Yuzhen, Shi Wanquan, Liu Shixiang, Yao Decheng, Liu Jinlong, Han Yiqin, Zhao Lingli, Sun Baoyin, Ye Tianchun, Chen Mengzhen. LUMINESCENCE FROM SILICON NITRIDE FILM BY LPCVD[J]. Chinese Journal of Luminescence, 1999,20(1): 37-39
Liu Yuzhen, Shi Wanquan, Liu Shixiang, Yao Decheng, Liu Jinlong, Han Yiqin, Zhao Lingli, Sun Baoyin, Ye Tianchun, Chen Mengzhen. LUMINESCENCE FROM SILICON NITRIDE FILM BY LPCVD[J]. Chinese Journal of Luminescence, 1999,20(1): 37-39DOI: