Qi CHEN, Yue YIN, Fang REN, et al. Van der Waals Epitaxy of Ⅲ-Ⅴ Compounds and Their Applications. [J]. Chinese Journal of Luminescence 41(8):899-912(2020)
DOI:
Qi CHEN, Yue YIN, Fang REN, et al. Van der Waals Epitaxy of Ⅲ-Ⅴ Compounds and Their Applications. [J]. Chinese Journal of Luminescence 41(8):899-912(2020) DOI: 10.37188/fgxb20204108.0899.
Van der Waals Epitaxy of Ⅲ-Ⅴ Compounds and Their Applications
Ⅲ-Ⅴ compound semiconductors have wide band gap and high carrier mobility
making them suitable candidates for light-emitting diodes(LEDs)
laser diodes(LDs)
high electron mobility transistors(HEMTs) and other optoelectronics. For covalent epitaxy of Ⅲ-Ⅴ compounds on hetero-substrates
high quality epilayer can only be obtained when the lattice mismatch between the substrate and epilayer is negligible. However
van der Waals epitaxy(vdWE) has been proven to be a useful route to relax the requirements of lattice mismatch and thermal mismatch between the epilayer and the substrate. By using vdWE
the stress in epilayer can be sufficiently relaxed
and the epilayer can be easily exfoliated and transferred
which is useful for the Ⅲ-Ⅴ compound-based novel devices fabricating. In this paper
we reviewed and discussed the important progresses on the researches of nitrides vdWE. The potential applications of nitrides vdWE are also prospected.
LI G Q, WANG W L, YANG W J, et al.. GaN-based light-emitting diodes on various substrates:a critical review[J].Rep. Prog. Phys., 2016, 79(5):056501.
KIM Y, CRUZ S S, LEE K, et al.. Remote epitaxy through graphene enables two-dimensional material-based layer transfer[J].Nature, 2017, 544(7650):340-343.
MEYAARD D S, CHO J, SCHUBERT E F, et al.. Analysis of the temperature dependence of the forward voltage characteristics of GaInN light-emitting diodes[J].Appl. Phys. Lett., 2013, 103(12):121103-1-4.
WONG W S, SANDS T, CHEUNG N W. Damage-free separation of GaN thin films from sapphire substrates[J].Appl. Phys. Lett., 1998, 72(5):599-601.
KOMA A, SUNOUCHI K, MIYAJIMA T. Fabrication and characterization of heterostructures with subnanometer thickness[J].Microelectron. Eng., 1984, 2(1-3):129-136.
FERNÁNDEZ-GARRIDO S, RAMSTEINER M, GAO G H, et al.. Molecular beam epitaxy of GaN nanowires on epitaxial graphene[J].Nano Lett., 2017, 17(9):5213-5221.
CHUNG K, LEE C H, YI G C. Transferable GaN layers grown on ZnO-Coated graphene layers for optoelectronic devices[J].Science, 2010, 330(6004):655-657.
KONG W, LI H S, QIAO K, et al.. Polarity governs atomic interaction through two-dimensional materials[J].Nat. Mater., 2018, 17(11):999-1004.
NOVOSELOV K S, GEIM A K, MOROZOV S V, et al.. Electric field effect in atomically thin carbon films[J].Science, 2004, 306(5696):666-669.
QI L, XU Y, LI Z Y, et al.. Stress analysis of transferable crack-free gallium nitride microrods grown on graphene/SiC substrate[J].Mater. Lett., 2016, 185:315-318.
PARK S, RUOFF R S. Chemical methods for the production of graphenes[J].Nat. Nanotechnol., 2009, 4(4):217-224.
WINTTERLIN J, BOCQUET M L. Graphene on metal surfaces[J].Surf. Sci., 2009, 603(10-12):1841-1852.
RAO C N R, SOOD A K, SUBRAHMANYAM K S, et al.. Graphene:the new two-dimensional nanomaterial[J].Angew. Chem. Int. Ed., 2009, 48(42):7752-7777.
XU Y, CAO B, LI Z Y, et al.. Growth model of van der Waals epitaxy of films:a case of AlN films on multilayer graphene/SiC[J].ACS Appl. Mater. Interfaces, 2017, 9(50):44001-44009.
HONG Y J, YANG J W, LEE W H, et al.. Van der Waals epitaxial double heterostructure:InAs/single-layer graphene/InAs[J].Adv. Mater., 2013, 25(47):6847-6853.
QI Y, WANG Y Y, PANG Z Q, et al.. Fast growth of strain-free AlN on graphene-buffered sapphire[J].J. Am. Chem. Soc., 2018, 140(38):11935-11941.
CHOI J K, HUH J H, KIM S D, et al.. One-step graphene coating of heteroepitaxial GaN films[J].Nanotechnology, 2012, 23(43):435603-1-8.
CHEN Z L, ZHANG X, DOU Z P, et al.. High-brightness blue light-emitting diodes enabled by a directly grown graphene buffer layer[J].Adv. Mater., 2018, 30(30):1801608.
CHEN X D, LIU Z B, ZHENG C Y, et al.. High-quality and efficient transfer of large-area graphene films onto different substrates[J].Carbon, 2013, 56:271-278.
LIANG X L, SPERLING B A, CALIZO I, et al.. Toward clean and crackless transfer of graphene[J].ACS Nano, 2011, 5(11):9144-9153.
GEIM A K, NOVOSELOV K S. The rise of graphene[J].Nat. Mater., 2007, 6(3):183-191.
SEOL J H, JO I, MOORE A L, et al.. Two-dimensional phonon transport in supported graphene[J].Science, 2010, 328(5975):213-216.
NAIR R R, BLAKE P, GRIGORENKO A N, et al.. Fine structure constant defines visual transparency of graphene[J].Science, 2008, 320(5881):1308.
SUN M L, TANG W C, REN Q Q, et al.. First-principles study of the alkali earth metal atoms adsorption on graphene[J].Appl. Surf. Sci., 2015, 356:668-673.
SEVINÇLI H, TOPSAKAL M, DURGUN E, et al.. Electronic and magnetic properties of 3 d transition-metal atom adsorbed graphene and graphene nanoribbons[J].Phys. Rev. B, 2008, 77(19):195434-1-7.
CHEN Z L, LIU Z Q, WEI T B, et al.. Improved epitaxy of AlN film for deep-ultraviolet light-emitting diodes enabled by graphene[J].Adv. Mater., 2019, 31(23):1807345-1-8.
SHIN Y J, WANG Y Y, HUANG H, et al.. Surface-energy engineering of graphene[J].Langmuir, 2010, 26(6):3798-3802.
REN F, YIN Y, WANG Y Y, et al.. Direct growth of AlGaN nanorod LEDs on graphene-covered Si[J].Materials, 2018, 11(12):2372-1-9.
LI Y, ZHAO Y, WEI T B, et al.. Van der Waals epitaxy of GaN-based light-emitting diodes on wet-transferred multilayer graphene film[J].Jpn. J. Appl. Phys., 2017, 56(8):085506.
WANG Y Y, DHEERAJ D, LIU Z Q, et al.. AlGaN nanowires grown on SiO2/Si (100) using graphene as a buffer layer[J].Cryst. Growth Des., 2019, 19(10):5516-5522.
GUPTA P, RAHMAN A A, SUBRAMANIAN S, et al.. Layered transition metal dichalcogenides:promising near-lattice-matched substrates for GaN growth[J].Sci. Rep., 2016, 6:23708-1-8.
ZHAO C, NG T K, TSENG C C, et al.. InGaN/GaN nanowires epitaxy on large-area MoS2 for high-performance light-emitters[J].RSC Adv., 2017, 7(43):26665-26672.
YIN Y, REN F, WANG Y Y, et al.. Direct van der Waals epitaxy of crack-free AlN thin film on epitaxial WS2[J].Materials, 2018, 11(12):2464-1-9.
ALASKAR Y, ARAFIN S, WICKRAMARATNE D, et al.. Towards van der Waals epitaxial growth of GaAs on Si using a graphene buffer layer[J].Adv. Funct. Mater., 2014, 24(42):6629-6638.
FERREYRA R A, ZHU C Y, TEKE A, et al.. Group Ⅲ nitrides[M]. KASAP S, CAPPER P.Springer Handbook of Electronic and Photonic Materials. Cham: Springer, 2017.
CHUNG K, YOO H, HYUN J K, et al.. Flexible GaN light-emitting diodes using GaN microdisks epitaxial laterally overgrown on graphene dots[J].Adv. Mater., 2016, 28(35):7688-7694.
SHIH C J, STRANO M S, BLANKSCHTEIN D. Wetting translucency of graphene[J].Nat. Mater., 2013, 12(10):866-869.
RAFIEE J, MI X, GULLAPALLI H, et al.. Wetting transparency of graphene[J].Nat. Mater., 2012, 11(3):217-222.