Research Progress of Vertical-cavity Surface-emitting Laser

Ji-ye ZHANG; Xue LI; Jian-wei ZHANG; Yong-qiang NING; Li-jun WANG

doi:10.37188/CJL.20200339

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Research Progress of Vertical-cavity Surface-emitting Laser

Invited Review | 更新时间：2020-12-10

- Research Progress of Vertical-cavity Surface-emitting Laser
- Chinese Journal of Luminescence Vol. 41, Issue 12, Pages: 1443-1459(2020)
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所发光学及应用国家重点实验室, 吉林长春 130033
  2.中国科学院大学材料与光电研究中心, 北京 100049
- 作者简介：
- 基金信息：
  
  National Key Research and Development Program of China;National Natural Science Foundation of China;National Natural Science Foundation of China;National Natural Science Foundation of China;National Natural Science Foundation of China;National Natural Science Foundation of China;National Natural Science Foundation of China;Pilot Project of Chinese Academy of Sciences;Equipment Preresearch;Key Projects of Jilin Province Science and Technology Development Plan;Jinan Science and Technology Plan;Key Research and Development Project of Guangdong Province;STS Innovation and Entrepreneurship Guidance Project of Chinese Academy of Sciences
- DOI：10.37188/CJL.20200339
  CLC： TN248.4
- Published：2020-12，
  
  Received：6 November 2020，
  
  Accepted：18 November 2020
扫描看全文
Ji-ye ZHANG, Xue LI, Jian-wei ZHANG, et al. Research Progress of Vertical-cavity Surface-emitting Laser. [J]. Chinese Journal of Luminescence 41(12):1443-1459(2020)
DOI：

Ji-ye ZHANG, Xue LI, Jian-wei ZHANG, et al. Research Progress of Vertical-cavity Surface-emitting Laser. [J]. Chinese Journal of Luminescence 41(12):1443-1459(2020) DOI： 10.37188/CJL.20200339.

摘要

垂直腔面发射激光器（Vertical-cavity surface-emitting laser，VCSEL）是40多年前被发明的，具有很多独特的优势，例如尺寸小、功耗低、效率高、寿命长、圆形光束以及二维面阵集成等。近年来，VCSEL市场发展迅速，在5G通信、光信息存储、3D传感、激光雷达、材料加工以及激光显示等领域被广泛应用。针对不同的应用需求，VCSEL的功率、速率、能效、高温性能以及波长的多样性等性能都有了长足的进步。本文首先介绍了VCSEL的研究历程和优点特性；综述了VCSEL在高功率、高速、高温下工作等方面的研究进展和应用现状；最后对VCSEL的最新应用做了介绍，展望了VCSEL的市场。

Abstract

The vertical-cavity surface emitting laser(VCSEL) was invented 40 years ago

where a lot of unique features can be expected

such as small footprint

low power consumption

high efficiency

long lifetime

circular beam and two-dimensional arrangement and so on. In recent years

the market of VCSELs has been growing up rapidly

and VCSELs are now key devices in the fields of 5G communication

optical information storage

3D sensing

material processing

light detection and ranging(LiDAR)

and laser display. For different application requirements

VCSEL has great achievements in the area of power

efficiency

speed and wavelength. In this paper

firstly

the research history and advantages of VCSEL are introduced; then

the research progress and application status of VCSEL at high power

high speed and high temperature are reviewed; lastly

the latest application of VCSEL is introduced

and the market of VCSEL is prospected.

关键词

垂直腔面发射激光器高功率高速高温

Keywords

vertical-cavity surface emitting laser(VCSEL)high powerhigh speedhigh temperature

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