Multilayer Dielectric Film Optical Waveguide Based on Ta<sub>2</sub>O<sub>5</sub>

LI Siqi; LEI Yuxin; CHEN Yongyi; ZHAO Tianye; ZHANG Dexiao; ZHANG Xunyu; JIA Peng; WANG Yubing; LIANG Lei; QIN Li; WANG Lijun

doi:10.37188/CJL.20250264

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Multilayer Dielectric Film Optical Waveguide Based on Ta₂O₅

Synthesis and Properties of Materials | 更新时间：2026-03-25

- Multilayer Dielectric Film Optical Waveguide Based on Ta₂O₅
  增强出版
- Chinese Journal of Luminescence Vol. 47, Issue 3, Pages: 476-485(2026)
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所特种发光科学与技术全国重点实验室，吉林长春 130033
  2.中国科学院大学大珩学院，北京 100049
  3.吉光半导体科技有限公司，吉林长春 130033
  4.长春理工大学，吉林长春 130022
- 作者简介：
- 基金信息：
  
  the National Key R & D Program of China(20022YFB2803500);the National Natural Science Foundation of China(62574202;62227819);Outstanding Youth Fund Project of Jilin Provincial Natural Science Foundation(20230508097RC);the CAS Project for Young Scientists in Basic Research(25GNYZ06);the Autonomous Project of the National Key Laboratory of Special Luminescence Science and Technology(YSBR-065)
- DOI：10.37188/CJL.20250264
  CLC： TN252
- CSTR：32170.14.CJL.20250264
- Received：03 December 2025，
  
  Revised：2025-12-21，
  
  Published：25 March 2026
- 稿件说明：
移动端阅览
李思齐,雷宇鑫,陈泳屹等.基于Ta₂O₅的多层介质膜光波导[J].发光学报,2026,47(03):476-485.

LI Siqi,LEI Yuxin,CHEN Yongyi,et al.Multilayer Dielectric Film Optical Waveguide Based on Ta₂O₅[J].Chinese Journal of Luminescence,2026,47(03):476-485.
李思齐,雷宇鑫,陈泳屹等.基于Ta₂O₅的多层介质膜光波导[J].发光学报,2026,47(03):476-485. DOI： 10.37188/CJL.20250264. CSTR： 32170.14.CJL.20250264.

LI Siqi,LEI Yuxin,CHEN Yongyi,et al.Multilayer Dielectric Film Optical Waveguide Based on Ta₂O₅[J].Chinese Journal of Luminescence,2026,47(03):476-485. DOI： 10.37188/CJL.20250264. CSTR： 32170.14.CJL.20250264.

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Related Institution

State Key Laboratory of Luminescence Science and Technology， Changchun Institute of Optics， Fine Mechanics and Physics， Chinese Academy of Sciences

State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

中北大学仪器科学与动态测试教育部重点实验室电子测试技术国家重点实验室

山西大学物理电子工程学院

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

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Multilayer Dielectric Film Optical Waveguide Based on Ta2O5

DOI：10.37188/CJL.20250264

Multilayer Dielectric Film Optical Waveguide Based on Ta₂O₅