Vortex Light Output Based on Integrated Silicon Nitride Metasurface VCSEL
Device Fabrication and Physics|更新时间:2025-03-17
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Vortex Light Output Based on Integrated Silicon Nitride Metasurface VCSEL
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“The latest progress shows that integrated photonic device technology meets the market's demand for compact and efficient optoelectronic systems, promoting the development of optical metasurface technology. Experts have designed an 850 nm VCSEL based on Si3N4 nanoantenna array metasurface. By adjusting the structural parameters of the nanoantenna, phase coverage exceeding 2 π has been achieved, and vortex beams of different orders have been successfully generated, providing new ideas for optical metasurface control of VCSEL optical field technology.”
Chinese Journal of LuminescenceVol. 46, Issue 2, Pages: 326-333(2025)
作者机构:
1.长春理工大学 高功率半导体激光国家重点实验室, 吉林 长春 130022
2.长春理工大学 中山研究院, 广东 中山 528437
3.中国科学院半导体研究所 纳米光电子实验室, 北京 100083
作者简介:
基金信息:
Ministry of Science and Technology of the People’s Republic of China(2023YFB4604400);National Natural Science Foundation of China(12074045;62027820;61904017);Natural Science Foundation of Jilin Province(20230101352JC);The “111” Project of China(D17017)