氢气、氢气/硅烷等离子体时间分辨光发射谱的研究

张发荣; 张晓丹; AMANATIDES E; 赵颖

doi:10.3788/fgxb20194004.0528

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氢气、氢气/硅烷等离子体时间分辨光发射谱的研究

发光学应用及交叉前沿 | 更新时间：2020-08-12

- 氢气、氢气/硅烷等离子体时间分辨光发射谱的研究
- Time Resolved Optical Emission Spectrum for Hydrogen and Hydrogen/Silane Plasma
- 发光学报 2019年40卷第4期页码：528-534
- 作者机构：
  
  1. 天津职业大学生物与环境工程学院天津,300410
  2. 南开大学光电子薄膜器件与技术研究所, 光电信息技术科学教育部重点实验室(南开大学) 天津,300071
  3. 希腊帕特雷大学等离子体技术实验室, 希腊帕特雷,26500
- 作者简介：
- 基金信息：
  
  国家自然科学基金（60506003）;天津市自然科学基金（05YFJMJC01600）;天津职业大学校基金项目（20171101）资助
- DOI：10.3788/fgxb20194004.0528
  中图分类号： O461.2
- 纸质出版日期：2019-4-5，
  
  网络出版日期：2018-8-23，
  
  收稿日期：2018-5-1，
  
  修回日期：2018-8-5，
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张发荣, 张晓丹, AMANATIDES E等. 氢气、氢气/硅烷等离子体时间分辨光发射谱的研究[J]. 发光学报, 2019,40(4): 528-534

ZHANG Fa-rong, ZHANG Xiao-dan, AMANATIDES E etc. Time Resolved Optical Emission Spectrum for Hydrogen and Hydrogen/Silane Plasma[J]. Chinese Journal of Luminescence, 2019,40(4): 528-534
张发荣, 张晓丹, AMANATIDES E等. 氢气、氢气/硅烷等离子体时间分辨光发射谱的研究[J]. 发光学报, 2019,40(4): 528-534 DOI： 10.3788/fgxb20194004.0528.

ZHANG Fa-rong, ZHANG Xiao-dan, AMANATIDES E etc. Time Resolved Optical Emission Spectrum for Hydrogen and Hydrogen/Silane Plasma[J]. Chinese Journal of Luminescence, 2019,40(4): 528-534 DOI： 10.3788/fgxb20194004.0528.

摘要

为了加深对等离子体增强化学气相沉积的认识，采用增强型电荷耦合器件（ICCD）研究了氢气及氢气/硅烷混合气体在不同气压条件下的时间分辨光发射谱，获得了辉光放电等离子体瞬态微观动力学过程的清晰图像。纯氢气辉光条件下，在一个射频周期内，H

时间分辨光发射谱出现了4个峰。分析表明其中两个峰是由电子冲浪效应引起，额外两个峰的出现是由瞬时阳极时刻存在额外电场所致。另外，可观察到随着气压的增大，体欧姆加热效应增强。同氢气相比，当硅烷引入后，H

时间分辨光发射谱由原来4个明显发射峰变成了两个明显发射峰。

Abstract

The spatial and temporal resolved optical emission spectrum (OES) has been studied by ICCD for hydrogen and hydrogen/silane mixture gas

in order to deepen the understanding of the plasma enhanced chemical vapor deposition. Plasma clear microcosmic dynamics figures of instantaneous glow discharge have been obtained. In pure H

plasma

there appear four peaks in one radio frequency cycle. Two of these peaks are formed by electron wave-riding effect

and the other two peaks are caused by the extra electric field which is formed at the instantaneous anode. This phenomenon validates and extends the traditional radio frequency plasma discharge dynamics theory. In addition

from the picture

it can be found that the bulk Ohmic heating mechanism increases with pressure. When introducing the silane into the hydrogen

the four clear peaks change to two clear peaks.

关键词

等离子体光发射谱微观动力学

Keywords

plasmaoptical emission spectroscopymicrocosmic dynamics

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