厚度误差对THz-TDS的测量不确定度分析

董海龙; 汪家春; 刘瑞煌; 马冬晓; 赵大鹏

doi:10.3788/fgxb20194003.0382

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厚度误差对THz-TDS的测量不确定度分析

发光学应用及交叉前沿 | 更新时间：2020-08-12

- 厚度误差对THz-TDS的测量不确定度分析
- Analysis of Measurement Uncertainty in THz-TDS Carried by Thickness Error
- 发光学报 2019年40卷第3期页码：382-388
- 作者机构：
  
  国防科技大学电子对抗学院脉冲功率激光技术国家重点实验室,安徽合肥,230000
- 作者简介：
- 基金信息：
  
  脉冲功率激光技术国家重点实验室主任基金（SKL2016ZR05）;十三五计划预研项目（HJJ2017-0671）资助
- DOI：10.3788/fgxb20194003.0382
  中图分类号： O433.1
- 纸质出版日期：2019-3-5，
  
  网络出版日期：2018-8-20，
  
  收稿日期：2018-5-1，
  
  修回日期：2018-7-9，
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董海龙, 汪家春, 刘瑞煌等. 厚度误差对THz-TDS的测量不确定度分析[J]. 发光学报, 2019,40(3): 382-388

DONG Hai-long, WANG Jia-chun, LIU Rui-huang etc. Analysis of Measurement Uncertainty in THz-TDS Carried by Thickness Error[J]. Chinese Journal of Luminescence, 2019,40(3): 382-388
董海龙, 汪家春, 刘瑞煌等. 厚度误差对THz-TDS的测量不确定度分析[J]. 发光学报, 2019,40(3): 382-388 DOI： 10.3788/fgxb20194003.0382.

DONG Hai-long, WANG Jia-chun, LIU Rui-huang etc. Analysis of Measurement Uncertainty in THz-TDS Carried by Thickness Error[J]. Chinese Journal of Luminescence, 2019,40(3): 382-388 DOI： 10.3788/fgxb20194003.0382.

摘要

阐述了基于菲涅尔公式的透射式太赫兹时域光谱系统提取样品光学常数的方法和原理，分析了样品厚度误差对THz-TDS测量不确定度的影响，并建立了相应的不确定度模型。进行太赫兹时域光谱测量实验，提取硅片在太赫兹波段的折射率，并计算了误差对提取样品折射率的影响。结果表明，随着厚度误差的增大，系统测量偏差也随之增大。对于较厚样品，相同厚度误差对其测量结果影响较小。样品厚度为994 m时，在厚度存在1 m的测量误差情况下，系统测量折射率的偏差为0.001 2，接近模型的仿真值。实验结果验证了厚度误差对测量不确定度模型的有效性，了解了厚度误差对系统测量结果的影响情况，对测量过程及结果分析具有一定的指导意义。

Abstract

The method and theory of extracting the sample optical constants with terahertz time domain system(THz-TDS) based on Fresnel formulas were demonstrated

the effect on the uncertainty of THz-TDS due to the thickness error was analyzed

and the uncertainty model was established. The measurement experiment of THz-TDS was designed

the refractive index of silicon wafer in terahertz band was extracted and the effect of error on extracting refractive index of sample was computed. Experimental results indicate that the measurement deviation increases with the thickness error increasing. For thicker samples

it has less effect on the measurement result carried by the same thickness error. The deviation of the refractive index measured by the system under 1 m thickness error is 0.001 2 when the thickness of the sample is 994 m

which is close to the simulation value of the model. Experimental results verify the availability of thickness error uncertainty model in measurement process

show the influence of thickness error on the measurement result

and have certain guiding significance on measure process and result analysis.

关键词

太赫兹时域光谱系统光学常数厚度误差不确定度单晶硅

Keywords

terahertz time domain system(THz-TDS)optical constantsthickness erroruncertaintymonocrystalline silicon

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