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玉米蛋白质基底上射频磁控溅射法制备ZnO薄膜
Preparation of ZnO Thin Film on Zein by RF Magnetron Sputtering
- 发光学报 2018年39卷第10期 页码：1431-1438
- 作者机构：
1. 吉林建筑大学 吉林省建筑电气综合节能重点实验室,吉林 长春,130118
2. 吉林建筑大学 电气与计算机学院,吉林 长春,130118
- 作者简介：
- 基金信息：国家自然科学基金（51672103）();吉林省科技厅科研项目（20160204069GX，20170101111JC，20170520169JH）();吉林省教育厅科
DOI：10.3788/fgxb20183910.1431
中图分类号： TN209纸质出版日期：2018-10-5，
网络出版日期：2018-5-3，
收稿日期：2018-1-24，
修回日期：2018-3-7，
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杨帆, 王超, 周路等. 玉米蛋白质基底上射频磁控溅射法制备ZnO薄膜[J]. 发光学报, 2018,39(10): 1431-1438
YANG Fan, WANG Chao, ZHOU Lu etc. Preparation of ZnO Thin Film on Zein by RF Magnetron Sputtering[J]. Chinese Journal of Luminescence, 2018,39(10): 1431-1438
杨帆, 王超, 周路等. 玉米蛋白质基底上射频磁控溅射法制备ZnO薄膜[J]. 发光学报, 2018,39(10): 1431-1438 DOI： 10.3788/fgxb20183910.1431.
YANG Fan, WANG Chao, ZHOU Lu etc. Preparation of ZnO Thin Film on Zein by RF Magnetron Sputtering[J]. Chinese Journal of Luminescence, 2018,39(10): 1431-1438 DOI： 10.3788/fgxb20183910.1431.
摘要
采用射频磁控溅射方法在蛋白质基底上成功地制备了ZnO薄膜，研究了不同靶基距、氩氧比和溅射功率条件对ZnO薄膜性质的影响。结果表明，较小的靶基距有助于ZnO薄膜的
c
轴择优取向生长。我们还发现，沉积于玉米蛋白质基底的ZnO薄膜存在不同程度的张应力，当Ar/（Ar+O
2
）为0.7时，ZnO薄膜内的张应力最小。ZnO近带边发光峰有不同程度的红移，我们认为，这是由于晶界势垒和氧空位V
o
造成的。随着溅射功率的增大，薄膜生长速率显著加快，晶粒尺寸增大，ZnO的近带边发光峰位逐渐趋向于理论值。
Abstract
ZnO films were deposited on zein by radio frequency(RF) magnetron sputtering technique. We investigated the influences of deposition parameters
such as target-to-substrate distance
Ar/O
2
ratio and sputtering power on the properties of ZnO films. The results show that
c
-axis preferred orientation of ZnO films is obtained at small target-to-substrate distance. We also find that ZnO films deposited on zein is in a state of tensile stress
whereas the film deposited at Ar/(Ar+O
2
) ratio of 0.7 has the lowest tensile stress. The near-band-edge peaks of ZnO films in photoluminescence spectra show blueshifts. We speculate that the blueshifts are caused by the oxygen vacancy and the electrostatic potentials that exist at the grain boundaries. As the sputtering power increases
the deposition rate and the grain size of ZnO films increase
the near-band-edge peak of ZnO film shifts toward the theoretical value gradually.
关键词
氧化锌薄膜玉米蛋白膜磁控溅射X射线衍射光致发光谱
Keywords
ZnO filmszein filmsmagnetron sputteringX ray diffractionphotoluminescence spectrum
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