氢退火的BZO前电极对非晶硅薄膜太阳能电池性能的影响

唐鹿; 薛飞; 郭鹏; 罗哲; 李旺; 李晓敏; 刘石勇

doi:10.3788/fgxb20183906.0838

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氢退火的BZO前电极对非晶硅薄膜太阳能电池性能的影响

器件制备及器件物理 | 更新时间：2020-08-12

- 氢退火的BZO前电极对非晶硅薄膜太阳能电池性能的影响
- Effect of H Annealed BZO as Front Contact on Properties of Thin Films Amorphous Silicon Thin Film Solar Cells
- 发光学报 2018年39卷第6期页码：838-843
- 作者机构：
  
  1. 江西科技学院协同创新中心, 江西南昌 330098
  2. 南昌大学光伏研究院,江西南昌,330031
  3. 浙江正泰太阳能科技有限公司,浙江杭州,310053
- 作者简介：
- 基金信息：
  
  江西科技学院科研启动费项目（66号）();江西科技学院自然科学基金（16ZRYB10）();国家自然科学基金（21571095）资助项目()
- DOI：10.3788/fgxb20183906.0838
  中图分类号： TN304
- 纸质出版日期：2018-6-5，
  
  网络出版日期：2018-3-5，
  
  收稿日期：2017-10-10，
  
  修回日期：2017-11-27，
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唐鹿, 薛飞, 郭鹏等. 氢退火的BZO前电极对非晶硅薄膜太阳能电池性能的影响[J]. 发光学报, 2018,39(6): 838-843

TANG Lu, XUE Fei, GUO Peng etc. Effect of H Annealed BZO as Front Contact on Properties of Thin Films Amorphous Silicon Thin Film Solar Cells[J]. Chinese Journal of Luminescence, 2018,39(6): 838-843
唐鹿, 薛飞, 郭鹏等. 氢退火的BZO前电极对非晶硅薄膜太阳能电池性能的影响[J]. 发光学报, 2018,39(6): 838-843 DOI： 10.3788/fgxb20183906.0838.

TANG Lu, XUE Fei, GUO Peng etc. Effect of H Annealed BZO as Front Contact on Properties of Thin Films Amorphous Silicon Thin Film Solar Cells[J]. Chinese Journal of Luminescence, 2018,39(6): 838-843 DOI： 10.3788/fgxb20183906.0838.

摘要

采用低压化学气相沉积方法在玻璃衬底上制备了B掺杂的ZnO（BZO）薄膜，通过氢退火对BZO进行处理，然后作为前电极进行了非晶硅薄膜太阳能电池的制备及性能研究。结果表明：在氢气气氛下退火后，BZO薄膜的载流子浓度基本无变化，但Hall迁移率显著提高，这使得BZO薄膜的导电能力提高；当采用厚度较小、透光率较高的BZO薄膜进行氢退火后作为前电极结构时，非晶硅薄膜太阳能电池的短路电流密度提高0.3~0.4 mA/cm

，电池的转化效率提高0.2%。实验结果可为通过优化前电极结构来提高非晶硅薄膜太阳能电池转化效率提供一种简易的方法。

Abstract

B doped ZnO(BZO) films were prepared on glass substrate by low pressure chemical vapor deposition(LPCVD) method. BZO films were annealed in hydrogen atmosphere and then were used as front contact structure for fabrication of amorphous silicon thin film solar cells. The results show that the carrier concentration of BZO films has no change after annealing in the hydrogen atmosphere

but the carrier mobility dramatically increases

which lead to great enhancement of electrical conductivity of BZO films. When a thinner BZO film with higher transmittance workes as the front contact structure

the light-generated current density increases by 0.3-0.4 mA/cm

and the conversion efficiency of amorphous silicon thin film solar cells is improved by 0.2%. The results in this paper can provide a method for further improving the conversion efficiency of amorphous silicon thin film solar cells by optimizing optical and electrical properties of front contact of BZO thin films.

关键词

BZO薄膜前电极透光率非晶硅薄膜太阳能电池转化效率

Keywords

BZO thin filmfront contacttransmittanceamorphous silicon thin film solar cellsconversion efficiency

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