基于Al2O3封装薄膜的OLED水汽透过率测试方法及系统研究

段玮; 李晟; 张浩; 张志林; 张建华

doi:10.3788/fgxb20163701.0088

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基于Al₂O₃封装薄膜的OLED水汽透过率测试方法及系统研究

器件制备及器件物理 | 更新时间：2020-08-12

- 基于Al₂O₃封装薄膜的OLED水汽透过率测试方法及系统研究
- Test Method and System of Water Vapor Transmission Rate Based on Al₂O₃ Encapsulated Thin-film for OLEDs
- 发光学报 2016年37卷第1期页码：88-93
- 作者机构：
  
  1. 上海大学机电工程与自动化学院上海,200072
  2. 上海大学新型显示技术及应用集成教育部重点实验室上海,200072
- 作者简介：
- 基金信息：
  
  国家重点基础研究发展计划(973计划)(2015CB655005)();上海市优秀学术带头人(14XD1401800)();上海市平板显示工程技术研究中心(14DZ22
- DOI：10.3788/fgxb20163701.0088
  中图分类号： TN383+.1;TP274
- 纸质出版日期：2016-1-10，
  
  收稿日期：2015-10-8，
  
  修回日期：2015-11-20，
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段玮, 李晟, 张浩等. 基于Al2O3封装薄膜的OLED水汽透过率测试方法及系统研究[J]. 发光学报, 2016,37(1): 88-93

DUAN Wei, LI Sheng, ZHANG Hao etc. Test Method and System of Water Vapor Transmission Rate Based on Al2O3 Encapsulated Thin-film for OLEDs[J]. Chinese Journal of Luminescence, 2016,37(1): 88-93
段玮, 李晟, 张浩等. 基于Al2O3封装薄膜的OLED水汽透过率测试方法及系统研究[J]. 发光学报, 2016,37(1): 88-93 DOI： 10.3788/fgxb20163701.0088.

DUAN Wei, LI Sheng, ZHANG Hao etc. Test Method and System of Water Vapor Transmission Rate Based on Al2O3 Encapsulated Thin-film for OLEDs[J]. Chinese Journal of Luminescence, 2016,37(1): 88-93 DOI： 10.3788/fgxb20163701.0088.

摘要

水汽透过率(WVTR)是衡量有机电致发光器件(OLED)封装薄膜性能的重要参数之一。本文研究了基于钙电学法的WVTR测试方法

设计并研制了可满足OLED水汽透过率测试精度和功能要求的测试系统

测试精度达110

-6

-2

-1

量程为10 gm

-2

-1

可同时完成20个样品的快速、精确测量。利用本系统对采用原子层沉积技术制备的不同厚度Al

封装薄膜的WVTR进行了测试研究

结果表明

薄膜具有良好的水汽阻挡性能。

Abstract

For encapsulated thin film of the organic light emitting devices and flexible electronic devices

water vapor transmission rate (WVTR) is one of the most important parameters to evaluate the performance of thin film. In this paper

the method of calcium electrical test was studied. Based on this method

a new type of water vapor transmission measurement system was designed and developed

which can meet the requirement of accuracy and rapidity for WVTR testing of OLED. The results show that the precision of the system is 110

-6

-2

-1

and the range is 10 gm

-2

-1

. The system can measure 20 samples rapidly and accurately at the same time. Deposited by atomic layer deposition

the WVTR of the different thickness Al

thin films encapsulated layers (TFE) were studied. The results show that Al

thin film has low water vapor barrier properties.

关键词

有机电致发光器件水汽透过率钙电学测量法多通道测试系统薄膜封装

Keywords

organic light emitting deviceswater vapor transmission rateelectrical calcium testmulti-channel measurement systemthin film encapsulation

references

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崔荣朕,唐艳茹,马玉芹,等. 蓝色有机电致发光材料及器件的研究进展 [J]. 应用化学, 2015, 32(8):855-872. CUI R Z, TANG Y R, MA Y Q, et al.. Research progress of investigation on organic blue materials and diodes [J]. Chin. J. Appl. Chem., 2015, 32(8):855-872. (in Chinese)

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EUN H S, YOUNG W P, JIN H C. The flexible Ca-test:An improved performance in a gas permeability measurement system [J]. Rev. Sci. Instrum., 2011, 82(5):054702-1-7.

SCHUBERT S, KLUMBIES H, MVLLER-MESKAMP L, et al.. Electrical calcium test for moisture barrier evaluation for organic devices [J]. Rev. Sci. Instrum., 2011, 82(9):094101-1-8.

KEMPEl M D, REESE M O. Evaluation of the sensitivity limits of water vapor transmission rate measurements using electrical calcium test [J]. Rev. Sci. Instrum., 2013, 84(2):025109-1-6.

CROS S, FIRON M, LENFANT S, et al.. Internal sensor compensation for increased Ca test sensitivity [J]. Rev. Sci. Instrum., 2014, 85(7):075102-1-6.

ZHANG H, DING H, WEI M J, et al.. Thin film encapsulation for organic light-emitting diodes using inorganic/organic hybrid layers by atomic layer deposition [J]. Nanoscale Res. Lett., 2015, 10:169-175.

JIN S P, H C, H K C, et al.. Thin film encapsulation for flexible AM-OLED:a review [J]. Semicond. Sci. Technol. , 2011, 26(3):034001-1-6.

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