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1. 上海大学 机电工程与自动化学院 上海,200072
2. 上海大学 新型显示技术及应用集成教育部重点实验室 上海,200072
纸质出版日期:2016-1-10,
收稿日期:2015-10-8,
修回日期:2015-11-20,
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段玮, 李晟, 张浩等. 基于Al<sub>2</sub>O<sub>3</sub>封装薄膜的OLED水汽透过率测试方法及系统研究[J]. 发光学报, 2016,37(1): 88-93
DUAN Wei, LI Sheng, ZHANG Hao etc. Test Method and System of Water Vapor Transmission Rate Based on Al<sub>2</sub>O<sub>3</sub> Encapsulated Thin-film for OLEDs[J]. Chinese Journal of Luminescence, 2016,37(1): 88-93
段玮, 李晟, 张浩等. 基于Al<sub>2</sub>O<sub>3</sub>封装薄膜的OLED水汽透过率测试方法及系统研究[J]. 发光学报, 2016,37(1): 88-93 DOI: 10.3788/fgxb20163701.0088.
DUAN Wei, LI Sheng, ZHANG Hao etc. Test Method and System of Water Vapor Transmission Rate Based on Al<sub>2</sub>O<sub>3</sub> Encapsulated Thin-film for OLEDs[J]. Chinese Journal of Luminescence, 2016,37(1): 88-93 DOI: 10.3788/fgxb20163701.0088.
水汽透过率(WVTR)是衡量有机电致发光器件(OLED)封装薄膜性能的重要参数之一。本文研究了基于钙电学法的WVTR测试方法
设计并研制了可满足OLED水汽透过率测试精度和功能要求的测试系统
测试精度达110
-6
gm
-2
d
-1
量程为10 gm
-2
d
-1
可同时完成20个样品的快速、精确测量。利用本系统对采用原子层沉积技术制备的不同厚度Al
2
O
3
封装薄膜的WVTR进行了测试研究
结果表明
Al
2
O
3
薄膜具有良好的水汽阻挡性能。
For encapsulated thin film of the organic light emitting devices and flexible electronic devices
water vapor transmission rate (WVTR) is one of the most important parameters to evaluate the performance of thin film. In this paper
the method of calcium electrical test was studied. Based on this method
a new type of water vapor transmission measurement system was designed and developed
which can meet the requirement of accuracy and rapidity for WVTR testing of OLED. The results show that the precision of the system is 110
-6
gm
-2
d
-1
and the range is 10 gm
-2
d
-1
. The system can measure 20 samples rapidly and accurately at the same time. Deposited by atomic layer deposition
the WVTR of the different thickness Al
2
O
3
thin films encapsulated layers (TFE) were studied. The results show that Al
2
O
3
thin film has low water vapor barrier properties.
有机电致发光器件水汽透过率钙电学测量法多通道测试系统薄膜封装
organic light emitting deviceswater vapor transmission rateelectrical calcium testmulti-channel measurement systemthin film encapsulation
杨永强,段羽,陈平,等. 低温原子层沉积氧化铝作为有机电致发光器件的封装薄膜 [J]. 发光学报, 2014, 35(9):1087-1092. YANG Y Q, DUAN Y, CHEN P, et al.. Deposition of Al2O3 film using atomic layer deposition method at low temperature as encapsulation layer for OLEDs [J]. Chin. J. Lumin., 2014, 35(9):1087-1092. (in Chinese)
崔荣朕,唐艳茹,马玉芹,等. 蓝色有机电致发光材料及器件的研究进展 [J]. 应用化学, 2015, 32(8):855-872. CUI R Z, TANG Y R, MA Y Q, et al.. Research progress of investigation on organic blue materials and diodes [J]. Chin. J. Appl. Chem., 2015, 32(8):855-872. (in Chinese)
RIEDE M, MUELLER T, TRESSW, et al.. Small-molecule solar cells-status and perspectives [J]. Nanotechnology, 2008, 19(42):424001-1-6.
李玉霞,孟浩然,张斌,等. 基于LabView的伺服转台Stribeck摩擦测量系统 [J]. 液晶与显示, 2015, 30(1):180-185. LI Y X, MENG H R, ZHANG B, et al.. Stribeck friction measure system of serco table based on LABVIEW [J]. Chin. J. Liq. Cryst. Disp., 2015, 30(1):180-185. (in Chinese).
EUN H S, YOUNG W P, JIN H C. The flexible Ca-test:An improved performance in a gas permeability measurement system [J]. Rev. Sci. Instrum., 2011, 82(5):054702-1-7.
SCHUBERT S, KLUMBIES H, MVLLER-MESKAMP L, et al.. Electrical calcium test for moisture barrier evaluation for organic devices [J]. Rev. Sci. Instrum., 2011, 82(9):094101-1-8.
KEMPEl M D, REESE M O. Evaluation of the sensitivity limits of water vapor transmission rate measurements using electrical calcium test [J]. Rev. Sci. Instrum., 2013, 84(2):025109-1-6.
CROS S, FIRON M, LENFANT S, et al.. Internal sensor compensation for increased Ca test sensitivity [J]. Rev. Sci. Instrum., 2014, 85(7):075102-1-6.
ZHANG H, DING H, WEI M J, et al.. Thin film encapsulation for organic light-emitting diodes using inorganic/organic hybrid layers by atomic layer deposition [J]. Nanoscale Res. Lett., 2015, 10:169-175.
JIN S P, H C, H K C, et al.. Thin film encapsulation for flexible AM-OLED:a review [J]. Semicond. Sci. Technol. , 2011, 26(3):034001-1-6.
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