高功率密度激光二极管叠层散热结构的热分析

井红旗; 仲莉; 倪羽茜; 张俊杰; 刘素平; 马骁宇

doi:10.3788/fgxb20163701.0081

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高功率密度激光二极管叠层散热结构的热分析

器件制备及器件物理 | 更新时间：2020-08-12

- 高功率密度激光二极管叠层散热结构的热分析
- Thermal Analysis of High Power Density Laser Diode Stack Cooling Structure
- 发光学报 2016年37卷第1期页码：81-87
- 作者机构：
  
  中国科学院半导体研究所光电子器件国家工程研究中心, 北京 100083
- 作者简介：
- 基金信息：
  
  国防基础科研计划(B1320133033)资助项目()
- DOI：10.3788/fgxb20163701.0081
  中图分类号： TN248.4
- 纸质出版日期：2016-1-10，
  
  收稿日期：2015-8-25，
  
  修回日期：2015-11-10，
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井红旗, 仲莉, 倪羽茜等. 高功率密度激光二极管叠层散热结构的热分析[J]. 发光学报, 2016,37(1): 81-87

JING Hong-qi, ZHONG Li, NI Yu-xi etc. Thermal Analysis of High Power Density Laser Diode Stack Cooling Structure[J]. Chinese Journal of Luminescence, 2016,37(1): 81-87
井红旗, 仲莉, 倪羽茜等. 高功率密度激光二极管叠层散热结构的热分析[J]. 发光学报, 2016,37(1): 81-87 DOI： 10.3788/fgxb20163701.0081.

JING Hong-qi, ZHONG Li, NI Yu-xi etc. Thermal Analysis of High Power Density Laser Diode Stack Cooling Structure[J]. Chinese Journal of Luminescence, 2016,37(1): 81-87 DOI： 10.3788/fgxb20163701.0081.

摘要

高功率窄间距列阵叠层是提高激光二极管泵浦源光功率密度的有效途径

而封装散热热沉的结构设计在其热管理上占据至关重要的作用。本文利用ANSYS有限元分析方法

对叠层间距、绝缘陶瓷厚度以及陶瓷底面与散热恒温面距离等几个影响高功率密度激光二极管叠层封装散热的重要因素进行了分析

得到器件的最高温度随结构参数变化的规律

并对上述参数进行优化。最后

利用优化结果设计出一种适用于高功率密度激光二极管叠层泵浦源的高效有源散热热沉结构

大幅提高了器件的散热能力

并降低了所需冷却水的水泵功耗需求。

Abstract

High-power narrow spacing array stack is an effective solution to improve the power density of diode laser pumping sources

and its heat-sink structural design for package plays a vital role in cooling capacity management. Several important factors affecting thermal effect

such as stack spacing

ceramic thickness

the distance between ceramic and heat-sink thermostatic surface

etc.

were analyzed in this paper. The maximum temperature rises of the devices under different structure parameters were simulated using ANSYS finite element analysis method to get the variation laws and optimize these three parameters. According to the optimization results

an efficient cooling heat-sink structure suitable for high power density laser diode stack pumping source was designed. It can significantly improve the cooling effect and reduce consumption of cooling water pump-power.

关键词

激光器ANSYS热模拟热沉温度

Keywords

laserANSYS thermal analysisheat sinktemperature

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