霍尔离子源辅助制备长波红外碳化锗增透膜

王彤彤

doi:10.3788/fgxb20133403.0319

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霍尔离子源辅助制备长波红外碳化锗增透膜

器件制备及器件物理 | 更新时间：2020-08-12

- 霍尔离子源辅助制备长波红外碳化锗增透膜
- Fabrication of The Long-wave Infrared Germanium Carbide Antireflection Coatings by End-Hall Ion Source
- 发光学报 2013年34卷第3期页码：319-323
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所光学系统先进制造技术重点实验室,吉林长春,130033
- 作者简介：
  
  [ "王彤彤(1979-), 男, 吉林长春人, 博士, 主要从事光学薄膜的理论及制备的研究。 E-mail: wangtongtong@126.com, Tel: (0431)86176033" ]
- 基金信息：
  
  国家自然科学基金(60478035)资助项目()
- DOI：10.3788/fgxb20133403.0319
  中图分类号： O484;TN304
- 纸质出版日期：2013-3-10，
  
  收稿日期：2012-12-7，
  
  修回日期：2013-1-20，
扫描看全文
王彤彤. 霍尔离子源辅助制备长波红外碳化锗增透膜[J]. 发光学报, 2013,34(3): 319-323

WANG Tong-tong. Fabrication of The Long-wave Infrared Germanium Carbide Antireflection Coatings by End-Hall Ion Source[J]. Chinese Journal of Luminescence, 2013,34(3): 319-323
王彤彤. 霍尔离子源辅助制备长波红外碳化锗增透膜[J]. 发光学报, 2013,34(3): 319-323 DOI： 10.3788/fgxb20133403.0319.

WANG Tong-tong. Fabrication of The Long-wave Infrared Germanium Carbide Antireflection Coatings by End-Hall Ion Source[J]. Chinese Journal of Luminescence, 2013,34(3): 319-323 DOI： 10.3788/fgxb20133403.0319.

摘要

为了提高锗基底的透过率和环境适应性

镀制了增透保护膜。应用电子枪蒸发加霍尔离子源辅助的方法沉积了碳化锗(Ge

)薄膜。通过固定霍尔离子源参数

控制沉积速率的工艺得到了不同光学常数的碳化锗薄膜。X射线衍射(XRD)测试表明

所制备的碳化锗薄膜在不同的沉积速率下均为无定形结构。采用傅立叶变换红外(FTIR)光谱仪测量了试片的透过率

使用包络法获得了相应工艺条件下的光学常数。在锗基底上双面镀制碳化锗增透膜后

长波红外7.5～11.5 m波段的平均透过率

ave

85%。经过环境实验之后的碳化锗膜层完好

证明碳化锗增透膜具有良好的环境适应性。

Abstract

The antireflective and protective coatings were deposited on the germanium substrates to improve the transmittance and the environmental adaptability. The germanium carbide (Ge

) coatings were successfully fabricated.The pure germanium was evaporated by the e-gun

and the methane was directly ionized by End-Hall ion source.The different optical constants of the germanium carbide coatings were obtained by controlling the deposition rate and fixing End-Hall ion source parameters. The germanium carbide coatings with different deposition rates were all amorphous tested by X-ray diffraction. The optical constants were calculated by the envelope method from the transmittance data measured by Fourier transform infrared (FTIR) spectrometer. After double-side depositing the germanium carbide coatings on the germanium substrate

an average transmittance

ave

85% was achieved in the long-wave infrared region of 7.5～11.5 m. After the environment tests

the germanium carbide coating was fine

this indicates the germanium carbide coating has great environmental adaptability.

关键词

碳化锗长波红外增透膜离子辅助霍尔离子源

Keywords

germanium carbidelong-wave infrared antireflection coatingsion source assistingEnd-Hall ion source

references

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