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1. 大连理工大学 物理与光电学院,辽宁 大连,116024
2. 江苏新广联科技股份有限公司, 江苏 无锡 214192
3. 吉林大学电子科学与工程学院 集成光电子国家重点实验室, 吉林 长春 130012
4. 中国科学院上海微系统与信息研究所 信息功能材料国家重点实验室 上海,200050
纸质出版日期:2013-2-10,
收稿日期:2012-11-20,
修回日期:2012-12-8,
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王东盛, 郭文平, 张克雄, 梁红伟, 宋世巍, 杨德超, 申人升, 柳阳, 夏晓川, 骆英民, 杜国同. 400 nm高性能紫光LED的制作与表征[J]. 发光学报, 2013,34(2): 225-229
WANG Dong-sheng, GUO Wen-ping, ZHANG Ke-xiong, LIANG Hong-wei, SONG Shi-wei, YANG De-chao, SHEN Ren-sheng, LIU Yang, XIA Xiao-chuan, LUO Ying-min, DU Guo-tong. Fabrication of High-performance 400 nm Violet Light Emitting Diode[J]. Chinese Journal of Luminescence, 2013,34(2): 225-229
王东盛, 郭文平, 张克雄, 梁红伟, 宋世巍, 杨德超, 申人升, 柳阳, 夏晓川, 骆英民, 杜国同. 400 nm高性能紫光LED的制作与表征[J]. 发光学报, 2013,34(2): 225-229 DOI: 10.3788/fgxb20133402.0225.
WANG Dong-sheng, GUO Wen-ping, ZHANG Ke-xiong, LIANG Hong-wei, SONG Shi-wei, YANG De-chao, SHEN Ren-sheng, LIU Yang, XIA Xiao-chuan, LUO Ying-min, DU Guo-tong. Fabrication of High-performance 400 nm Violet Light Emitting Diode[J]. Chinese Journal of Luminescence, 2013,34(2): 225-229 DOI: 10.3788/fgxb20133402.0225.
利用金属有机物化学气相沉积技术在蓝宝石衬底表面制备了带有p-AlGaN电子阻挡层的400 nm高性能紫光InGaN多量子阱发光二极管。制作了3种紫光LED
分别带有不同p-AlGaN电子阻挡层结构:Al摩尔分数为9%的p-AlGaN电子阻挡层;Al摩尔分数为11%的p-AlGaN电子阻挡层;Al摩尔分数为20%的10对p-AlGaN/GaN超晶格电子阻挡层。带有高浓度Al电子阻挡层的紫光LED的光输出功率高于低浓度Al电子阻挡层的紫光LED。带有10对p-AlGaN/GaN超晶格电子阻挡层的紫光LED的光输出功率获得了极大的提高
在20 mA注入电流时测试得到的光输出功率为21 mW。此外
该LED同时显示了在高注入电流下接近线性的I-L特性曲线和在LED芯片表面均匀的发光强度分布。
High-performance 400 nm violet InGaN multi-quantum-wells light-emitting diodes (LED) with p-AlGaN electron blocking layer were fabricated on sapphire substrate by metal organic chemical vapor deposition technique. Different kinds of p-AlGaN electron blocking layers were grown in three violet LEDs: bulk p-AlGaN with Al mole fraction of 9%
bulk p-AlGaN with Al mole fraction of 11% and super lattice p-AlGaN/GaN with Al mole fraction of 20%. The output power of violet LED with bulk p-AlGaN(11%) is higher than the LED with bulk p-AlGaN(9%). Typically
the output power of the LED with 10 pairs of p-AlGaN/GaN super lattice electron blocking layer has been greatly improved. A LED with an output power of 21 mW at an injection current of 20 mA is achieved. In additional
the LED also shows an almost linear I-L characteristics at high injection current and uniform intensity mapping on LED chip surface.
金属有机物化学气相沉积紫光发光二极管GaN发光二极管电子阻挡层超晶格
metal organic chemical vapor depositionviolet light emitting diodesGaN light emitting diodeselectron blocking layersuper lattice
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