ZHANG Jian-nan, LI Yan-tao, FAN Yi, LIU Xing-yuan. Study of New Transparent Conductive Film with Erbium Fluoride Doped Indium Oxide[J]. Chinese Journal of Luminescence, 2012,33(12): 1295-1298
ZHANG Jian-nan, LI Yan-tao, FAN Yi, LIU Xing-yuan. Study of New Transparent Conductive Film with Erbium Fluoride Doped Indium Oxide[J]. Chinese Journal of Luminescence, 2012,33(12): 1295-1298 DOI: 10.3788/fgxb20123312.1295.
doped indium oxide (IEFO) transparent conductive film was fabricated by electron beam evaporation. The optical
electrical characteristics and crystal structure of the IEFO film were studied. The IEFO film is polycrystalline structure
the introduction of Er changes the preferred orientation of lattice and makes the growth tendency of the (211)
(222)
(444) similar. The IEFO film shows a resistivity of 1.265×10
-3
Ω·cm
a carrier mobility of 45.76 cm
2
·V
-1
·s
-1
a carrier concentration of 1.197×10
20
cm
-3
and the optical transmittance of 81% at the range of 380~780 nm. The surface morphology of IEFO film in different thickness was tested by atomic force microscope and the growth process was discussed.
关键词
透明导电薄膜形貌氧化铟
Keywords
transparent conductive filmmorphologyIn2O3
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