短脉冲激光加工双温方程的优化运算

金方圆; 鄂书林; 王海峰; 陈波

doi:10.3788/fgxb20123310.1143

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短脉冲激光加工双温方程的优化运算

器件制备及器件物理 | 更新时间：2020-08-12

- 短脉冲激光加工双温方程的优化运算
- Calculation of An Optimized Two Temperature Model for Ultra-short Laser Ablation
- 发光学报 2012年33卷第10期页码：1143-1148
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
  2. 中国科学院大学北京,100049
- 作者简介：
- 基金信息：
  
  国家自然科学基金(10878004/A03)资助项目()
- DOI：10.3788/fgxb20123310.1143
  中图分类号： TN241
- 纸质出版日期：2012-10-10，
  
  收稿日期：2012-6-26，
  
  修回日期：2012-7-28，
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金方圆, 鄂书林, 王海峰, 陈波. 短脉冲激光加工双温方程的优化运算[J]. 发光学报, 2012,(10): 1143-1148

JIN Fang-yuan, E Shu-lin, WANG Hai-feng, CHEN Bo. Calculation of An Optimized Two Temperature Model for Ultra-short Laser Ablation[J]. Chinese Journal of Luminescence, 2012,(10): 1143-1148
金方圆, 鄂书林, 王海峰, 陈波. 短脉冲激光加工双温方程的优化运算[J]. 发光学报, 2012,(10): 1143-1148 DOI： 10.3788/fgxb20123310.1143.

JIN Fang-yuan, E Shu-lin, WANG Hai-feng, CHEN Bo. Calculation of An Optimized Two Temperature Model for Ultra-short Laser Ablation[J]. Chinese Journal of Luminescence, 2012,(10): 1143-1148 DOI： 10.3788/fgxb20123310.1143.

摘要

为研究双温方程中电子热传导项和电子与晶格耦合项对激光辐照物体表面温度场求解的影响

对这两项施加了约束条件。由于飞秒和亚皮秒激光与物质相互作用时间短

电子与晶格来不及耦合

所以对耦合项施加时间约束;根据相分离条件(CPPS)

对热传导项施加空间约束。利用有限元方法建立了激光烧蚀金属铜膜表面的有限元模型。通过分析双温方程中热传导项和耦合项对计算结果的影响

发现短脉冲激光与铜金属相互作用过程中电子与晶格耦合项可以忽略

而传导项不可忽略。求解适当激光功率下的双温方程

得到了激光作用中心电子与晶格在不同脉冲宽度激光辐照下的温度变化关系。根据100fs激光作用后晶格温度场的空间分布情况

研究了激光作用的相分离区域、相爆炸区域以及熔融区域的分布情况。

Abstract

Since the pulse duration of femtosecond and sub-picosecond laser are quite short

the electrons and lattice in material cant couple in time when the sample is irradiated by ultra-short pulse laser.According to critical-point phase separation (CPPS) theory and actual laser ablation process

the thermal conductivity in the model can be restricted regionally.Based on aforementioned analysis

an optimized two temperature model (TTM) is formulated

which provides a new perspective into the energy transport process during ultrashort single pulse laser ablation.Using finite element analysis (FEA) software

a model which exhibits the cuprum film sample irradiated by ultrashort pulse laser is proposed.Taking account of symmetrical spatial shape of Gaussian distribution laser on the sample

part of the model is used to calculate simply.According to calculation

the electron-lattice coupling and thermal conduction transient parts in the optimized TTM are analyzed separately.The results indicate that

during ultra-short laser irradiating on cuprum film

the coupling item can be neglected

but the conduction item cant be neglected.The conduction item plays a major role during femtosecond and sub-picosecond laser irradiating on cuprum

while the electron-lattice coupling item plays a major part after laser's effect.With finite element method (FEM)

the optimized 1D and 2D TTM model are calculated.For the purpose of ablating sample

suitable laser pulse fluence of 100 fs

300 fs

1 ps

2 ps are applied.The electron and lattice transient temperature distribution evolutions along time in the centre of laser irradiated zone are obtained.For further analysis

according to the spatial lattice temperature distribution

phase separation zone

phase explosion zone and melting zone are calculated.

关键词

短脉冲激光双温方程有限元相分离(CPPS)

Keywords

ultra-short laser pulsetwo temperature model (TTM)finite element method (FEM)critical-point phase separation(CPPS)

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