轴向填充率渐变型二维光子晶体

周建伟; 梁静秋; 梁中翥; 王维彪

doi:10.3788/fgxb20123310.1112

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轴向填充率渐变型二维光子晶体

器件制备及器件物理 | 更新时间：2020-08-12

- 轴向填充率渐变型二维光子晶体
- Axially Filling Rate Graded Two-dimensional Photonic Crystals
- 发光学报 2012年33卷第10期页码：1112-1119
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130033
  2. 中国科学院大学, 北京 100039
- 作者简介：
- 基金信息：
  
  国家自然科学基金(60877031)资助项目()
- DOI：10.3788/fgxb20123310.1112
  中图分类号： O431.1
- 纸质出版日期：2012-10-10，
  
  收稿日期：2012-7-4，
  
  修回日期：2012-8-14，
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周建伟, 梁静秋, 梁中翥, 王维彪. 轴向填充率渐变型二维光子晶体[J]. 发光学报, 2012,(10): 1112-1119

ZHOU Jian-wei, LIANG Jing-qiu, LIANG Zhong-zhu, WANG Wei-biao. Axially Filling Rate Graded Two-dimensional Photonic Crystals[J]. Chinese Journal of Luminescence, 2012,(10): 1112-1119
周建伟, 梁静秋, 梁中翥, 王维彪. 轴向填充率渐变型二维光子晶体[J]. 发光学报, 2012,(10): 1112-1119 DOI： 10.3788/fgxb20123310.1112.

ZHOU Jian-wei, LIANG Jing-qiu, LIANG Zhong-zhu, WANG Wei-biao. Axially Filling Rate Graded Two-dimensional Photonic Crystals[J]. Chinese Journal of Luminescence, 2012,(10): 1112-1119 DOI： 10.3788/fgxb20123310.1112.

摘要

提出了一种轴向填充率渐变型二维三角晶格方空气孔光子晶体

由锥形孔周期性排布而成

在第三维也就是沿空气孔的轴向

空气孔的尺寸连续改变

实现了填充率渐变

填充率

范围为0.700~0.866。经过模拟

在归一化波长(

λ/a

)的1.43~2.71和3.41~4.00波段

轴向填充率渐变型光子晶体可以将光向填充率小的方向偏折

具有选光功能。采用电化学腐蚀与MEMS工艺相结合的方式

在p型(100)硅基底上制作了轴向填充率渐变型二维三角晶格方孔光子晶体

整个孔的填充率

在0.800~0.866范围内。

Abstract

This paper presents a kind of axially filling-factor graded 2D triangular lattice air holes photonic crystals.The PC is periodically composed of conical holes.The size of air holes continuously changes along the axis of air holes.The filling-factor changes from 0.700 to 0.866.Simulation results show that in range of normalized wavelength (

λ/a

) 1.43~2.71 and 3.41~4.00

the horizontal incident light is deflected to the bottom of photonic crystals as well as the small filling rate part.The sample has the function of splitting light.And axially filling-factor graded 2D triangular lattice air holes photonic crystals are prepared on p-Si(100) wafers by electrochemical etching and MEMS technique

the filling rate ranging from 0.800 to 0.866.

关键词

二维光子晶体轴向填充率渐变电化学腐蚀

Keywords

two-dimensional photonic crystalsaxially filling-factor gradedelectrochemical etching

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Chen H B,Hu S M,Gao Y J.Multiple channeled filters and optical switches using compound photonic crystal with two symmetrical defect layer at the two ports [J]. Chin.J.Lumin.(发光学报),2010,31(1):7-11 (in Chinese).《中国光学》征稿启事《中国光学》,双月刊,A4开本;刊号:ISSN 2095-1531/CN22-1400/O4;国内外公开发行,邮发代号:国内12-140,国外BM6782。★中国科技核心期刊 ★中国光学学会会刊★中国学术期刊(光盘版)源期刊 ★万方数字化期刊全文数据库源期刊★中国科技期刊数据库源期刊★美国《化学文摘》(CA)源期刊★美国乌利希国际期刊指南(Ulrich LPD)源期刊★俄罗斯《文摘杂志》(AJ)源期刊★波兰《哥白尼索引》(IC)源期刊报道内容:基础光学、发光理论与发光技术、光谱学与光谱技术、激光与激光技术、集成光学与器件、纤维光学与器件、光通信、薄膜光学与技术、光电子技术与器件、信息光学、新型光学材料、光学工艺、现代光学仪器与光学测试、光学在其他领域的应用等。发稿类型:学术价值显著、实验数据完整的原创性论文;研究前景广阔,具有实用、推广价值的技术报告;有创新意识,能够反映当前先进水平的阶段性研究简报;对当前学科领域的研究热点和前沿问题的专题报告;以及综合评述国内外光学技术研究现状、发展动态和未来发展趋势的综述性论文。欢迎投稿、荐稿,洽谈合作。主管单位:中国科学院主办单位:中国科学院长春光学精密机械与物理研究所编辑出版:《中国光学》编辑部投稿网址:http://www.chineseoptics.net.cn 邮件地址:chineseoptics@ciomp.ac.cn,zggxcn@126.com 联系电话:(0431)86176852;(0431)84627061 传真:(0431)84613409 编辑部地址:长春市东南湖大路3888号(130033) 《中国光学》编辑部

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