Al<sub>2</sub>O<sub>3</sub>/PMMA交叠薄膜制备及OLED封装性能

周雄图; 陈桂雄; 孙钒; 吴朝兴; 郭太良; 张永爱

doi:10.37188/CJL.20200325

您当前的位置：

首页 >

文章列表页 >

Al₂O₃/PMMA交叠薄膜制备及OLED封装性能

发光产业及技术前沿 | 更新时间：2021-01-12

- Al₂O₃/PMMA交叠薄膜制备及OLED封装性能
- Fabrication of Al₂O₃/PMMA Laminates and Its Barrier Performance in OLED Encapsulation
- 发光学报 2021年42卷第1期页码：118-125
- 作者机构：
  
  1.福州大学物理与信息工程学院, 福建福州 350116
  2.中国福建光电信息科学与技术创新实验室, 福建福州 350116
- 作者简介：
  
  周雄图(1982-), 男, 福建晋江人, 博士, 教授, 2010年于华东师范大学获得博士学位, 主要从事光电显示技术与器件的研究。E-mail:xtzhou@fzu.edu.cn
  张永爱(1977-), 男, 江西永丰人, 博士, 研究员, 2011年于福州大学获得博士学位, 主要从事新型显示材料与器件的研究。E-mail:yongaizhang@fzu.edu.cn
- 基金信息：
  
  国家自然科学基金(61775038);福建省高等学校新世纪优秀人才支持计划(50011516)
- DOI：10.37188/CJL.20200325
  中图分类号： TN383;TN873
- 收稿：2020-10-28，
  
  录用：2020-11-19，
  
  纸质出版：2021-01
- 稿件说明：
移动端阅览
周雄图, 陈桂雄, 孙钒, 等. Al₂O₃/PMMA交叠薄膜制备及OLED封装性能[J]. 发光学报, 2021,42(1):118-125. DOI: 10.37188/CJL.20200325.

Xiong-tu ZHOU, Gui-xiong CHEN, Fan SUN, et al. Fabrication of Al₂O₃/PMMA Laminates and Its Barrier Performance in OLED Encapsulation[J]. Chinese Journal of Luminescence, 2021, 42(1): 118-125. DOI: 10.37188/CJL.20200325.
周雄图, 陈桂雄, 孙钒, 等. Al₂O₃/PMMA交叠薄膜制备及OLED封装性能[J]. 发光学报, 2021,42(1):118-125. DOI: 10.37188/CJL.20200325. DOI：

Xiong-tu ZHOU, Gui-xiong CHEN, Fan SUN, et al. Fabrication of Al₂O₃/PMMA Laminates and Its Barrier Performance in OLED Encapsulation[J]. Chinese Journal of Luminescence, 2021, 42(1): 118-125. DOI: 10.37188/CJL.20200325. DOI：

摘要

可靠的薄膜封装对提高有机发光二极管（Organic light-emitting diode，OLED）器件寿命至关重要。本文采用原子层沉积实现了致密Al

薄膜的低温制备，并研究了喷墨打印PMMA墨水在Al

薄膜的均匀成膜以及Al

/PMMA交叠薄膜的水汽阻隔性能。实验结果表明，当打印分辨率为300 DPI时，PMMA墨水在Al

薄膜表面均匀成膜，Al

/PMMA交叠薄膜具有良好的水汽阻隔性能和光学透过率。钙膜电学测试结果显示，3对Al

/PMMA薄膜的水汽透过率低至8.34×10

-5

g/（m

·d），而光学透光率在可见光范围内高于95%，表现出良好的OLED器件薄膜封装性能。

Abstract

Reliable thin film encapsulation is of great importance in the development o

f organic light emitting diodes(OLED). In this work

dense Al

thin films were achieved using atomic layer deposition(ALD) under low temperature of 90℃

and ink-jet printing(IJP) was applied to deposit PMMA thin films on the surface of Al

thin films with different resolutions in terms of dots per inch(DPI). It was found that Al

/PMMA laminates exhibited good barrier performance and optical transmittance. The water vapor transmission rate(WVTR) of the 3 dyads Al

/PMMA laminates showed WVTR of 8.34×10

-5

g/(m

·d). Besides

the optical transmittance of the thin films was higher than 95% in the visible wavelength

exhibiting good barrier and optical performances in OLED encapsulation.

关键词

Keywords

references

LIU Y F, FENG J, BI Y G, et al .. Recent developments in flexible organic light-emitting devices[J ] . Adv. Mater. Technol ., 2019, 4(1):1800371-1-19.

YOON K H, KIM H S, HAN K S, et al .. Extremely high barrier performance of organic-inorganic nanolaminated thin films for organic light-emitting diodes[J ] . ACS Appl. Mater. Interfaces , 2017, 9(6):5399-5408.

FUKAGAWA H, SASAKI T, TSUZUKI T, et al .. Long-lived flexible displays employing efficient and stable inverted organic light-emitting diodes[J ] . Adv. Mater ., 2018, 30(28):1706768-1-7.

LEE S M, KWON J H, KWON S, et al .. A review of flexible OLEDs toward highly durable unusual displays[J ] . IEEE Trans. Electron Dev ., 2017, 64(5):1922-1931.

HOFFMANN L, THEIRICH D, PACK S, et al .. Gas diffusion barriers prepared by spatial atmospheric pressure plasma enhanced ALD[J ] . ACS Appl. Mater. Interfaces , 2017, 9(4):4171-4176.

YU D, YANG Y Q, CHEN Z, et al .. Recent progress on thin-film encapsulation tech nologies for organic electronic devices[J ] . Opt. Commun ., 2016, 362:43-49.

KANG D J, PARK G U, PARK H Y, et al .. A high-performance transparent moisture barrier using surface-modified nanoclay composite for OLED encapsulation[J ] . Prog. Org. Coat ., 2018, 118:66-71.

SUN F B, DUAN Y, YANG Y Q, et al .. Fabrication of tunable[Al 2 O 3 :alucone ] thin-film encapsulations for top-emitting organic light-emitting diodes with high performance optical and barrier properties[J ] . Org. Electron ., 2014, 15(10):2546-2552.

HAN P, LAI T C, WANG M, et al .. Outstanding memory characteristics with atomic layer deposited Ta 2 O 5 /Al 2 O 3 /TiO 2 /Al 2 O 3 /Ta 2 O 5 nanocomposite structures as the charge trapping layer[J ] . Appl. Surf. Sci. , 2019, 467-648:423-427.

OH J, SHIN S, PARK J, et al .. Characteristics of Al 2 O 3 /ZrO 2 laminated films deposited by ozone-based atomic layer deposition for organic device encapsulation[J ] . Thin Solid Films , 2016, 599:119-124.

WENG Y L, CHEN G X, ZHOU X T, et al .. Design and fabrication of bi-functional TiO 2 /Al 2 O 3 nanolaminates with selected light extraction and reliable moisture vapor barrier performance[J ] . Nanotechnology , 2019, 30(8):085702.

KIM B J, PARK H, SEONG H, et al .. A single-chamber system of initiated chemical vapor deposition and atomic layer deposition for fabrication of organic/inorganic multilayer films[J ] . Adv. Eng. Mater ., 2017, 19(6):1600819.

WU J, FEI F, WEI C T, et al .. Efficient multi-barrier thin film encapsulation of OLED using alternating Al 2 O 3 and polymer layers[J ] . RSC Adv ., 2018, 8(11):5721-5727.

LEE L, YOON K H, JUNG J W, et al .. Ultra gas-proof polymer hybrid thin layer[J ] . Nano Lett ., 2018, 18(9):5461-5466.

LEE B H, YOON B, ANDERSON V R, et al .. Alucone alloys with tunable properties using alucone molecular layer deposition and Al 2 O 3 atomic layer deposition[J ] . J. Phys. Chem . C, 2012, 116(5):3250-3257.

WANG X, DUAN Y H, CHEN Z, et al .. A flexible transparent gas barrier film employing the method of mixing ALD/MLD-grown Al 2 O 3 and alucone layers[J ] . Nanoscale Res. Lett ., 2015, 10:130-1-7.

ZHAN Z Y, AN J N, WEI Y F, et al .. Inkjet-printed optoelectronics[J ] . Nanoscale , 2017, 9(3):965-993.

VAN DE WEIJER P, AKKERMAN H B, BOUTEN P C P, et al .. Side leakage into the organic interlayer of unstructured hybrid thin-film encapsulation stacks and lifetime implications for roll-to-roll produced organic light-emitting diodes[J ] . Org. Electron ., 2018, 53:256-264.

CHEN G X, WENG Y L, SUN F, et al .. Low-temperature atomic layer deposition of Al 2 O 3 /Alucone nanolaminates for OLED encapsulation[J ] . RSC Adv ., 2019, 9(36):20884-20891.

KOROTKOV R Y, GOFF T, RICOU P. Fluorination of polymethylmethacrylate with SF 6 and hexafluoropropylene using dielectric barrier discharge system at atmospheric pressure[J ] . Surf. Coat. Technol. , 2007 , 201(16-17):7207-7215.

GROVER R, SRIVASTAVA R, KAMALASANAN M N, et al .. Multilayer thin film encapsulation for organic light emitting diodes[J ] . RSC Adv ., 2014, 4(21):10808-10814.

CHOI D W, YOO M, LEE H M, et al .. A study on the growth behavior and stability of molecular layer deposited alucone films using diethylene glycol and trimethyl aluminum precursors, and the enhancement of diffusion barrier properties by atomic layer deposited Al 2 O 3 capping[J ] . ACS Appl. Mater. Interfaces , 2016, 8(19):12263-12271.

PARK E K, KIM S, HEO J, et al .. Electrical evaluation of crack generation in SiN x and SiO x N y thin-film encapsulation layers for OLED displays[J ] . Appl. Surf. Sci ., 2016, 370:126-130.

KWON J H, JEONG E G, JEON Y, et al .. Design of highly water resistant, impermeable, and flexible thin-film encapsulation based on inorganic/organic hybrid layers[J ] . ACS Appl. Mater. Interfaces , 2019, 11(3):3251-3261.

浏览量

590

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

利用原子层沉积技术实现有机电致发光器件的薄膜封装

基于Al2O3封装薄膜的OLED水汽透过率测试方法及系统研究

Al2O3表面包覆增强K2SiF6∶Mn4+荧光粉发光性能和湿热稳定性

一种Y型延迟荧光分子及其蓝光和绿光OLED应用

基于原子层沉积的量子点色彩转换膜封装

Al2O3/PMMA交叠薄膜制备及OLED封装性能

Fabrication of Al2O3/PMMA Laminates and Its Barrier Performance in OLED Encapsulation

DOI：10.37188/CJL.20200325

摘要

Abstract

关键词

Keywords

references

Al₂O₃/PMMA交叠薄膜制备及OLED封装性能

Fabrication of Al₂O₃/PMMA Laminates and Its Barrier Performance in OLED Encapsulation