溅射气氛对RF反应磁控溅射制备ZnO薄膜微结构及光致发光特性的影响

祐卫国; 张 勇; 李 璟; 杨 峰; CHENG C H; 赵 勇

doi:null

您当前的位置：

首页 >

文章列表页 >

溅射气氛对RF反应磁控溅射制备ZnO薄膜微结构及光致发光特性的影响

论文 | 更新时间：2020-08-12

- 溅射气氛对RF反应磁控溅射制备ZnO薄膜微结构及光致发光特性的影响
- Effect of Sputtering Atmosphere on the Structure and Optical Properties of ZnO Thin Films by RF Reactive Magnetron Sputtering
- 发光学报 2010年31卷第4期页码：503-508
- 作者机构：
  
  1. 西南交通大学超导研究开发中心材料先进技术教育部重点实验室
  2. School of Materials Science and Engineering, University of New South Wales
- 作者简介：
- 基金信息：
  
  国家自然科学基金(50588201,50872116)();国家重大基础研究项目"();973"();(2007CB616906)();国家高科技项目&
- DOI：
  中图分类号： O482.31
- 收稿：2009-09-07，
  
  修回：2009-12-24，
  
  网络首发：2010-08-27，
  
  纸质出版：2010-08-27
- 稿件说明：
移动端阅览
祐卫国, 张勇, 李璟, 杨峰, CHENG C H, 赵勇. 溅射气氛对RF反应磁控溅射制备ZnO薄膜微结构及光致发光特性的影响[J]. 发光学报, 2010,31(4): 503-508

YOU Wei-guo, ZHANG Yong, LI Jing, YANG Feng, CHENG C H, ZHAO Yong. Effect of Sputtering Atmosphere on the Structure and Optical Properties of ZnO Thin Films by RF Reactive Magnetron Sputtering[J]. 发光学报, 2010,31(4): 503-508
祐卫国, 张勇, 李璟, 杨峰, CHENG C H, 赵勇. 溅射气氛对RF反应磁控溅射制备ZnO薄膜微结构及光致发光特性的影响[J]. 发光学报, 2010,31(4): 503-508 DOI：

YOU Wei-guo, ZHANG Yong, LI Jing, YANG Feng, CHENG C H, ZHAO Yong. Effect of Sputtering Atmosphere on the Structure and Optical Properties of ZnO Thin Films by RF Reactive Magnetron Sputtering[J]. 发光学报, 2010,31(4): 503-508 DOI：

摘要

用射频反应磁控溅射法在不同溅射压强和氩氧比下制备了ZnO薄膜

通过X射线衍射(XRD)、扫描电镜(SEM)和光致发光(PL)谱等研究了溅射压强和氩氧比对ZnO薄膜结构和光学性质的影响。测量结果显示

所制备的ZnO薄膜为六角纤锌矿结构

具有沿

轴的择优取向;溅射压强

=0.6 Pa

氩氧比Ar/O

=20/5.5 sccm时

(002)晶面衍射峰强度和平均晶粒尺寸较大

(O02)XRD峰半峰全宽(FWHM)最小

光致发光紫外峰强度最强。

Abstract

paper

关键词

Keywords

references

King S L, Gardeniers J G E, Boyd L W. Pulsed-laser deposited ZnO for device application

. Appl. Surf. Sci., 1996, 96-98 :811-818.

Yang Lirong, Jin Zhengguo, Bu Shaojing, et al. Preparation and optical properties of ZnO thin films

. Ordance Material Science and Engineering (兵器材料科学与工程), 2004, 27 (1):34-38 (in Chinese).

Shi Zengliang, Liu Dali, Yan Xiaobong, et al. Effects of the low-temperature buffer layer on the properties of ZnO thin films

. Chin. J. Lumin. (发光学报), 2008, 29 (1):124-128 (in Chinese).

Weng Zhankun, Liu Aimin, Liu Yanhong, et al. Photoluminescence and formation of ZnO thin films on n-InP(100) by electrodeposition

. Chin. J. Lumin. (发光学报), 2008, 29 (2):283-288 (in Chinese).

Liu Xuedong, Gu Shulin, Li Feng, et al. The effect of carrier gas H2 used during MOCVD-growth on the properties of N-doped ZnO

. Chin. J. Lumin. (发光学报), 2008, 29 (3):441-446 (in Chinese).

Bae S H, Lee S Y, Jin B J, et al. Growth and characterization of ZnO thin films grown by pulsed laser deposition

. Appl. Surf. Sci., 2001, 169-170 :525-528.

Fu Z, Lin B, Zu J. Photoluminescence and structure of ZnO films deposited on Si substrates by metal-organic chemical vapor deposition

. Thin Solid Films, 2002, 402 (1-2):302-306.

Kim Youngsung, Tai Weonpil. Electrical and optical properties of A1-doped ZnO thin films by sol-gel process

. Appl. Surf. Sci., 2007, 253 (11):4911-4916.

Parmod Sagar, Shishodia P K, Mehra R M. Influence of pH value on the quality of sol-gel derived ZnO films

. Appl. Surf. Sci., 2007, 253 (12):5419-5424.

Park K C, Ma D Y, Kim K H. The physical properties of Al-doped zinc oxide films prepared by RF magnetron sputtering

. Thin Solid Films, 1997, 305 (1-2):201-209.

Yang Chengtao, Zeng Zeyu, Chen Zhu, et al. Characterization of ZnO thin films deposited on diamond-like carbon coated onto Si and SiO2／Si substrate

. J. Cryst.Growth, 2006, 293 (2):299-304.

Tang I-Tseng, Wang Y C, Hwang W C, et al.Investigation of piezoelectric ZnO film deposited on diamond like carbon coated onto Si substrate under different sputtering conditions

. J. Cryst.Growth, 2003, 252 (1-3):190-198.

Tang Z K, Wong G K L, Yu P, et al. Room-temperature ultraviolet laser emission from self-assembled ZnO microcrystallite thin films

. Appl. Phys. Lett.,1998, 72 (25):3270-3275.

Guo Chengxin, Fu Zhuxi, Shichaoshu. Superlinear increase phenomenon of UV luminescence of ZnO film under cathodo-luminescent excitation

. Chin. J. Lumin. (发光学报), 1998, 19 (3):239-241 (in Chinese).

Song G L, Liang H, Sun K X. Study on the visible emission mechanism of nanocoystalline ZnO powder

. Acta Photo-nica Sinica (光子学报), 2004, 33 (4):485-488 (in Chinese).

Zhang Xitian, Liu Yichun, Zhi Zhuang Zhi, et al. Investigation on nanocrystalline ZnO thin films prepared by thermal oxidation of ZnS thin films

. Chin. J. Semicond. (半导体学报), 2003, 24 (1):44-48 (in Chinese).

浏览量

433

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

蓝光ZnO薄膜的特性研究

射频磁控溅射法制备ZnO薄膜的发光特性

电感耦合等离子体辅助及H2/N2气氛调控对非晶Ga2O3薄膜发光特性的影响

Pr3+对Ce3+掺杂高钆铝硼硅酸盐氟氧玻璃发光性能及能量传递机理

Sr6GdAl（BO3）6∶Dy3+荧光粉的能量传递和发光特性