Au电极厚度对MgZnO紫外探测器性能的影响

孙华山; 刘可为; 陈洪宇; 范明明; 陈星; 李炳辉; 申德振

doi:10.3788/fgxb20153602.0200

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Au电极厚度对MgZnO紫外探测器性能的影响

器件制备及器件物理 | 更新时间：2020-08-12

- Au电极厚度对MgZnO紫外探测器性能的影响
- Effect of Au Electrode Thickness on The Performance of MgZnO UV Detector
- 发光学报 2015年36卷第2期页码：200-205
- 作者机构：
  
  1. 发光学及应用国家重点实验室中国科学院长春光学精密机械与物理研究所,吉林长春,130033
  2. 中国科学院大学北京,100049
- 作者简介：
- 基金信息：
  
  国家自然科学基金(61475153,10974197,11134009)();国家"();973计划"();(2011CB302006)();中科院&q
- DOI：10.3788/fgxb20153602.0200
  中图分类号： O472.8;O484.4
- 纸质出版日期：2015-2-3，
  
  网络出版日期：2014-12-19，
  
  收稿日期：2014-9-2，
  
  修回日期：2014-9-28，
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孙华山, 刘可为, 陈洪宇等. Au电极厚度对MgZnO紫外探测器性能的影响[J]. 发光学报, 2015,36(2): 200-205

SUN Hua-shan, LIU Ke-wei, CHEN Hong-yu etc. Effect of Au Electrode Thickness on The Performance of MgZnO UV Detector[J]. Chinese Journal of Luminescence, 2015,36(2): 200-205
孙华山, 刘可为, 陈洪宇等. Au电极厚度对MgZnO紫外探测器性能的影响[J]. 发光学报, 2015,36(2): 200-205 DOI： 10.3788/fgxb20153602.0200.

SUN Hua-shan, LIU Ke-wei, CHEN Hong-yu etc. Effect of Au Electrode Thickness on The Performance of MgZnO UV Detector[J]. Chinese Journal of Luminescence, 2015,36(2): 200-205 DOI： 10.3788/fgxb20153602.0200.

摘要

利用分子束外延设备(MBE)制备了MgZnO薄膜.X射线衍射谱、紫外-可见透射光谱和X射线能谱表明薄膜具有单一六角相结构

吸收边为340 nm

Zn/Mg组分比为62:38.采用掩膜方法使用离子溅射设备

在MgZnO薄膜上制备了Au电极

并实现了Au-MgZnO-Au结构的紫外探测器.通过改变溅射时间

得到具有不同Au电极厚度的MgZnO紫外探测器.研究结果表明:随着Au电极厚度的增加

导电性先缓慢增加

再迅速增加

最后缓慢增加并趋于饱和;而Au电极的透光率则随厚度的增加呈线性下降.此外

随着Au电极厚度的增加

器件光响应度先逐渐增大

在Au电极厚度为28 nm时达到峰值

之后逐渐减小.

Abstract

MgZnO films were prepared by RF MBE equipment. X-ray diffraction

UV-visible transmission spectroscopy and X-ray energy dispersive spectroscopy indicated that MgZnO films had a single hexagonal phase structure with a shap absorption edge at ~340 nm

and the composition ratio of Zn and Mg was 62:38. Au electrodes were deposited on MgZnO thin films by an ion sputtering apparatus with a mask and Au-MgZnO-Au UV detectors were fabricated. Au electrodes thicknesses could be modified by changing the sputtering time. With the increasing of Au electrode thickness

the conductivity of Au films increased slowly at first

then increased rapidly

and slowly to saturation finally. As for the transmittance of Au films

it decreased nearly linearly with the increasing of Au electrode thickness. In addition

with the increasing of Au electrodes thickness

the responsivity of MgZnO UV photodetectors gradually increased at first

and then decreased. When the thickness of Au electrode was 28 nm

the device has the best responsivity.

关键词

MgZnO紫外探测器Au电极厚度

Keywords

MgZnOUV detectorsAu electrodethickness

references

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Yang W, Vispute R, Choopun S, et al. Ultraviolet photoconductive detector based on epitaxial Mg0.34Zn0.66O thin films [J]. Appl. Phys. Lett., 2001, 78(18):2787-2789.

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