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电子科技大学, 光电信息学院,四川 成都,610054
Published:20 May 2007,
Received:6 April 2006,
Revised:8 November 2006,
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王小菊, 林祖伦, 祁康成, 陈泽祥, 汪志刚, 蒋亚东. 电化学刻蚀法制备LaB<sub>6</sub>场发射微尖锥阵列[J]. 发光学报, 2007,28(3): 429-432
WANG Xiao-ju, LIN Zu-lun, QI Kang-cheng, CHEN Ze-xiang, WANG Zhi-gang, JIANG Ya-dong. Fabrication of LaB<sub>6</sub> Tip Field Emission Arrays Using Electro-chemical Etching Method[J]. Chinese Journal of Luminescence, 2007,28(3): 429-432
王小菊, 林祖伦, 祁康成, 陈泽祥, 汪志刚, 蒋亚东. 电化学刻蚀法制备LaB<sub>6</sub>场发射微尖锥阵列[J]. 发光学报, 2007,28(3): 429-432 DOI:
WANG Xiao-ju, LIN Zu-lun, QI Kang-cheng, CHEN Ze-xiang, WANG Zhi-gang, JIANG Ya-dong. Fabrication of LaB<sub>6</sub> Tip Field Emission Arrays Using Electro-chemical Etching Method[J]. Chinese Journal of Luminescence, 2007,28(3): 429-432 DOI:
采用电化学刻蚀方法
成功制备出单尖的六硼化镧、钼、钨及钨铼合金场发射冷阴极尖锥
并对这几种场发射单尖锥阴极的电子发射性能进行了测试比较.结果表明
LaB
6
作为场发射阴极
具有良好的发射性能和稳定性.在〈111〉面单晶LaB
6
基片上
用PECVD法沉积非晶硅作掩膜
制备出具有一定高度的LaB
6
微尖锥场发射阵列
结果发现
LaB
6
基底较为平整
尖锥阵列呈现出各向异性.该结论对LaB
6
材料在场发射阴极方面的进一步研究具有重要的指导意义.
At present
field emitting cold cathode materials
including molybdenum
silicon
diamond carbon films
diamond-like carbon films and carbon nanotubes
are being developed. With each of these materials having their own shortages
it is important to seek some new field emitting cold cathode materials. Lanthanum hexaboride (LaB
6
) is a material with low work function
low resistivity
low sputtering yield
high melting point and high chemical stability. It has been widely used as thermionic emitters. On the other hand
LaB
6
is also an excellent material for use as field emission cathodes. Some field emitting cold cathode single tips in-cluding LaB
6
molybdenum
tungsten and tungsten rhenium were fabricated by using electro-chemical etching method. The electron emission characteristics of these cold cathodes were studied in a diode test cell in vacuum system. Changing the anode voltage at a pressure of 1×10-3 Pa
the current density of single crystal LaB
6
was compared with other material cathodes. It showed that LaB
6
was one kind of excellent materials to act as field emitting cold cathode
whose current density was much higher than any other materials. In addition
LaB
6
field emission arrays were attempted to be fabricated by using electro-chemical etching method. The a-type si-licon layer was depositing by PECVD as mask. Electrolytes in this process were ethanol (CH
3
CH
2
OH) containing 2% hydrochloric acid (HCl) and the electrolytic current was 0.6 mA. The SEM showed that the substrate and surface of single crystal LaB
6
tips were both smooth. The height of LaB
6
tips was about 1.7μm. The uniformity of the tips was fine
while due to the erosion selectivity for different crystalloid surface in electro-chemical etching method
serious anisotropic phenomenon was observed for LaB
6
tips. It demonstrated that
seeking some new electrolytes or using other special dry etching methods instead of wet etching methods
maybe effective to fabricate excellent LaB
6
field emitting cold cathode tips. These experimental conclusions were constructive to direct the application of LaB
6
to field emission cathodes further.
单晶LaB6场发射阵列电化学刻蚀各向异性
single crystal lanthanum hexaboridefield emission arrayselectro-chemical etching methodanisotropic phenomenon
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Yamabe M,Furukawa Y,Inagaki T.Electron emission from 《100》 LaB6 cathodes with large cone angles and flat tips[J].J.Vac.Sci.Technol.A,1984,2(3):1361-1364.
Furukawa Y,Yamabe M,Inagaki T.Emission characteristics of single-crystal LaB6 cathodes with large tip radius[J].J.Vac.Sci.Technol.A,1983,1(3):1518-1521.
Tumoru Shintake,Kunio Ohba,Masaru Matoba,et al.Pierce-type electron gun with a large concave LaB6 cathodes[J].Jpn.J.Appl.Phys.,1981,20(2):341-345.
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