Li Yan, Xu Mai, Zhang Yushu, Burger J, Parriaux O. CHARACTERISATION OF SUBMICROMETER GRATINGS FOR INTEGRATED OPTICS BY A ATOMIC-FORCE-MICROSCOPE[J]. Chinese Journal of Luminescence, 1998,19(1): 80-81
Li Yan, Xu Mai, Zhang Yushu, Burger J, Parriaux O. CHARACTERISATION OF SUBMICROMETER GRATINGS FOR INTEGRATED OPTICS BY A ATOMIC-FORCE-MICROSCOPE[J]. Chinese Journal of Luminescence, 1998,19(1): 80-81DOI:
CHARACTERISATION OF SUBMICROMETER GRATINGS FOR INTEGRATED OPTICS BY A ATOMIC-FORCE-MICROSCOPE
We experimentally demonstrate that AFM can be used as a flexible tool for nondestructive characterisation of all steps of a fabrication sequence of submicrometer gratings for integrated optics without the necessity to specially prepare the samples under test.