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CHARACTERISATION OF SUBMICROMETER GRATINGS FOR INTEGRATED OPTICS BY A ATOMIC-FORCE-MICROSCOPE
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    • CHARACTERISATION OF SUBMICROMETER GRATINGS FOR INTEGRATED OPTICS BY A ATOMIC-FORCE-MICROSCOPE

    • Chinese Journal of Luminescence   Vol. 19, Issue 1, Pages: 80-81(1998)

    • Published：28 February 1998，

      Received：13 August 1997，

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  • Li Yan, Xu Mai, Zhang Yushu, Burger J, Parriaux O. CHARACTERISATION OF SUBMICROMETER GRATINGS FOR INTEGRATED OPTICS BY A ATOMIC-FORCE-MICROSCOPE[J]. Chinese Journal of Luminescence, 1998,19(1): 80-81 DOI：

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