Lu Ping, Fan Junqing, Xu Chengjie, Li Yi. A STUDY FOR OPTICAL WAVEGUIDES FABRICATED BY ION IMPLANTATION IN FUSED QUARTZ[J]. Chinese Journal of Luminescence, 1995,16(1): 78-81
Lu Ping, Fan Junqing, Xu Chengjie, Li Yi. A STUDY FOR OPTICAL WAVEGUIDES FABRICATED BY ION IMPLANTATION IN FUSED QUARTZ[J]. Chinese Journal of Luminescence, 1995,16(1): 78-81DOI:
A STUDY FOR OPTICAL WAVEGUIDES FABRICATED BY ION IMPLANTATION IN FUSED QUARTZ
The low-loss single mode waveguides in fused quartz substrate were fabricated by nitrogen and boron ion implantation.The maximum index and half width of refractive index profile is 1.48 and 0.5 μm
respectively.The waveguide loss is less than 0.1 dB/cm.