吸收增强的光栅型金属-半导体-金属光电探测器的优化设计

乔静; 谢生; 毛陆虹; 丛佳; 董威锋

doi:10.3788/fgxb20183903.0363

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吸收增强的光栅型金属-半导体-金属光电探测器的优化设计

器件制备及器件物理 | 更新时间：2020-08-12

- 吸收增强的光栅型金属-半导体-金属光电探测器的优化设计
- Optimum Design of Silicon-based Metal-semiconductor-metal Photodetector with Subwavelength Metal Grating
- 发光学报 2018年39卷第3期页码：363-368
- 作者机构：
  
  1. 天津大学微电子学院天津市成像与感知微电子技术重点实验室天津,300072
  2. 天津大学电气自动化与信息工程学院天津,300072
- 作者简介：
- 基金信息：
  
  国家自然科学基金（61474081，11673019）资助项目()
- DOI：10.3788/fgxb20183903.0363
  中图分类号： TN202
- 纸质出版日期：2018-3-5，
  
  网络出版日期：2017-8-28，
  
  收稿日期：2017-7-11，
  
  修回日期：2017-8-23，
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乔静, 谢生, 毛陆虹等. 吸收增强的光栅型金属-半导体-金属光电探测器的优化设计[J]. 发光学报, 2018,39(3): 363-368

QIAO Jing, XIE Sheng, MAO Lu-hong etc. Optimum Design of Silicon-based Metal-semiconductor-metal Photodetector with Subwavelength Metal Grating[J]. Chinese Journal of Luminescence, 2018,39(3): 363-368
乔静, 谢生, 毛陆虹等. 吸收增强的光栅型金属-半导体-金属光电探测器的优化设计[J]. 发光学报, 2018,39(3): 363-368 DOI： 10.3788/fgxb20183903.0363.

QIAO Jing, XIE Sheng, MAO Lu-hong etc. Optimum Design of Silicon-based Metal-semiconductor-metal Photodetector with Subwavelength Metal Grating[J]. Chinese Journal of Luminescence, 2018,39(3): 363-368 DOI： 10.3788/fgxb20183903.0363.

摘要

针对可见光通信对硅基光电探测器高响应度的要求，本文利用亚波长金属光栅的异常光学透射现象，提出一种增强与硅基CMOS工艺兼容的金属-半导体-金属光电探测器吸收的方法。采用时域有限差分法，详细分析了光栅周期、光栅高度和狭缝宽度对探测器吸收性能的影响，证明了类法布里-珀罗共振和表面等离子体激元是吸收增强的物理起源。对于波长615 nm的红光通信而言，探测器金属光栅的最佳周期、最佳高度和最佳狭缝宽度分别为580，91，360 nm。与没有亚波长金属光栅结构的探测器相比，本文设计的探测器吸收系数提高了32%。本文研究的MSM探测器结构与CMOS工艺完全兼容，有望在可见光通信芯片中得到实际应用。

Abstract

To meet the requirement of high responsivity of silicon-based photodetector in visible light communication (VLC)

a novel silicon-based metal-semiconductor-metal photodetector utilizing the abnormal optical transmission of subwavelength metal grating was proposed. The effects of grating height

grating period and slit width on the absorptive performance of the photodetector were analyzed in detail by using the method of finite difference time domain. The simulation results indicate that the absorption enhancement was improved by the Fabry-Perot resonance and the surface plasmon polariton. For the VLC system with a wavelength of 615 nm

the optimum period

the optimum height and the optimum slit width of the metal grating are 580

360 nm

respectively. The absorption efficiency of the designed detector was 32% higher than that of the detector without metal grating. Since the proposed photodetector is based on standard CMOS process

it has potential application in the visible light communication.

关键词

可见光通信光电探测器亚波长金属光栅吸收增强类法布里-珀罗共振表面等离子体激元

Keywords

visible light communicationphotodetectorsubwavelength metal gratingabsorptionFabry-Perot-like resonancesurface plasmon polariton

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