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GaN衬底的腐蚀程度对ZnO纳米棒阵列光学性能的调控
Regulation of Optical Properties of ZnO Nanorods Arrays by The Crossion of GaN Substrate
- 发光学报 2017年38卷第10期 页码：1307-1313
- 作者机构：
1. 太原理工大学 新材料界面科学与工程教育部重点实验室,山西 太原,030024
2. 太原理工大学 新材料工程技术研究中心,山西 太原,030024
- 作者简介：
- 基金信息：国家自然科学基金（21471111，61475110，61404089，61504090，61604104）;国家重点研发计划（2016YFB0401803）;山西省基础研究项目（2015021103，201601D202029）;山西省科技创新重点团队（201605D131045-10）资助项目
DOI：10.3788/fgxb20173810.1307
中图分类号： O472.1;TN364纸质出版日期：2017-10-5，
网络出版日期：2017-6-22，
收稿日期：2017-2-28，
修回日期：2017-3-17，
扫 描 看 全 文
庞泽鹏, 梅伏洪, 乔建东等. GaN衬底的腐蚀程度对ZnO纳米棒阵列光学性能的调控[J]. 发光学报, 2017,38(10): 1307-1313
PANG Ze-peng, MEI Fu-hong, QIAO Jian-dong etc. Regulation of Optical Properties of ZnO Nanorods Arrays by The Crossion of GaN Substrate[J]. Chinese Journal of Luminescence, 2017,38(10): 1307-1313
庞泽鹏, 梅伏洪, 乔建东等. GaN衬底的腐蚀程度对ZnO纳米棒阵列光学性能的调控[J]. 发光学报, 2017,38(10): 1307-1313 DOI： 10.3788/fgxb20173810.1307.
PANG Ze-peng, MEI Fu-hong, QIAO Jian-dong etc. Regulation of Optical Properties of ZnO Nanorods Arrays by The Crossion of GaN Substrate[J]. Chinese Journal of Luminescence, 2017,38(10): 1307-1313 DOI： 10.3788/fgxb20173810.1307.
摘要
研究了在湿法腐蚀GaN衬底上生长的ZnO纳米棒阵列的微结构和光学性能。相比于未经腐蚀及腐蚀5 min、10 min的GaN上生长的ZnO纳米棒阵列，在腐蚀8 min的GaN上生长的ZnO纳米棒阵列最细密，光学性能最好，其相应PL光谱峰强积分比
I
UV
/
I
vis
最大（70.92）。因为此时GaN衬底中的位错基本全部在表面露头，ZnO容易附着而形成更多的形核种子，并且衬底的位错在表面的边缘有助于诱导ZnO晶体的外延生长，所以ZnO棒更加细密，晶体质量更高，从而光学性能更好。
Abstract
1-D ZnO nanorods arrays were fabricated on the wet etched GaN substrates and the microstructure and optical properties were studied. Compared with ZnO nanorods grown on GaN with no corrosion and corrosion for 5 min and 10 min
the nanorod arrays with the etching time of 8 min are the finest and have the best optical properties
besides its corresponding PL spectral peak integral ratio
I
UV
/
I
vis
is the largest. Because the dislocations in the GaN substrate with the etching time of 8 min are almost entirely in the surface outcrops
and the ZnO nanorods grown on it are easy to attach to form more nucleated seeds
furthermore it is helpful to induce the helical growth of ZnO crystals when the dislocations of the substrate are at the edge of the surface. Therefore
the ZnO nanorods are more compact and uniform
and the crystal quality and optical properties are more ideal.
关键词
ZnO纳米棒水热法GaN衬底湿法腐蚀光学性能
Keywords
ZnO nanorodshydrothermalGaN substratewet etchingoptical property
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