6H-SiC衬底上AlGaN基垂直结构紫外LED的制备

刘明哲; 李鹏翀; 邓高强; 张源涛; 张宝林

doi:10.3788/fgxb20173806.0753

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6H-SiC衬底上AlGaN基垂直结构紫外LED的制备

器件制备及器件物理 | 更新时间：2020-08-12

- 6H-SiC衬底上AlGaN基垂直结构紫外LED的制备
- Fabrication of Vertical Structure Ultraviolet LED on 6H-SiC Substrate
- 发光学报 2017年38卷第6期页码：753-759
- 作者机构：
  
  吉林大学电子科学与工程学院集成光电子学国家重点联合实验室,吉林长春,130012
- 作者简介：
- 基金信息：
  
  国家重点研发计划（2016YFB0400103）();吉林省科技发展计划（20130204032GX，20150519004JH，20160101309JC）();教育
- DOI：10.3788/fgxb20173806.0753
  中图分类号： TN383;TH691.9
- 纸质出版日期：2017-6-5，
  
  收稿日期：2017-1-3，
  
  修回日期：2017-2-19，
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刘明哲, 李鹏翀, 邓高强等. 6H-SiC衬底上AlGaN基垂直结构紫外LED的制备[J]. 发光学报, 2017,38(6): 753-759

LIU Ming-zhe, LI Peng-chong, DENG Gao-qiang etc. Fabrication of Vertical Structure Ultraviolet LED on 6H-SiC Substrate[J]. Chinese Journal of Luminescence, 2017,38(6): 753-759
刘明哲, 李鹏翀, 邓高强等. 6H-SiC衬底上AlGaN基垂直结构紫外LED的制备[J]. 发光学报, 2017,38(6): 753-759 DOI： 10.3788/fgxb20173806.0753.

LIU Ming-zhe, LI Peng-chong, DENG Gao-qiang etc. Fabrication of Vertical Structure Ultraviolet LED on 6H-SiC Substrate[J]. Chinese Journal of Luminescence, 2017,38(6): 753-759 DOI： 10.3788/fgxb20173806.0753.

摘要

利用金属有机物化学气相沉积方法，在n型6H-SiC衬底上制备了15对Si掺杂Al

0.19

0.81

N/Al

0.37

0.63

N DBR，并采用低温AlN缓冲层有效抑制了DBR结构中裂纹的产生，得到了表面均方根粗糙度仅为0.4 nm且导电性能良好的n型DBR，其在369 nm处峰值反射率为68%，阻带宽度为10 nm。在获得导电DBR的基础上，进一步在n型6H-SiC衬底上构建了有、无DBR的垂直结构紫外LED。对比两者电致发光光谱，发现DBR结构的引入有效增强了LED紫外发光强度。

Abstract

Silicon-doped Al

0.19

0.81

N/Al

0.37

0.63

N DBRs were grown on n-type 6H-SiC substrates by metal organic chemical vapor deposition(MOCVD). To suppress the generation of cracks

a low-temperature AlN pre-deposition layer on 6H-SiC(0001) substrate was used as buffer. A smooth-surface 15-pair electrically conducting DBR with a reflectance of 68% at 369 nm was obtained. The stop-band bandwidth and RMS value of DBR are 10 nm and 0.4 nm

respectively. Furthermore

the vertical structure UV LEDs with and without n-DBR on 6H-SiC substrate were fabricated. By comparing EL spectra

it is shown that the introduction of DBR structure can effectively improve the UV emission.

关键词

AlGaN紫外发光二极管分布式布拉格反射镜金属有机物化学气相沉积垂直结构

Keywords

AlGaNultraviolet LEDdistributed Bragg reflectorsmetal organic chemical vapor depositionvertical structure

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