后处理工艺对钛基纳米金刚石涂层场发射特性的影响

杨延宁; 李小敏; 杨浩浩; 吴小帅; 张富春

doi:10.3788/fgxb20173806.0747

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后处理工艺对钛基纳米金刚石涂层场发射特性的影响

器件制备及器件物理 | 更新时间：2020-08-12

- 后处理工艺对钛基纳米金刚石涂层场发射特性的影响
- Effects of Post-treatment Technology on The Field Emission Property of Nano-diamond Coating on Titanium Substrate
- 发光学报 2017年38卷第6期页码：747-752
- 作者机构：
  
  延安大学信息与通信工程研究所,陕西延安,716000
- 作者简介：
- 基金信息：
  
  国家自然科学基金（61664008）();延安大学引导项目（YD 2016-02）();2016地方高校国家大学生创新创业训练项目（1559，1569）();高水平大学
- DOI：10.3788/fgxb20173806.0747
  中图分类号： TN383+.1
- 纸质出版日期：2017-6-5，
  
  收稿日期：2016-11-25，
  
  修回日期：2017-3-9，
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杨延宁, 李小敏, 杨浩浩等. 后处理工艺对钛基纳米金刚石涂层场发射特性的影响[J]. 发光学报, 2017,38(6): 747-752

YANG Yan-ning, LI Xiao-min, YANG Hao-hao etc. Effects of Post-treatment Technology on The Field Emission Property of Nano-diamond Coating on Titanium Substrate[J]. Chinese Journal of Luminescence, 2017,38(6): 747-752
杨延宁, 李小敏, 杨浩浩等. 后处理工艺对钛基纳米金刚石涂层场发射特性的影响[J]. 发光学报, 2017,38(6): 747-752 DOI： 10.3788/fgxb20173806.0747.

YANG Yan-ning, LI Xiao-min, YANG Hao-hao etc. Effects of Post-treatment Technology on The Field Emission Property of Nano-diamond Coating on Titanium Substrate[J]. Chinese Journal of Luminescence, 2017,38(6): 747-752 DOI： 10.3788/fgxb20173806.0747.

摘要

采用胶带粘贴、金相砂纸摩擦、射频氢等离子体工艺对钛基纳米金刚石涂层进行了处理，分析了它们对样品的微观表征、场发射性能、发光效果的影响。首先通过电泳法将金刚石粉末移植到金属钛片上，然后经过真空热处理、表面后处理工艺形成了场发射阴极涂层，最后对样品进行了微观表征、场发射特性与发光测试。结果表明，胶带处理在场强达到10 V/m时，场发射电流密度从50 A/cm

增j加到72 A/cm

；金相砂纸处理在10 V/m场强下的场发射电流由48 A/cm

提高到82 A/cm

；适当的氢等离子体处理有助于降低表面功函数，使得金刚石表面的悬键被氢原子饱和，在其表面形成C－H键，进一步降低了电子亲和势，从而提高了样品的场发射性能和发光均匀性。

Abstract

The Ti-based nano-diamond coatings were treated by tape-stripping

metallographic sandpaper friction

and RF hydrogen plasma process. The effects of the post processing technology on the samples were analyzed by testing the morphology

field emission property

and luminescence effect of the samples. The diamond powders were transferred to metal titanium sheet by electrophoresis method

and then the field emission cathode coating was formed after vacuum heat treatment and surface post-treatment technology. finally

the microscopic mophology

field emission properties and luminescence effect of the samples were characterized. For tape-stripping processing

the field emission current density increases from 50 A/cm

to 72 A/cm

at the electric field of 10 V/m. For metallographic sandpaper friction

the current density increases from 48 A/cm

to 82 A/cm

at the electric field of 10 V/m. Moreover

appropriate hydrogen treatment is helpful to reduce the work function of the surface. The dangling bonds of the diamond surface are saturated by hydrogen atom and C－H bonds form on the surface

which can reduce the electron affinity to improve the field emission properties and luminous uniformity of the samples.

关键词

纳米金刚石涂层后处理工艺场发射特性发光效果

Keywords

nano-diamond coatingsurface treatment processfield emission characteristicsluminescence effect

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