基于CCD测量激光光束质量M2

陈诚; 郑加金; 韦玮; 韩晓晓; 于广礼; 周军

doi:10.3788/fgxb20173805.0642

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基于CCD测量激光光束质量M²

器件制备及器件物理 | 更新时间：2020-08-12

- 基于CCD测量激光光束质量M²
- Measurement of Laser Beam Quality M² Based on CCD
- 发光学报 2017年38卷第5期页码：642-647
- 作者机构：
  
  1. 南京邮电大学光电工程学院, 江苏南京 210023
  2. 南京先进激光技术研究院,江苏南京,210038
  3. 光学信息技术科学教育部重点实验室南开大学天津,300071
- 作者简介：
- 基金信息：
  
  光学信息技术科学教育部重点实验室（南开大学）开放基金;南京邮电大学国家自然科学基金孵化基金（NY215143）资助项目
- DOI：10.3788/fgxb20173805.0642
  中图分类号： TN247
- 纸质出版日期：2017-5-5，
  
  收稿日期：2016-11-24，
  
  修回日期：2017-2-21，
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陈诚, 郑加金, 韦玮等. 基于CCD测量激光光束质量M2[J]. 发光学报, 2017,38(5): 642-647

CHEN Cheng, ZHANG Jia-Jin, WEI Wei etc. Measurement of Laser Beam Quality M2 Based on CCD[J]. Chinese Journal of Luminescence, 2017,38(5): 642-647
陈诚, 郑加金, 韦玮等. 基于CCD测量激光光束质量M2[J]. 发光学报, 2017,38(5): 642-647 DOI： 10.3788/fgxb20173805.0642.

CHEN Cheng, ZHANG Jia-Jin, WEI Wei etc. Measurement of Laser Beam Quality M2 Based on CCD[J]. Chinese Journal of Luminescence, 2017,38(5): 642-647 DOI： 10.3788/fgxb20173805.0642.

摘要

设计并搭建了一套基于CCD测量激光光束质量

的系统。采用CCD测量激光光束在不同位置处的光束直径，通过非线性最小二乘法拟合测量数据获得光束腰斑直径和远场发散角，再通过公式计算得到激光光束质量

。利用本系统测量多组数据，并与专业

仪所测的数据进行对比，二者一致性较好，表明采用本实验装置测量激光光束质量

可以有效地替代

仪。

Abstract

A system based on CCD to measure laser beam quality was designed and built. CCD was used to measure laser beam diameter at different locations. The collected data samples were then curve fitted to the beam propagation hyperbolic equation. Here the non-linear least squares method was employed to fit the hyperbolic curve

and the results of the fitting procedure yielded laser beam quality

. To prove the accuracy and reliability of this self-made device

a comparison was made between the measurement results of this device and the specialized instrument

equipment

which showed a very good coherence. It indicates that this experiment device can replace

equipment.

关键词

激光光束质量M2CCD双曲线拟合

Keywords

laser beam qualityM2CCD methodhyperbolic beam fit

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