GaN基薄膜LED倒装芯片表面结构设计及光萃取效率研究

齐赵毅; 胡晓龙; 王洪

doi:10.3788/fgxb20173803.0338

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GaN基薄膜LED倒装芯片表面结构设计及光萃取效率研究

器件制备及器件物理 | 更新时间：2020-08-12

- GaN基薄膜LED倒装芯片表面结构设计及光萃取效率研究
- Design of Surface Textures for High Light Extraction Efficiency GaN-based Flip-chip TFLEDs
- 发光学报 2017年38卷第3期页码：338-346
- 作者机构：
  
  1. 华南理工大学广东省光电工程技术研究开发中心,广东广州,510640
  2. 华南理工大学电子与信息学院, 广东广州 510640
- 作者简介：
- 基金信息：
  
  国家高技术研究发展计划（863）（2014AA032609）();国家自然科学基金（61404050）();广东省重大科技专项（2014B010119002）();广东
- DOI：10.3788/fgxb20173803.0338
  中图分类号： TN383+.1
- 纸质出版日期：2017-3-5，
  
  收稿日期：2016-8-30，
  
  修回日期：2016-10-17，
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齐赵毅, 胡晓龙, 王洪. GaN基薄膜LED倒装芯片表面结构设计及光萃取效率研究[J]. 发光学报, 2017,38(3): 338-346

QI Zhao-yi, HU Xiao-long, WANG Hong. Design of Surface Textures for High Light Extraction Efficiency GaN-based Flip-chip TFLEDs[J]. Chinese Journal of Luminescence, 2017,38(3): 338-346
齐赵毅, 胡晓龙, 王洪. GaN基薄膜LED倒装芯片表面结构设计及光萃取效率研究[J]. 发光学报, 2017,38(3): 338-346 DOI： 10.3788/fgxb20173803.0338.

QI Zhao-yi, HU Xiao-long, WANG Hong. Design of Surface Textures for High Light Extraction Efficiency GaN-based Flip-chip TFLEDs[J]. Chinese Journal of Luminescence, 2017,38(3): 338-346 DOI： 10.3788/fgxb20173803.0338.

摘要

利用FDTD方法研究具有表面微纳结构氮化镓基倒装薄膜LED芯片的光萃取效率。通过优化表面结构并研究了器件的光萃取效率随p-GaN层厚的变化。研究发现，具有表面光子晶体和六棱锥结构的器件的光萃取效率最大值比无表面微结构器件分别提高了56%和97%。尽管两种表面结构都能有效提高器件的光萃取效率，然而采用光子晶体的方案对p-GaN厚度和腔长要求极为苛刻。采用六棱锥结构则不仅可以获得更高的光萃取效率，并且还将大大降低实验上材料外延生长及器件制备的难度。

Abstract

Light extraction efficiency (LEE) of flip-chip thin-film LEDs (FC-TFLEDs) with different surface textures were performed by using finite difference time domain method. The surface textures and different thicknesses of p-GaN layer were optimized for high LEE FC-TFLEDs. It is found that the maximum LEE of FC-TFLEDs with photonic crystals and hexagonal cones is 1.56 and 1.97 times to that of FC-TFLEDs with flat surface

respectively. Both types of the surface textures can improve the LEE of FC-TFLEDs

however

it is much difficult to obtain high LEE FC-TFLEDs by employing photonic crystals. The simulated results show that the LEE of FC-TFLEDs is effectively improved by the use of the hexagonal cones

in addition

it can greatly reduce the difficulty in LED material growth and device fabrication.

关键词

倒装薄膜LEDFDTD光萃取效率光子晶体六棱锥

Keywords

FC-TFLEDFDTDlight extraction efficiencyphotonic crystalshexagonal cone

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