一维增透亚波长光栅的研究

江孝伟; 武华

doi:10.3788/fgxb20173802.0177

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一维增透亚波长光栅的研究

器件制备及器件物理 | 更新时间：2020-08-12

- 一维增透亚波长光栅的研究
- Research of 1D Sub-wavelength Grating Anti-reflection
- 发光学报 2017年38卷第2期页码：177-181
- 作者机构：
  
  1. 衢州职业技术学院信息工程学院, 浙江衢州 324000
  2. 赣南师范大学物理与电子信息学院, 江西赣州 341000
- 作者简介：
- 基金信息：
  
  江西省教育厅科技计划（GJJ150998）;衢州职业技术学院（QZYY1612）资助项目
- DOI：10.3788/fgxb20173802.0177
  中图分类号： TN248.4
- 纸质出版日期：2017-2-5，
  
  收稿日期：2016-7-18，
  
  修回日期：2016-8-25，
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江孝伟, 武华,. 一维增透亚波长光栅的研究[J]. 发光学报, 2017,38(2): 177-181

JIANG Xiao-wei, WU Hua,. Research of 1D Sub-wavelength Grating Anti-reflection[J]. Chinese Journal of Luminescence, 2017,38(2): 177-181
江孝伟, 武华,. 一维增透亚波长光栅的研究[J]. 发光学报, 2017,38(2): 177-181 DOI： 10.3788/fgxb20173802.0177.

JIANG Xiao-wei, WU Hua,. Research of 1D Sub-wavelength Grating Anti-reflection[J]. Chinese Journal of Luminescence, 2017,38(2): 177-181 DOI： 10.3788/fgxb20173802.0177.

摘要

将具有高透射性的亚波长光栅置于微机械波长可调谐垂直腔面发射激光器（VCSEL）的内腔当中可以提高波长的调谐范围，为了使波长调谐范围达到最优则必须优化高透射性的亚波长光栅使其透射率达到最大。利用严格耦合波法分析了亚波长光栅的占空比、周期、厚度和入射角对其透射率的影响并找出最优的光栅参数。通过计算分析可得，对于TE和TM偏振存在最佳的占空比使其透射率达到99.5%。在文中条件下，它们对应的占空比分别为0.23和0.80。而光栅厚度对于TE和TM偏振透射率的影响是周期性的，在一个周期内存在一个最佳值使其透射率达到最高。在文中条件下，TE偏振的厚度周期是150 nm，TM偏振的厚度周期是300 nm。当光栅参数不变时，无论是TE还是TM偏振光，它们的透射率只有在垂直入射光栅时（入射角为0）才能达到最大。而通过等效介质原理可以得出，周期对透射率没有影响。最后计算了透射率在光栅厚度和占空比同时变化时的变化趋势，并从中得出最优的光栅参数。

Abstract

High transmission sub-wavelength gratings placed in the micro-electro-mechanical system(MEMS) wavelength tunable vertical cavity surface emitting laser (VCSEL) inner cavity can improve the wavelength tuning range. In order to make the wavelength tuning range of the tunable VCSEL be largest

the transmittance of the anti-reflection sub-wavelength must be the maximum. By using rigorous coupled wave analysis (RCWA)

the effects of the sub-wavelength parameters (

e.g

duty cycle

period

thickness) and angle of incidence on the transmission were analyzed

and the optimum parameters and angle of incidence were gotten. Either TE or TM polarization has the optimum duty cycle to make its transmittance get 99.5%. The duty cycles of TE and TM polarization are 0.23 and 0.8 under the conditions of this paper. The effect of the grating thickness on the transmittance is periodic variation. The period of TE and TM polarization are 150 nm and 300 nm

respectively. For fixed grating parameters

the transmittance can be maximum only when the incidence angle of the light source is 0

no matter TE or TM polarization. From equivalent medium theory (EMT)

it is found that the grating period has no influence on the grating transmittance. At last

the transmittance was calculated when the grating thickness and duty cycle changed together

and the optimum grating parameters were gotten.

关键词

亚波长光栅透射率可调谐VCSEL

Keywords

sub-wavelengthtransmittancetunable VCSEL

references

李硕, 关宝璐, 史国柱, 等. 亚波长光栅调制的偏振稳定垂直腔面发射激光器研究[J]. 物理学报, 2012, 16(18):184208-1-6. LI S, GUAN B L, SHI G Z, et al.. Polarization stable vertical-cavity surface-emitting laser with surface sub-wavelength gratings[J]. Acta Phys. Sinica, 2012, 16(18):184208-1-6. (in Chinese)

李秀山, 宁永强, 张星, 等. Si/SiO2高对比光栅参数对反射率的影响[J]. 发光学报, 2015, 36(7):806-810. LI X S, NING Y Q, ZHANG X, et al.. Influence of grating parameters on reflectivity of Si/SiO2 high contrast gratings[J]. Chin. J. Lumin., 2015, 36(7):806-810. (in Chinese)

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SELVARAJA S K, VERMEULEN D, SCHAEKERS M, et al.. Highly efficient grating coupler between optical fiber and silicon photonic circuit[C]. Proceedings of The 2009 Conference on Quantum electronics and Laser Science Conference on Lasers and Electro-Optics, Baltimore, Maryland, US, 2009:CTuC6.

MEKIS A, GLOECKNER S, MASINI G, et al.. A grating-coupler-enabled CMOS photonics platform[J]. IEEE J. Sel. Top. Quant. Electron., 2011, 17(3):597-608.

BOGAERTS W, TAILLAERT D, DUMON P, et al.. A polarization-diversity wavelength duplexer circuit in silicon-on-insulator photonic wires[J]. Opt. Express, 2007, 15(4):1567-1578.

DAVANI H A, KGEL B, DEBERNARDI P, et al.. Polarization investigation of a tunable high-speed short-wavelength bulk-micromachined MEMS-VCSEL[J]. SPIE, 2012, 8276:82760T-1-8.

HAGGANS C W, LI L F, KOSTUK R K. Effective-medium theory of zeroth-order lamellar gratings in conical mountings[J]. J. Opt. Soc. Am. A, 1993, 10(10):2217-2225.

MOHARAM M G, GAYLORD T K. Rigorous coupled-wave analysis of grating diffraction-E-mode polarization and losses[J]. J. Opt. Soc. Am., 1983, 73(4):451-455.

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