大功率半导体激光器可靠性研究和失效分析

王文知; 井红旗; 祁琼; 王翠鸾; 倪羽茜; 刘素平; 马骁宇

doi:10.3788/fgxb20173802.0165

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大功率半导体激光器可靠性研究和失效分析

器件制备及器件物理 | 更新时间：2020-08-12

- 大功率半导体激光器可靠性研究和失效分析
- Reliability Test and Failure Analysis of High Power Semicounductor Laser
- 发光学报 2017年38卷第2期页码：165-169
- 作者机构：
  
  中国科学院半导体研究所光电子器件国家工程研究中心, 北京 100083
- 作者简介：
- 基金信息：
  
  国家自然科学基金（61306057）资助项目
- DOI：10.3788/fgxb20173802.0165
  中图分类号： TN306;TN248.4
- 纸质出版日期：2017-2-5，
  
  收稿日期：2016-7-18，
  
  修回日期：2016-10-8，
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王文知, 井红旗, 祁琼等. 大功率半导体激光器可靠性研究和失效分析[J]. 发光学报, 2017,38(2): 165-169

WANG Wen-zhi, JING Hong-qi, QI Qiong etc. Reliability Test and Failure Analysis of High Power Semicounductor Laser[J]. Chinese Journal of Luminescence, 2017,38(2): 165-169
王文知, 井红旗, 祁琼等. 大功率半导体激光器可靠性研究和失效分析[J]. 发光学报, 2017,38(2): 165-169 DOI： 10.3788/fgxb20173802.0165.

WANG Wen-zhi, JING Hong-qi, QI Qiong etc. Reliability Test and Failure Analysis of High Power Semicounductor Laser[J]. Chinese Journal of Luminescence, 2017,38(2): 165-169 DOI： 10.3788/fgxb20173802.0165.

摘要

对自主研发的975 nm波长的COS封装的大功率半导体单管激光器进行了10，12，14 A的电流步进加速应力试验，应用逆幂律模型和指数分布的理论对试验结果进行了分析，计算出在8 A的电流下，器件的平均寿命为28 999 h。研究了器件的失效形式和老化前后的温升、偏振度的变化，结果表明：失效形式主要有体内退化、腔面退化、与焊接有关的退化；老化后的器件的结温上升增多，偏振度下降10%左右。

Abstract

The current step accelerated stress tests were carried out at 10

14 A for 975 nm high power semiconductor laser which is packaged with the way of COS. The test results were analyzed by using the inverse power law model and the exponential distribution theory. The average life of the device is 28 999 h under the current of 8 A. The high power semiconductor laser's failure and the change of temperature rise and the degree of polarization before and after aging were also studied. The results show that the main failure is internal degradation

deterioration of the cavity surface

and welding related degradation. The junction temperature of device after aging is higher

and the degree of polarization decreases about 10%.

关键词

可靠性步进加速应力指数分布

Keywords

reliabilitystep accelerated stressexponential distribution

references

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