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量子阱层和垒层具有不同Al组分的270/290/330 nm AlGaN基深紫外LED光电性能
270/290/330 nm AlGaN-based Deep Ultraviolet Light-emitting Diodes with Different Al Content in Quantum Wells and Barriers
- 发光学报 2017年38卷第1期 页码：57-62
- 作者机构：
1. 江南大学 理学院,江苏 无锡,中国,214122
2. 无锡职业技术学院 汽车与交通学院,江苏 无锡,214121
- 作者简介：
- 基金信息：中国博士后科学基金（2014M561623）();江苏省博士后科研资助计划（1401013B）资助项目()
DOI：10.3788/fgxb20173801.0057
中图分类号： TN304.23纸质出版日期：2017-1-5，
收稿日期：2016-7-18，
修回日期：2016-9-14，
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王福学, 叶煊超,. 量子阱层和垒层具有不同Al组分的270/290/330 nm AlGaN基深紫外LED光电性能[J]. 发光学报, 2017,38(1): 57-62
WANG Fu-xue, YE Xuan-chao,. 270/290/330 nm AlGaN-based Deep Ultraviolet Light-emitting Diodes with Different Al Content in Quantum Wells and Barriers[J]. Chinese Journal of Luminescence, 2017,38(1): 57-62
王福学, 叶煊超,. 量子阱层和垒层具有不同Al组分的270/290/330 nm AlGaN基深紫外LED光电性能[J]. 发光学报, 2017,38(1): 57-62 DOI： 10.3788/fgxb20173801.0057.
WANG Fu-xue, YE Xuan-chao,. 270/290/330 nm AlGaN-based Deep Ultraviolet Light-emitting Diodes with Different Al Content in Quantum Wells and Barriers[J]. Chinese Journal of Luminescence, 2017,38(1): 57-62 DOI： 10.3788/fgxb20173801.0057.
摘要
为了研究AlGaN量子阱层和垒层中Al组分不同对AlGaN基深紫外发光二极管（LED）光电性能的影响，本文利用MOCVD生长、光刻和干法刻蚀工艺制备了AlGaN量子阱层和垒层具有不同Al组分的270/290/330 nm深紫外LED，通过实验和数值模拟计算方法发现，量子阱层和垒层中具有低Al组分紫外LED的AlGaN材料具有较低的位错密度、较高的光输出功率和外量子效率。通过电流-电压（
I-V
）曲线拟合出的较大的理想因子（
>
3.5）和能带结构图表明，AlGaN深紫外LED的电流产生是隧穿机制占据主导作用，这是因为高Al组分AlGaN量子阱中强极化场造成了有源层区域较大的能带弯曲和电势降。
Abstract
The optical and electrical properties of 270/290/330 nm AlGaN-based deep ultraviolet (UV) light-emitting diodes (LEDs) with different Al content in quantum wells and barriers were investigated systematically. Based on the experimental and numerical study
It is observed that the UV LEDs with longer wavelength and lower Al composition in AlGaN multiple quantum wells (MQWs) possess less dislocation density
higher light output power and internal quantum efficiency. The large ideality factors calculated from
I-V
curves and simulated energy band profiles indicate that the current in the deep UV LEDs with high Al content is dominated by tunneling mechanism
which is attribute to the resulting potential drop in the active region caused by large polarization field in AlGaN MQWs.
关键词
AlGaN深紫外发光二极管数值模拟
Keywords
AlGaNdeep ultravioletlight-emitting diodes (LEDs)numerical simulation
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