粉末靶制备的AZO/Ag/AZO透明导电薄膜的光电性能

刘思宁; 周艳文; 吴川; 吴法宇

doi:10.3788/fgxb20153612.1427

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粉末靶制备的AZO/Ag/AZO透明导电薄膜的光电性能

器件制备及器件物理 | 更新时间：2020-08-12

- 粉末靶制备的AZO/Ag/AZO透明导电薄膜的光电性能
- Optical and Electrical Properties of AZO/Ag/AZO Transparent Conductive Films Prepared by RF Magnetron Sputtering Using Powder Targets
- 发光学报 2015年36卷第12期页码：1427-1433
- 作者机构：
  
  辽宁科技大学材料与冶金学院,辽宁鞍山,114051
- 作者简介：
- 基金信息：
  
  国家自然科学基金(51172101,51372109)();辽宁省高等学校优秀人才支持计划(LR2012009)资助项目()
- DOI：10.3788/fgxb20153612.1427
  中图分类号： TM24;O484.4
- 纸质出版日期：2015-12-10，
  
  收稿日期：2015-8-10，
  
  修回日期：2015-8-24，
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刘思宁, 周艳文, 吴川等. 粉末靶制备的AZO/Ag/AZO透明导电薄膜的光电性能[J]. 发光学报, 2015,36(12): 1427-1433

LIU Si-ning, ZHOU Yan-wen, WU Chuan etc. Optical and Electrical Properties of AZO/Ag/AZO Transparent Conductive Films Prepared by RF Magnetron Sputtering Using Powder Targets[J]. Chinese Journal of Luminescence, 2015,36(12): 1427-1433
刘思宁, 周艳文, 吴川等. 粉末靶制备的AZO/Ag/AZO透明导电薄膜的光电性能[J]. 发光学报, 2015,36(12): 1427-1433 DOI： 10.3788/fgxb20153612.1427.

LIU Si-ning, ZHOU Yan-wen, WU Chuan etc. Optical and Electrical Properties of AZO/Ag/AZO Transparent Conductive Films Prepared by RF Magnetron Sputtering Using Powder Targets[J]. Chinese Journal of Luminescence, 2015,36(12): 1427-1433 DOI： 10.3788/fgxb20153612.1427.

摘要

室温下

采用射频磁控溅射AZO粉末靶和Ag靶在玻璃基底上制备Ag层厚度分别为12 nm和15 nm两组对称结构掺铝氧化锌/银/掺铝氧化锌(AZO/Ag/AZO)透明导电薄膜

研究了Ag层和AZO层厚度对薄膜光电性能的影响。结果表明:3层薄膜的可见光区平均透光率达到了80%

550 nm处的最高透过率达到了88%

方块电阻小于5 /□。Ag层厚度是影响AZO/Ag/AZO薄膜光电性能的主要因素

AZO层的厚度对薄膜光学性能影响较大。

Abstract

The sandwich films composed of aluminum doped zinc oxide (AZO)/silver (Ag)/aluminum doped zinc oxide (AZO) layers were prepared on glass substrates by RF magnetron sputtering using AZO powder target and solid Ag target at room temperature. Two groups of AZO/Ag/AZO films were deposited with Ag thickness of 12 nm and 15 nm. The optical and electrical properties of the sandwich films were investigated. The results show that the average transmittance of the films are about 80% within the visible wavelength

and the highest transmittance is 88% at 550 nm. The sheet resistances of the multilayer films are lower than 5 /□. The thickness of Ag layer is the main factor to affect the optical and electrical properties of AZO/Ag/AZO films. The thickness of AZO layer has a certain effect on the optical properties of the sandwich films.

关键词

多层透明导电薄膜金属基透明导电薄膜粉末靶射频磁控溅射

Keywords

TCO multilayer filmsmetal matrix TCO filmspowder targetRF magnetron sputtering

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