极紫外波段变栅距光栅刻槽密度变化及光谱分辨能力分析

李文昊; 姜岩秀; 吴娜; 张桐; 王鹍

doi:10.3788/fgxb20153609.1094

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极紫外波段变栅距光栅刻槽密度变化及光谱分辨能力分析

发光学应用及交叉前沿 | 更新时间：2020-08-12

- 极紫外波段变栅距光栅刻槽密度变化及光谱分辨能力分析
- Analysis for Groove Density and Spectral Resolution of Varied-line-space Gratings in EUV Spectrum
- 发光学报 2015年36卷第9期页码：1094-1099
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
  
  国家重大科学仪器设备开发专项资金(2011YQ120023)资助项目()
- DOI：10.3788/fgxb20153609.1094
  中图分类号： O436.1
- 纸质出版日期：2015-9-3，
  
  收稿日期：2015-5-25，
  
  修回日期：2015-6-24，
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李文昊, 姜岩秀, 吴娜等. 极紫外波段变栅距光栅刻槽密度变化及光谱分辨能力分析[J]. 发光学报, 2015,36(9): 1094-1099

LI Wen-hao, JIANG Yan-xiu, WU Na etc. Analysis for Groove Density and Spectral Resolution of Varied-line-space Gratings in EUV Spectrum[J]. Chinese Journal of Luminescence, 2015,36(9): 1094-1099
李文昊, 姜岩秀, 吴娜等. 极紫外波段变栅距光栅刻槽密度变化及光谱分辨能力分析[J]. 发光学报, 2015,36(9): 1094-1099 DOI： 10.3788/fgxb20153609.1094.

LI Wen-hao, JIANG Yan-xiu, WU Na etc. Analysis for Groove Density and Spectral Resolution of Varied-line-space Gratings in EUV Spectrum[J]. Chinese Journal of Luminescence, 2015,36(9): 1094-1099 DOI： 10.3788/fgxb20153609.1094.

摘要

针对应用于50~150nm波段的变栅距光栅

采用球面波曝光系统进行优化设计

分析了不同宽度光栅的刻槽密度变化和光谱分辨能力。理论分析结果表明

光栅宽度为4mm时

理论分辨能力高于14000;光栅宽度为10mm时

理论分辨能力约为9000;光栅宽度为30mm时

理论分辨能力急剧下降

约为3000。光栅的宽度越大

其刻槽弯曲程度就越大

光栅的光谱分辨能力就越低

因此球面波曝光系统只适合制作宽度较小的变栅距光栅。

Abstract

For the varied line-space (VLS) grating used in the region of 50-150 nm

the spherical wave exposure system was used for the optimization design

and the groove density and spectra resolution of the different width grating were analyzed. The theory resolution ability is higher than 14000 when the grating width is 4mm in the use of wavelength range

about 9000 when the grating width is 10mm

and about 3000 when the grating width is 30mm

respectively. The bigger the grating width is

the bigger the bending degree of groove is

and the lower the spectral resolution ability is. Therefore

spherical wave exposure system is only suitable for making the VLS grating with smaller width.

关键词

变栅距光栅球面波刻槽密度光谱分辨能力

Keywords

varied-line-space gratingspherical wavefrontgroove densityspectral resolution

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