浏览全部资源
扫码关注微信
1. 发光学及应用国家重点实验室 中国科学院长春光学精密机械与物理研究所,吉林 长春,130033
2. 中国科学院大学 北京,100049
纸质出版日期:2015-7-3,
收稿日期:2015-3-7,
修回日期:2015-4-12,
扫 描 看 全 文
李秀山, 宁永强, 张星等. Si/SiO<sub>2</sub>高对比光栅参数对反射率的影响[J]. 发光学报, 2015,36(7): 806-810
LI Xiu-shan, NING Yong-qiang, ZHANG Xing etc. Influence of Grating Parameters on Reflectivity of Si/SiO<sub>2</sub> High Contrast Gratings[J]. Chinese Journal of Luminescence, 2015,36(7): 806-810
李秀山, 宁永强, 张星等. Si/SiO<sub>2</sub>高对比光栅参数对反射率的影响[J]. 发光学报, 2015,36(7): 806-810 DOI: 10.3788/fgxb20153607.0806.
LI Xiu-shan, NING Yong-qiang, ZHANG Xing etc. Influence of Grating Parameters on Reflectivity of Si/SiO<sub>2</sub> High Contrast Gratings[J]. Chinese Journal of Luminescence, 2015,36(7): 806-810 DOI: 10.3788/fgxb20153607.0806.
为解决850 nm波长VCSEL表面的GaAs/空气材料的高对比亚波长光栅(HCGs)稳定性差的问题
设计了基于Si/SiO
2
材料的高对比亚波长光栅。研究了850 nm波长高稳定、高反射率(
>
99.5%)的高对比亚波长矩形光栅参数的变化对反射率的影响。利用有限元分析软件计算了Si/SiO
2
高对比亚波长光栅的高度、填充因子、周期、刻蚀深度及光栅倾角等各个参数的变化对850 nm的反射率影响。计算结果表明:当波长为850 nm的TE光从SiO
2
正入射到矩形HCGs且只有在光栅的倾角大于88的小范围内变化时
HCGs的反射率才大于0.995
而光栅的其他参数对HCGs反射率的影响可以忽略不计。
In order to solve the problem of poor stability of high contrast gratings (HCGs) for 850 nm VCSEL
a new type of Si/SiO
2
HCGs was put forward. The influence of grating parameters on HCG reflectivity of 850 nm was studied. The influence of the grating parameters
such as height
fill factor
duty
etching depth
angle
on the reflectivity of Si/SiO
2
HCGs for 850 nm was simulated and analyzed by the finite element analysis software. For the 850 nm TE light incidence from SiO
2
to the rectangular HCGs
it is found that only when the angle of gating is greater than 88
can the reflectivity of HCGs be greater than 0.995
and other parameters of HCGs have a larger tolerance.
光栅高对比亚波长光栅高反射率有限元分析
gratingshigh contrast gratingshighly reflectivityfinite element analysis
Karagodsky V, Sedgwick F G, Chang-Hasnain C J. Theoretical analysis of subwavelength high contrast grating reflectors [J]. Opt. Express, 2010, 18(16):16973-16988.
Chang-Hasnain C J, Zhou Y, Huang M, et al. High-contrast grating VCSELs [J]. IEEE J. Sel. Top. Quant. Electron., 2009, 15(3):869-878.
Huang M C Y, Zhou Y, Chang-Hasnain C J. A surface-emitting laser incorporating a high-index-contrast subwavelength grating [J]. Nat. Photon., 2007, 1(2):119-122.
Huang M C Y, Zhou Y, Chang-Hasnain C J. A nanoelectromechanical tunable laser [J]. Nat. Photon., 2008, 2(3):180-184.
Yang H, Guo X, Guan B L, et al. The influence of injection current on transverse mode characteristics of vertical-cavity surface-emitting lasers [J]. Acta Phys. Sinica (物理学报), 2008, 57(5):2959-2965 (in Chinese).
Zhang J S, Ning Y Q, Zhang J L, et al. Temperature characteristic analysis of 808 nm vertical cavity surface emitting laser arrays [J]. Chin. J. Lumin.(发光学报), 2013, 34(12):1636-1640 (in Chinese).
Zhang X W, Ning Y Q, Qin L, et al. Study of oxide grating vertical cavity surface emitting lasers [J]. Chin. J. Lumin. (发光学报), 2013, 34(11):1517-1520 (in Chinese).
Huang M C, Zhou Y, Chang-Hasnain C J. Polarization mode control in high contrast subwavelength grating VCSEL //Conference on Lasers and Electro-Optics, San Jose: Optical Society of America, 2008:1-2.
Debernardi P, Ostermann J M, Feneberg M, et al. Reliable polarization control of VCSELs through monolithically integrated surface gratings: A comparative theoretical and experimental study [J]. IEEE J. Sel. Top. Quant. Electron., 2005, 11(1):107-116.
Ostermann J M, Debernardi P, Jalics C, et al. Shallow surface gratings for high-power VCSELs with one preferred polarization for all modes [J]. IEEE Photon. Technol. Lett., 2005, 17(8):1593-1595.
Zhou Y, Huang M C Y, Chase C, et al. High-index-contrast grating (HCG) and its applications in optoelectronic devices [J]. IEEE J. Sel. Top. Quant. Electron., 2009, 15(5):1485-1499.
Palik E D. Optical Constants of Solids [M]. London: Academic Press, 1998:578-580.
0
浏览量
45
下载量
5
CSCD
关联资源
相关文章
相关作者
相关机构