Si/SiO2高对比光栅参数对反射率的影响

李秀山; 宁永强; 张星; 贾鹏; 陈泳屹; 秦莉; 刘云; 王立军

doi:10.3788/fgxb20153607.0806

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Si/SiO₂高对比光栅参数对反射率的影响

器件制备及器件物理 | 更新时间：2020-08-12

- Si/SiO₂高对比光栅参数对反射率的影响
- Influence of Grating Parameters on Reflectivity of Si/SiO₂ High Contrast Gratings
- 发光学报 2015年36卷第7期页码：806-810
- 作者机构：
  
  1. 发光学及应用国家重点实验室中国科学院长春光学精密机械与物理研究所,吉林长春,130033
  2. 中国科学院大学北京,100049
- 作者简介：
- 基金信息：
  
  国家自然科学基金(61234004,51172225,61204056,61376070,61474118,61176045,61204055)();吉林省科技厅项目(
- DOI：10.3788/fgxb20153607.0806
  中图分类号： TN248.4
- 纸质出版日期：2015-7-3，
  
  收稿日期：2015-3-7，
  
  修回日期：2015-4-12，
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李秀山, 宁永强, 张星等. Si/SiO2高对比光栅参数对反射率的影响[J]. 发光学报, 2015,36(7): 806-810

LI Xiu-shan, NING Yong-qiang, ZHANG Xing etc. Influence of Grating Parameters on Reflectivity of Si/SiO2 High Contrast Gratings[J]. Chinese Journal of Luminescence, 2015,36(7): 806-810
李秀山, 宁永强, 张星等. Si/SiO2高对比光栅参数对反射率的影响[J]. 发光学报, 2015,36(7): 806-810 DOI： 10.3788/fgxb20153607.0806.

LI Xiu-shan, NING Yong-qiang, ZHANG Xing etc. Influence of Grating Parameters on Reflectivity of Si/SiO2 High Contrast Gratings[J]. Chinese Journal of Luminescence, 2015,36(7): 806-810 DOI： 10.3788/fgxb20153607.0806.

摘要

为解决850 nm波长VCSEL表面的GaAs/空气材料的高对比亚波长光栅(HCGs)稳定性差的问题

设计了基于Si/SiO

材料的高对比亚波长光栅。研究了850 nm波长高稳定、高反射率(

99.5%)的高对比亚波长矩形光栅参数的变化对反射率的影响。利用有限元分析软件计算了Si/SiO

高对比亚波长光栅的高度、填充因子、周期、刻蚀深度及光栅倾角等各个参数的变化对850 nm的反射率影响。计算结果表明:当波长为850 nm的TE光从SiO

正入射到矩形HCGs且只有在光栅的倾角大于88的小范围内变化时

HCGs的反射率才大于0.995

而光栅的其他参数对HCGs反射率的影响可以忽略不计。

Abstract

In order to solve the problem of poor stability of high contrast gratings (HCGs) for 850 nm VCSEL

a new type of Si/SiO

HCGs was put forward. The influence of grating parameters on HCG reflectivity of 850 nm was studied. The influence of the grating parameters

such as height

fill factor

duty

etching depth

angle

on the reflectivity of Si/SiO

HCGs for 850 nm was simulated and analyzed by the finite element analysis software. For the 850 nm TE light incidence from SiO

to the rectangular HCGs

it is found that only when the angle of gating is greater than 88

can the reflectivity of HCGs be greater than 0.995

and other parameters of HCGs have a larger tolerance.

关键词

光栅高对比亚波长光栅高反射率有限元分析

Keywords

gratingshigh contrast gratingshighly reflectivityfinite element analysis

references

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Huang M C Y, Zhou Y, Chang-Hasnain C J. A nanoelectromechanical tunable laser [J]. Nat. Photon., 2008, 2(3):180-184.

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Debernardi P, Ostermann J M, Feneberg M, et al. Reliable polarization control of VCSELs through monolithically integrated surface gratings: A comparative theoretical and experimental study [J]. IEEE J. Sel. Top. Quant. Electron., 2005, 11(1):107-116.

Ostermann J M, Debernardi P, Jalics C, et al. Shallow surface gratings for high-power VCSELs with one preferred polarization for all modes [J]. IEEE Photon. Technol. Lett., 2005, 17(8):1593-1595.

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