大功率VCSEL三角列阵的空间相干性

贾鹏; 秦莉; 张星; 韩振伟; 李秀山; 陈泳屹; 宁永强; 王立军

doi:10.3788/fgxb20153606.0673

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大功率VCSEL三角列阵的空间相干性

器件制备及器件物理 | 更新时间：2020-08-12

- 大功率VCSEL三角列阵的空间相干性
- Spatial Coherence of High Power VCSEL Triangular-array
- 发光学报 2015年36卷第6期页码：673-678
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 发光学及应用国家重点实验室中国科学院长春光学精密机械与物理研究所,吉林长春,130033
  3. 中国科学院大学北京,100049
- 作者简介：
- 基金信息：
  
  国家自然科学基金重点项目(61234004,61434005,61176045,61306086,61474118,61474010)();吉林省科技计划(201401
- DOI：10.3788/fgxb20153606.0673
  中图分类号： TN248.4
- 纸质出版日期：2015-6-3，
  
  收稿日期：2015-3-23，
  
  修回日期：2015-4-6，
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贾鹏, 秦莉, 张星等. 大功率VCSEL三角列阵的空间相干性[J]. 发光学报, 2015,36(6): 673-678

JIA Peng, QIN Li, ZHANG Xing etc. Spatial Coherence of High Power VCSEL Triangular-array[J]. Chinese Journal of Luminescence, 2015,36(6): 673-678
贾鹏, 秦莉, 张星等. 大功率VCSEL三角列阵的空间相干性[J]. 发光学报, 2015,36(6): 673-678 DOI： 10.3788/fgxb20153606.0673.

JIA Peng, QIN Li, ZHANG Xing etc. Spatial Coherence of High Power VCSEL Triangular-array[J]. Chinese Journal of Luminescence, 2015,36(6): 673-678 DOI： 10.3788/fgxb20153606.0673.

摘要

由厄米-高斯光束理论和空间相干性定理出发

研究了大功率垂直腔面发射激光器(VCSEL)三角形列阵器件的光束质量和空间相干特性。采用二阶距法和空间相干度积分法得到980 nm波段VCSEL三角列阵器件的远场发散角和空间相干度

并讨论了列阵器件单元间距对其远场特性和空间相干特性的影响。实验结果表明:当三角列阵单元孔径为150 m时

随着列阵单元间距由200 m增大到300 m

列阵器件的远场发散角由9.5增加到12.5

而其空间相干度由0.719减小到0.526。在相同注入电流条件下

3种列阵器件的出光功率基本相同。

Abstract

The spatial coherence properties of high power vertical cavity surface emitting lasers (VCSELs) triangle-arrays were studied based on the theorem of Hermitian-Gaussian beams and spatial coherence. The far-field divergence angle and spatial coherence degree were gauged using the second-moment method and spatial coherence degree integral average value method for the devices of 980 nm wavelength VCSEL arrays. The influence of array-units distance on far-field characteristics and coherent characteristics was also discussed. With the increasing of array element spacing from 200 m to 300 m

the far-field divergence angle of VCSEL arrays device increases from 9.5 to 12.5

and the spatial coherence degree decreases from 0.719 to 0.526

while the unit aperture of triangle array is 150 m. Under the same injection current condition

the optical powers of three VCSEL array devices are almost equal.

关键词

VCSEL三角形列阵光束质量空间相干特性

Keywords

VCSEL triangle-arraysoptical beam qualityspatial coherence

references

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