基于亚波长金属光栅的980 nm 高功率垂直腔面发射激光器偏振控制

张祥伟; 宁永强; 秦莉; 刘云; 王立军

doi:10.3788/fgxb20123309.1012

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基于亚波长金属光栅的980 nm 高功率垂直腔面发射激光器偏振控制

器件制备及器件物理 | 更新时间：2020-08-12

- 基于亚波长金属光栅的980 nm 高功率垂直腔面发射激光器偏振控制
- Polarization Control of 980 nm High-power Vertical-cavity Surface-emitting Lasers by Using Sub-wavelength Metal-gratings
- 发光学报 2012年33卷第9期页码：1012-1017
- 作者机构：
  
  1. 中国科学院研究生院北京,100039
  2. 发光学与应用国家重点实验室中国科学院长春光学精密机械与物理研究所,吉林长春,130033
- 作者简介：
- 基金信息：
  
  国家自然科学基金(11074247,61176045,51172225,61106068)资助项目()
- DOI：10.3788/fgxb20123309.1012
  中图分类号： TN248.4
- 纸质出版日期：2012-9-10，
  
  收稿日期：2012-5-8，
  
  修回日期：2012-7-10，
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张祥伟, 宁永强, 秦莉, 刘云, 王立军. 基于亚波长金属光栅的980 nm 高功率垂直腔面发射激光器偏振控制[J]. 发光学报, 2012,33(9): 1012-1017

ZHANG Xiang-wei, NING Yong-qiang, QIN Li, LIU Yun, WANG Li-jun. Polarization Control of 980 nm High-power Vertical-cavity Surface-emitting Lasers by Using Sub-wavelength Metal-gratings[J]. Chinese Journal of Luminescence, 2012,33(9): 1012-1017
张祥伟, 宁永强, 秦莉, 刘云, 王立军. 基于亚波长金属光栅的980 nm 高功率垂直腔面发射激光器偏振控制[J]. 发光学报, 2012,33(9): 1012-1017 DOI： 10.3788/fgxb20123309.1012.

ZHANG Xiang-wei, NING Yong-qiang, QIN Li, LIU Yun, WANG Li-jun. Polarization Control of 980 nm High-power Vertical-cavity Surface-emitting Lasers by Using Sub-wavelength Metal-gratings[J]. Chinese Journal of Luminescence, 2012,33(9): 1012-1017 DOI： 10.3788/fgxb20123309.1012.

摘要

利用制作在P-DBRs表面的亚波长金属光栅

在980 nm高功率底发射垂直腔面发射激光器有源区引入各向异性增益

达到了偏振控制的目的。本光栅基于等效介质理论和抗反射理论设计而成

光栅周期为186 nm

占空比为0.5。通过多物理场有限元分析软件对所设计的光栅进行了模拟分析

结果基本上符合设计要求。通过优化工艺步骤得到了较好的实验结果

550 μm孔径的VCSEL在正交方向上的偏振比为3

输出功率达到870 mW。

Abstract

The polarization control of vertical-cavity surface-emitting lasers with high power emission was demonstrated by using metal-grating to import non-isotropic gain. The grating with a period of 186 nm and a duty ratio of 0.5 which were calculated based on effective medium theory and antireflection theory. Then

it was simulated by multiphysics field of finite element analysis software

and the results correspond well with our design requirements. A polarization ratio of 3

an output power of 870 mW was demonstrated for a 550 μm aperture device.

关键词

垂直腔面发射激光器金属光栅偏振控制

Keywords

vertical-cavity surface-emitting lasermetal-gratingpolarization controlling

references

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