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福州大学 物理与信息工程学院, 福建 福州 350002
收稿:2008-12-08,
修回:1900-1-2,
网络首发:2009-10-30,
纸质出版:2009-10-30
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曾祥耀, 叶 芸, 袁军林, 等. 场发射显示Ag膜电极的制备及其电性能[J]. 发光学报, 2009,30(5):706-711.
ZENG Xiang-yao, YE Yun, YUAN Jun-lin, et al. Preparation and Electric Performance of Ag Films as Field Emission Display Electrodes[J]. Chinese Journal of Luminescence, 2009, 30(5): 706-711.
场发射显示(FED)被认为是CRT的平板化
受到人们关注。作者采用直流磁控溅射法
在Al
2
O
3
过渡层上制备面心立方结构的Ag多晶薄膜。通过XRD、SEM、AFM测试分析发现
溅射功率分为两个区域
在溅射功率不高于2.8 kW时
沉积速率随着功率线性增大
得到Ag膜晶粒尺寸均一
薄膜电阻率逐步降低;溅射功率高于2.8 kW后
沉积速率没有显著增大
出现较多的大晶粒
电阻率升高
并且从理论上给出了解释。综合来看
溅射功率在2.8 kW所制备的Ag膜微观结构质量达到最佳
电阻率也达到最小值。
paper
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