ZHOU Jun, FANG Qing-qing, WANG Bao-ming, LI Mao, YAN Fang-liang, WANG Sheng-nan. Preparation and Luminescence Properties of Zn<sub>1-x</sub>Mg<sub>x</sub>O Thin Films by Sol-gel Method [J]. Chinese Journal of Luminescence, 2008,29(6): 1036-1040
ZHOU Jun, FANG Qing-qing, WANG Bao-ming, LI Mao, YAN Fang-liang, WANG Sheng-nan. Preparation and Luminescence Properties of Zn<sub>1-x</sub>Mg<sub>x</sub>O Thin Films by Sol-gel Method [J]. Chinese Journal of Luminescence, 2008,29(6): 1036-1040DOI:
ZnO is an interesting wide direct band gap Ⅱ-Ⅵ semiconductor with wurtzite structure.The high quality ZnO thin film is one of most potential membranous materials at present.Zinc oxide with high stability and a direct band gap of 3.37 eV has attracted tremendous attention because of its high potential for application as short wavelength optical devices.In recent studies
it is found that doping of other elements can broad the band gap of ZnO films.This will be beneficial to the development of optical devices.There are many methods to prepare ZnO films
such as pulsed laser deposition
reactive thermal evaporation
reactive magnetron sputtering
electrodeposition
sol-gel and so on.Sol-gel method has many advantages
may prepare big area semiconductor thin film
fit for industry production
and so on.In order to prepare ultraviolet optical device
study on how to broad the band gap of ZnO is very important.In this paper
in order to study the effect of Mg concentration and annealing temperature on the microstructure and band gap of Zn
1-x
Mg
x
O films
the Zn
1-x
Mg
x
O(
x
=0.1
0.2
0.3
0.4
0.5
0.6
0.7)thin films were prepared on glass substrate by the method of sol-gel.The grown films were characterized by means of X-ray diffraction
photoluminescence spectroscopy and transmission spectrum.The XRD results show that when the value of x is between 0.1 and 0.3
the thin film remains the structure of hexagonal wurtzite and the angle of diffraction peak becomes bigger with increasing x
MgO impurity phase segregated at
x
≥0.4.According to PL spectra
the thin films show an intensive UV emission peak due to the near band-edge emission and a weak UV emission peak around 403 nm between 340 nm and 520 nm at room temperature
and the intensive UV emission peak have the blue shift with the content of Mg increasing from 0.1 to 0.3.It indicates that the band gap of ZnO was broaden with increasing Mg-doping concentration from 0.1 to 0.3.According to the transmission spectrum of Zn
1-x
Mg
x
O(
x
=0.3
0.4
0.5
0.6
0.7)films
it is found that absorption edges are formed when incident wavelength λ
<
350 nm and blue shifted with increase in Mg content.It also indicates more doping Mg may broad the band gap of Zn
1-x
Mg
x
O.Meantime
annealing temperature also can broad the band gap obviously
but the band gap decreases when annealing temperature is above 590℃.Though the doping of Mg can broad the band gap
but high Mg doping can result in precipitation of MgO.Therefore
we must control Mg content and annealing temperature strictly when an optical device is prepared.