Research Progress of Low Threshold Laser Based on Whispering Gallery Mode Microcavity Enhanced Publication

{ "defaultlang": "zh", "titlegroup": { "articletitle": [ { "lang": "zh", "data": [ { "name": "text", "data": "基于回音壁模式光学微腔的低阈值激光器研究进展" } ] }, { "lang": "en", "data": [ { "name": "text", "data": "Research Progress of Low Threshold Laser Based on Whispering Gallery Mode Microcavity" } ] } ] }, "contribgroup": { "author": [ { "name": [ { "lang": "zh", "surname": "李", "givenname": "文媛", "namestyle": "eastern", "prefix": "" }, { "lang": "en", "surname": "LI", "givenname": "Wen-yuan", "namestyle": "eastern", "prefix": "" } ], "stringName": [], "aff": [ { "rid": "aff1", "text": "1" }, { "rid": "aff2", "text": "2" } ], "role": [ "first-author" ], "bio": [ { "lang": "zh", "text": [ "李文媛（1998-），女，内蒙古赤峰人，硕士研究生，2020年于内蒙古师范大学获得学士学位，主要从事二维材料光电性能方面的研究。 E-mail： liwenyuan20@mails.ucas.ac.cn" ], "graphic": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818068&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818076&type=", 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"rid": "aff2", "text": "2" } ], "role": [], "deceased": false }, { "name": [ { "lang": "zh", "surname": "申", "givenname": "彦鑫", "namestyle": "eastern", "prefix": "" }, { "lang": "en", "surname": "SHEN", "givenname": "Yan-xin", "namestyle": "eastern", "prefix": "" } ], "stringName": [], "aff": [ { "rid": "aff1", "text": "1" }, { "rid": "aff2", "text": "2" } ], "role": [], "deceased": false }, { "name": [ { "lang": "zh", "surname": "赵", "givenname": "欣瑞", "namestyle": "eastern", "prefix": "" }, { "lang": "en", "surname": "ZHAO", "givenname": "Xin-rui", "namestyle": "eastern", "prefix": "" } ], "stringName": [], "aff": [ { "rid": "aff1", "text": "1" }, { "rid": "aff2", "text": "2" } ], "role": [], "deceased": false }, { "name": [ { "lang": "zh", "surname": "付", "givenname": "喜宏", "namestyle": "eastern", "prefix": "" }, { "lang": "en", "surname": "FU", "givenname": "Xi-hong", "namestyle": "eastern", "prefix": "" } ], "stringName": [], "aff": [ { "rid": "aff1", "text": "1" } ], "role": [ "corresp" ], "corresp": [ { "rid": "cor1", "lang": "en", "text": "E-mail： fuxh@ciomp.ac.cn", "data": [ { "name": "text", "data": "E-mail： fuxh@ciomp.ac.cn" } ] } ], "bio": [ { "lang": "zh", "text": [ "付喜宏（1980-），男，内蒙古巴彦淖尔人，博士，研究员，2008年于中国科学院长春光学精密机械与物理研究所获得博士学位，主要从事激光技术及应用方面的研究。 E-mail： fuxh@ciomp.ac.cn" ], "graphic": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818081&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818089&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818086&type=", "width": "24.89199829", "height": "29.88732910", "fontsize": "" } ], "data": [ [ { "name": "text", "data": "付喜宏" }, { "name": "text", "data": "（1980-），男，内蒙古巴彦淖尔人，博士，研究员，2008年于中国科学院长春光学精密机械与物理研究所获得博士学位，主要从事激光技术及应用方面的研究。 E-mail： " }, { "name": "text", "data": "fuxh@ciomp.ac.cn" } ] ] } ], "email": "fuxh@ciomp.ac.cn", "deceased": false }, { "name": [ { "lang": "zh", "surname": "宁", "givenname": "永强", "namestyle": "eastern", "prefix": "" }, { "lang": "en", "surname": "NING", "givenname": "Yong-qiang", "namestyle": "eastern", "prefix": "" } ], "stringName": [], "aff": [ { "rid": "aff1", "text": "1" }, { "rid": "aff2", "text": "2" } ], "role": [], "deceased": false } ], "aff": [ { "id": "aff1", "intro": [ { "lang": "zh", "label": "1", "text": "中国科学院长春光学精密机械与物理研究所 发光学及应用国家重点实验室， 吉林 长春　130033", "data": [ { "name": "text", "data": "中国科学院长春光学精密机械与物理研究所 发光学及应用国家重点实验室， 吉林 长春　130033" } ] }, { "lang": "en", "label": "1", "text": "State Key Laboratory of Luminescence and Applications，Changchun Institute of Optics，Fine Mechanics and Physics， Chinese Academy of Sciences，Changchun 130033，China", "data": [ { "name": "text", "data": "State Key Laboratory of Luminescence and Applications，Changchun Institute of Optics，Fine Mechanics and Physics， Chinese Academy of Sciences，Changchun 130033，China" } ] } ] }, { "id": "aff2", "intro": [ { "lang": "zh", "label": "2", "text": "中国科学院大学， 北京　100049", "data": [ { "name": "text", "data": "中国科学院大学， 北京　100049" } ] }, { "lang": "en", "label": "2", "text": "University of Chinese Academy of Sciences，Beijing 100049，China", "data": [ { "name": "text", "data": "University of Chinese Academy of Sciences，Beijing 100049，China" } ] } ] } ] }, "abstracts": [ { "lang": "zh", "data": [ { "name": "p", "data": [ { "name": "text", "data": "回音壁模式（WGM）微腔激光器作为一种微纳激光器件，可以将光约束在微纳量级的谐振腔内并保持稳定的行波传输模式。凭借其高品质因子和小模式体积的特性，WGM微腔激光器具有低阈值和窄线宽的优点，成为了国内外关注的一个热门研究领域。WGM微腔内具有极高的光能量密度，光与物质相互作用得到显著增强。近年来，研究人员将不同增益材料与形态各异的微腔结构相结合，大大促进了WGM微腔激光器领域的发展。本文在概述WGM微腔激光器的特性参数和耦合方式的基础上，介绍了包括液滴微腔、玻璃微腔、半导体材料微腔在内的几种典型WGM微腔激光器的研究成果，并对其性能参数进行了比较。阐述了器件在超灵敏传感、微波光子学和片上集成等诸多领域的应用，并展望了WGM微腔激光器的发展趋势。" } ] } ] }, { "lang": "en", "data": [ { "name": "p", "data": [ { "name": "text", "data": "Whispering gallery mode（WGM） microcavity laser is a micro/nano laser device which can confine light in micro/nano resonant cavity and maintain stable traveling wave transmission mode. With its high quality factor and small mode volume， WGM microcavity laser has the advantages of low threshold and narrow linewidth. It has become a hot research field at home and abroad. WGM microcavity has a very high optical energy density， and the interaction between light and material is significantly enhanced. In recent years， researchers have combined different gain materials with different microcavity structures， which has greatly promoted the development of WGM microcavity lasers. Based on the overview of the characteristic parameters and coupling mode of WGM microcavity lasers， this paper introduces the research results of several typical WGM microcavity lasers， including droplet microcavity， glass microcavity and semiconductor microcavity， and compares their performance parameters. The applications of the devices in ultra sensitive sensing， microwave photonics and on-chip integration are described， and the development trend of WGM microcavity lasers is prospected." } ] } ] } ], "keyword": [ { "lang": "zh", "data": [ [ { "name": "text", "data": "回音壁模式" } ], [ { "name": "text", "data": "液滴微腔" } ], [ { "name": "text", "data": "稀土掺杂玻璃材料微腔" } ], [ { "name": "text", "data": "半导体材料微腔" } ], [ { "name": "text", "data": "二维材料增益介质" } ] ] }, { "lang": "en", "data": [ [ { "name": "text", "data": "whispering gallery mode" } ], [ { "name": "text", "data": "droplet microcavity" } ], [ { "name": "text", "data": "rare earth doped glass microcavity" } ], [ { "name": "text", "data": "semiconductor material microcavity" } ], [ { "name": "text", "data": "two dimensional material gain medium" } ] ] } ], "highlights": [], "body": [ { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "1　引　　言" } ], "level": "1", "id": "s1" } }, { "name": "p", "data": [ { "name": "text", "data": "自从1960年第一台激光器发明以来，人们一直致力于探索新的激光增益介质以及新的激光器结构，推动了激光器行业的迅速发展。光学谐振腔作为激光产生的基本要素之一，为增益介质受激发射提供光反馈，是影响激光品质的重要因素。随着光学加工技术和微纳制造技术的发展，光学谐振腔的体积越来越小，光学微腔应运而生。光学微腔一般是指至少有一个维度的尺寸在光波长量级的微型光学谐振腔。光学微腔体积小、集成度高、能在空间和时间维度上约束光场，提高腔内光与物质相互作用强度。基于光学微腔的激光器在传感和微波光子学等领域具有广阔的应用前景" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "1", "type": "bibr", "rid": "R1", "data": [ { "name": "text", "data": "1" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "4", "type": "bibr", "rid": "R4", "data": [ { "name": "text", "data": "4" } ] } } ], "rid": [ "R1", "R2", "R3", "R4" ], "text": "1-4", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "目前广泛研究的微腔结构有：法布里-珀罗（F-P）腔、光子晶体（PCC）腔和回音壁模式（WGM）微腔。F-P腔通常由前后两个反射镜构成，被广泛应用于各种类型激光器中，但其存在体积较大、品质因子（" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "）较低的问题。PCC腔是在光子晶体中引入缺陷点形成的光场限制结构， " }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值较大，但稳定性较差。回音壁模式（WGM）微腔兼具F-P腔的稳定性和PCC腔的高" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值，腔内可获得高能量密度的光场，经其构建的微腔激光器能够实现低阈值激光激射" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "5", "type": "bibr", "rid": "R5", "data": [ { "name": "text", "data": "5" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "近年来，基于WGM微腔激光器的研究主要聚焦于微腔形态和增益材料的选择，以及微腔结构的设计几方面。微腔主体形态从液体到固体的多样性" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "6", "type": "bibr", "rid": "R6", "data": [ { "name": "text", "data": "6" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "7", "type": "bibr", "rid": "R7", "data": [ { "name": "text", "data": "7" } ] } } ], "rid": [ "R6", "R7" ], "text": "6-7", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "、低维材料体系等对增益介质的扩充" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "8", "type": "bibr", "rid": "R8", "data": [ { "name": "text", "data": "8" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "9", "type": "bibr", "rid": "R9", "data": [ { "name": "text", "data": "9" } ] } } ], "rid": [ "R8", "R9" ], "text": "8-9", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "以及对增益介质和微腔耦合结构的探索等研究" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "10", "type": "bibr", "rid": "R10", "data": [ { "name": "text", "data": "10" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "12", "type": "bibr", "rid": "R12", "data": [ { "name": "text", "data": "12" } ] } } ], "rid": [ "R10", "R11", "R12" ], "text": "10-12", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": ",为人们能够获得低阈值且小体积的WGM激光器提供了更多机会。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "2013年，杨兰等系统介绍了WGM激光的发展脉络" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "13", "type": "bibr", "rid": "R13", "data": [ { "name": "text", "data": "13" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，之后有关WGM激光的研究大多是基于单一微腔主体材料或基于单一微腔结构进行的" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "14", "type": "bibr", "rid": "R14", "data": [ { "name": "text", "data": "14" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "15", "type": "bibr", "rid": "R15", "data": [ { "name": "text", "data": "15" } ] } } ], "rid": [ "R14", "R15" ], "text": "14-15", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。随着科技的不断进步，各种新兴材料和新颖结构的出现为微腔激光器的发展注入了新鲜血液。为更好地了解WGM微腔激光器的发展历程，本文对几类典型的WGM激光器的发展进行简单梳理。从表面张力作用形成的液滴微腔出发，依次对基于稀土掺杂的玻璃微腔、半导体微腔等低阈值WGM激光器及其应用进行介绍，最后对WGM激光器的未来发展趋势进行了展望。" } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "2　WGM微腔" } ], "level": "1", "id": "s2" } }, { "name": "p", "data": [ { "name": "text", "data": "回音壁模式最初是Rayleigh发现的，用于解释声学现象" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "16", "type": "bibr", "rid": "R16", "data": [ { "name": "text", "data": "16" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。从几何角度来看，在圆形束缚模式下，声波在其中不断进行反射，由于界面光滑导致束缚边界对声波的吸收和散射极小，这种反射不断重复，将声波传播得很远。光波相较于声波来说波长更短，因此，用于囚禁光波的WGM微腔尺寸可缩小至微米甚至亚微米量级。" } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "2.1　微腔激光器特性参数" } ], "level": "2", "id": "s2a" } }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "2.1.1　谐振条件" } ], "level": "3", "id": "s2a1" } }, { "name": "p", "data": [ { "name": "text", "data": "对于WGM微腔来说，光在散射或吸收之前，沿着靠近表面的赤道轨道循环很长时间" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "17", "type": "bibr", "rid": "R17", "data": [ { "name": "text", "data": "17" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，如" }, { "name": "xref", "data": { "text": "图1", "type": "fig", "rid": "F1", "data": [ { "name": "text", "data": "图1" } ] } }, { "name": "text", "data": "所示。光在其中发生谐振的条件为" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "18", "type": "bibr", "rid": "R18", "data": [ { "name": "text", "data": "18" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "：" } ] }, { "name": "dispformula", "data": { "label": [ { "name": "text", "data": "（1）" } ], "data": [ { "name": "math", "data": { "math": "", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818097&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818094&type=", "width": "23.62199974", "height": "3.13266683", "fontsize": "" } } }, { "name": "text", "data": " " } ], "id": "DF1" } }, { "name": "p", "data": [ { "name": "text", "data": "其中" }, { "name": "italic", "data": [ { "name": "text", "data": "n" } ] }, { "name": "text", "data": "为折射率，" }, { "name": "italic", "data": [ { "name": "text", "data": "R" } ] }, { "name": "text", "data": "为谐振腔半径，" }, { "name": "italic", "data": [ { "name": "text", "data": "m" } ] }, { "name": "text", "data": "为谐振次数（" }, { "name": "italic", "data": [ { "name": "text", "data": "m" } ] }, { "name": "text", "data": "是整数），" }, { "name": "italic", "data": [ { "name": "text", "data": "λ" } ] }, { "name": "text", "data": "是谐振波长。WGM 光学微腔内光场在满足表面全反射条件下围绕曲型腔内壁形成了闭合稳定传播模式，提供增益介质受激发射的谐振反馈。" } ] }, { "name": "fig", "data": { "id": "F1", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图1" } ], "title": [ { "name": "text", "data": "WGM微腔对光的全反射机制示意图" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig.1" } ], "title": [ { "name": "text", "data": "Schematic diagram of total internal reflection by WGM microcavity" } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818102&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818110&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818106&type=", "width": "35.02487183", "height": "36.32943726", "fontsize": "" } ] } } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "2.1.2　品质因子和模式体积" } ], "level": "3", "id": "s2a2" } }, { "name": "p", "data": [ { "name": "text", "data": "光学微腔对光在时间上的限制作用以品质因子" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "描述，在空间上的局域作用以模式体积" }, { "name": "italic", "data": [ { "name": "text", "data": "V" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "m" } ] }, { "name": "text", "data": "描述。一些重要的激光特性都取决于微腔的品质因子，如激光线宽、光子寿命、激射阈值等" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "19", "type": "bibr", "rid": "R19", "data": [ { "name": "text", "data": "19" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" } ] }, { "name": "p", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值表征了微腔对能量的储存能力，定义为" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "20", "type": "bibr", "rid": "R20", "data": [ { "name": "text", "data": "20" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "：" } ] }, { "name": "dispformula", "data": { "label": [ { "name": "text", "data": "（2）" } ], "data": [ { "name": "math", "data": { "math": "", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818118&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818115&type=", "width": "48.42933273", "height": "4.91066647", "fontsize": "" } } }, { "name": "text", "data": " " } ], "id": "DF2" } }, { "name": "p", "data": [ { "name": "text", "data": "其中，" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "rad" } ] }, { "name": "text", "data": "表示辐射损耗，" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "abs" } ] }, { "name": "text", "data": "表示吸收损耗，" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "sca" } ] }, { "name": "text", "data": "表示散射损耗，" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "coup" } ] }, { "name": "text", "data": "表示耦合损耗。" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "越大，微腔对光的限制作用越强，所得到的WGM激光线宽越窄，激射阈值越低。品质因子" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "还有另一种表达形式：" } ] }, { "name": "dispformula", "data": { "label": [ { "name": "text", "data": "（3）" } ], "data": [ { "name": "math", "data": { "math": "", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818126&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818123&type=", "width": "16.25600052", "height": "8.21266651", "fontsize": "" } } }, { "name": "text", "data": "，" } ], "id": "DF3" } }, { "name": "p", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "E" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "表示微腔内储存的能量," }, { "name": "italic", "data": [ { "name": "text", "data": "E" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "1" } ] }, { "name": "text", "data": "表示每个振荡周期谐振腔损耗的能量。由" }, { "name": "xref", "data": { "text": "公式（3）", "type": "disp-formula", "rid": "DF3", "data": [ { "name": "text", "data": "公式（3）" } ] } }, { "name": "text", "data": "可知" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "越大，谐振腔的能量存储损耗比越大。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "微腔品质因子" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "与激光半高全宽" }, { "name": "italic", "data": [ { "name": "text", "data": "W" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "FWHM" } ] }, { "name": "text", "data": "的关系为：" } ] }, { "name": "dispformula", "data": { "label": [ { "name": "text", "data": "（4）" } ], "data": [ { "name": "math", "data": { "math": "", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818136&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818131&type=", "width": "16.59466553", "height": "7.95866632", "fontsize": "" } } }, { "name": "text", "data": "，" } ], "id": "DF4" } }, { "name": "p", "data": [ { "name": "text", "data": "其中，" }, { "name": "italic", "data": [ { "name": "text", "data": "λ" } ] }, { "name": "text", "data": "表示激射光波长，由" }, { "name": "xref", "data": { "text": "公式（4）", "type": "disp-formula", "rid": "DF4", "data": [ { "name": "text", "data": "公式（4）" } ] } }, { "name": "text", "data": "可知，随着微腔" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值增大，微腔对光的限制作用越强，所得到的WGM激光线宽越窄。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "模式体积" }, { "name": "italic", "data": [ { "name": "text", "data": "V" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "m" } ] }, { "name": "text", "data": "表征了微腔对电磁场的空间约束能力，定义为" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "20", "type": "bibr", "rid": "R20", "data": [ { "name": "text", "data": "20" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "：" } ] }, { "name": "dispformula", "data": { "label": [ { "name": "text", "data": "（5）" } ], "data": [ { "name": "math", "data": { "math": "", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818144&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818139&type=", "width": "28.61733437", "height": "6.43466663", "fontsize": "" } } }, { "name": "text", "data": "，" } ], "id": "DF5" } }, { "name": "p", "data": [ { "name": "text", "data": "其中" }, { "name": "italic", "data": [ { "name": "text", "data": "ρ" } ] }, { "name": "text", "data": "=" }, { "name": "italic", "data": [ { "name": "text", "data": "εE" } ] }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "为光场能量密度。微腔模式体积越小，相同能量的光引起的局部电磁场强度越大，腔内光与物质的相互作用就越强。" } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "2.1.3　Purcell因子" } ], "level": "3", "id": "s2a3" } }, { "name": "p", "data": [ { "name": "text", "data": "Purcell提出自发辐射不是物质的固有独立属性，它受到物质所处环境的影响，是物质与场相互作用的结果，可以通过对外场进行控制来调控物质的发光属性" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "21", "type": "bibr", "rid": "R21", "data": [ { "name": "text", "data": "21" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。根据费米黄金定则，可推演Purcell因子的表达式为：" } ] }, { "name": "dispformula", "data": { "label": [ { "name": "text", "data": "（6）" } ], "data": [ { "name": "math", "data": { "math": "", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818151&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818147&type=", "width": "41.65599823", "height": "4.99533367", "fontsize": "" } } }, { "name": "text", "data": "，" }, { "name": "sup", "data": [ { "name": "text", "data": " " } ] }, { "name": "text", "data": " " } ], "id": "DF6" } }, { "name": "p", "data": [ { "name": "text", "data": "其中，" }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818159&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818156&type=", "width": "4.91066647", "height": "8.12800026", "fontsize": "" } } } ] }, { "name": "text", "data": "是介质中的光波长，" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "和" }, { "name": "italic", "data": [ { "name": "text", "data": "V" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "m" } ] }, { "name": "text", "data": "分别是共振模式的品质因子和模式体积。由" }, { "name": "xref", "data": { "text": "公式（6）", "type": "disp-formula", "rid": "DF6", "data": [ { "name": "text", "data": "公式（6）" } ] } }, { "name": "text", "data": "可以看出，在一定频率下，Purcell因子与同频率下的品质因子" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "和模式体积" }, { "name": "italic", "data": [ { "name": "text", "data": "V" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "m" } ] }, { "name": "text", "data": "相关。在Purcell效应下载流子与腔光子间的能量保持单向传输。当Purcell因子越大时，腔内光与物质相互作用越强，荧光复合速率越快。研究人员可通过Purcell效应实现对发光的增强或抑制,为降低WGM激光器的阈值提供了可能。" } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "2.1.4　激光阈值" } ], "level": "3", "id": "s2a4" } }, { "name": "p", "data": [ { "name": "text", "data": "激光阈值一般定义为实现激光振荡的最低能量密度，是评估激光器性能的重要指标。激光阈值时泵浦速率（" }, { "name": "italic", "data": [ { "name": "text", "data": "C" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "th" } ] }, { "name": "text", "data": "）的表达式如下：" } ] }, { "name": "dispformula", "data": { "label": [ { "name": "text", "data": "（7）" } ], "data": [ { "name": "math", "data": { "math": "", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818170&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818165&type=", "width": "26.67000008", "height": "8.63599968", "fontsize": "" } } }, { "name": "text", "data": "，" } ], "id": "DF7" } }, { "name": "p", "data": [ { "name": "text", "data": "公式中等号右边第一项代表透明泵浦速率，仅与腔内增益原子数有关，其中" }, { "name": "italic", "data": [ { "name": "text", "data": "N" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "A" } ] }, { "name": "text", "data": "是腔内与激射模发生相互作用的总增益粒子数，" }, { "name": "italic", "data": [ { "name": "text", "data": "v" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "sp" } ] }, { "name": "text", "data": "是激发态总自发发射速率。第二项代表额外泵浦速率，与腔光子衰减速率（" }, { "name": "italic", "data": [ { "name": "text", "data": "v" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "c" } ] }, { "name": "text", "data": "）和自发辐射进入到激射模式的耦合系数（" }, { "name": "italic", "data": [ { "name": "text", "data": "β" } ] }, { "name": "text", "data": "）有关。由" }, { "name": "xref", "data": { "text": "公式（7）", "type": "disp-formula", "rid": "DF7", "data": [ { "name": "text", "data": "公式（7）" } ] } }, { "name": "text", "data": "可知，通过提高谐振腔的" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值，减小" }, { "name": "italic", "data": [ { "name": "text", "data": "v" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "c" } ] }, { "name": "text", "data": "，可降低激光器阈值。此外，微腔可以使自发辐射由无限多个连续模式变成趋于量子化的少数几个模式，加强自发辐射光子之间的相干性。这少数几个模式与增益耦合，其中某个模式直接由自发辐射模式转变成激射模式，使" }, { "name": "italic", "data": [ { "name": "text", "data": "β" } ] }, { "name": "text", "data": "值提高4～5个数量级。一般大尺寸谐振腔激光器的" }, { "name": "italic", "data": [ { "name": "text", "data": "β" } ] }, { "name": "text", "data": "值为10" }, { "name": "sup", "data": [ { "name": "text", "data": "-5" } ] }, { "name": "text", "data": "量级，而微腔激光器可以把" }, { "name": "italic", "data": [ { "name": "text", "data": "β" } ] }, { "name": "text", "data": "值提高至接近于1" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "22", "type": "bibr", "rid": "R22", "data": [ { "name": "text", "data": "22" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "23", "type": "bibr", "rid": "R23", "data": [ { "name": "text", "data": "23" } ] } } ], "rid": [ "R22", "R23" ], "text": "22-23", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，即绝大多数自发辐射光子都进入一个激射模式，实现远低于大尺寸激光器的激光输出阈值。" } ] } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "2.2　微腔的输入输出光耦合" } ], "level": "2", "id": "s2b" } }, { "name": "p", "data": [ { "name": "text", "data": "WGM微腔的尺寸较小且谐振模式被束缚在腔内，如果直接将光照射进入微腔效率极低，因此，想要将光充分地耦合进入微腔需借助特定的设备或耦合器件。目前主要采用全反射器件产生的倏逝波进行耦合。该耦合方法要求WGM微腔的倏逝场与耦合器件的倏逝场产生重叠，并满足一定的相位匹配条件。如" }, { "name": "xref", "data": { "text": "图2", "type": "fig", "rid": "F2", "data": [ { "name": "text", "data": "图2" } ] } }, { "name": "text", "data": "所示，将光耦合进入WGM微腔的常见方式有：垂直/倾角波导耦合" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "24", "type": "bibr", "rid": "R24", "data": [ { "name": "text", "data": "24" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "、集成波导耦合" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "25", "type": "bibr", "rid": "R25", "data": [ { "name": "text", "data": "25" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "、棱镜耦合及锥形光纤耦合等" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "26", "type": "bibr", "rid": "R26", "data": [ { "name": "text", "data": "26" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "27", "type": "bibr", "rid": "R27", "data": [ { "name": "text", "data": "27" } ] } } ], "rid": [ "R26", "R27" ], "text": "26-27", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。其中比较成熟的为锥形光纤耦合和棱镜耦合，锥形光纤的耦合效率甚至能够达到99%" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "28", "type": "bibr", "rid": "R28", "data": [ { "name": "text", "data": "28" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" } ] }, { "name": "fig", "data": { "id": "F2", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图2" } ], "title": [ { "name": "text", "data": "将光耦合进入微腔中几种常见的耦合方式。 （a）垂直/倾角波导耦合系统；（b）集成波导耦合系统；（c）棱镜耦合系统；（d）锥形光纤耦合系统。" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig.2" } ], "title": [ { "name": "text", "data": "Several common ways of coupling light into microcavity. （a）Vertical/inclined waveguide coupling system. （b）Integrated waveguide coupling system. （c）Prism coupling system. （d）Tapered fiber coupling system." } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818174&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818183&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818180&type=", "width": "85.47949219", "height": "33.02368164", "fontsize": "" } ] } } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "3　WGM微腔激光器" } ], "level": "1", "id": "s3" } }, { "name": "p", "data": [ { "name": "text", "data": "近年来，人们对回音壁模式微腔的研究已逐步深入。研究人员一般采用增益介质进行涂覆的方式或直接用其构建微腔。微腔的几何结构从最开始的微球结构，演变出了微盘、微气泡、微毛细管及微瓶等。" }, { "name": "xref", "data": { "text": "图3", "type": "fig", "rid": "F3", "data": [ { "name": "text", "data": "图3" } ] } }, { "name": "text", "data": "（a）~（e）是几种常见的回音壁模式微腔的几何形状。" } ] }, { "name": "fig", "data": { "id": "F3", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图3" } ], "title": [ { "name": "text", "data": "（a）微球；（b）微盘；（c）微气泡；（d）微毛细管；（e）微瓶。" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig.3" } ], "title": [ { "name": "text", "data": "（a）Microsphere. （b）Microdisk. （c）Microbubble. （d）Microcapillary. （e）Microbottle." } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818186&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818194&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818191&type=", "width": "120.87969971", "height": "21.58999634", "fontsize": "" } ] } }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "3.1　液滴微腔" } ], "level": "2", "id": "s3a" } }, { "name": "p", "data": [ { "name": "text", "data": "液滴微腔由液体表面张力形成，表面张力使微腔趋近于完美的球形，如" }, { "name": "xref", "data": { "text": "图4", "type": "fig", "rid": "F4", "data": [ { "name": "text", "data": "图4" } ] } }, { "name": "text", "data": "（d）所示，这种微球理论上能够提供很高的" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值，从而得到较低阈值的激光发射。米-德拜散射提出，当散射颗粒度远大于波长时，散射光强对波长的依赖性不强。为对该理论进行实验验证，1977年，Ashkin和Dziedzic首次提出用液滴作为光学谐振腔" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "20", "type": "bibr", "rid": "R20", "data": [ { "name": "text", "data": "20" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。由于液滴的表面张力，液滴谐振腔的理想几何结构为表面光滑的球形，因此光学损耗较低。当液滴的直径接近入射光的波长时，它们充当Mie散射的中心。在实验中他们观察到了一系列规则的尖锐光学共振，这一共振行为为米氏散射理论提供了实验验证。" } ] }, { "name": "fig", "data": { "id": "F4", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图4" } ], "title": [ { "name": "text", "data": "（a）～（c）微气泡的制备" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "31", "type": "bibr", "rid": "R31", "data": [ { "name": "text", "data": "31" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "；（d）液滴微腔悬挂在纤维顶端的图片" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "18", "type": "bibr", "rid": "R18", "data": [ { "name": "text", "data": "18" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "；（e）硅基板上制备的芯片级玻璃微球壳" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "39", "type": "bibr", "rid": "R39", "data": [ { "name": "text", "data": "39" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "；（f）硅片上制备出Er" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "掺杂的 SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": " 环形微腔" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "48", "type": "bibr", "rid": "R48", "data": [ { "name": "text", "data": "48" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "。" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig.4" } ], "title": [ { "name": "text", "data": "（a）-（c）Preparation process of microbubbles" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "31", "type": "bibr", "rid": "R31", "data": [ { "name": "text", "data": "31" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": ". （d）Droplet microcavity hanging on the top of fiber" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "18", "type": "bibr", "rid": "R18", "data": [ { "name": "text", "data": "18" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": ". （e）Chip grade glass microsphere shell blown on silicon substrate" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "39", "type": "bibr", "rid": "R39", "data": [ { "name": "text", "data": "39" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": ". （f）Er" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": " doped SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": " ring microcavity is prepared on the silicon chip" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "48", "type": "bibr", "rid": "R48", "data": [ { "name": "text", "data": "48" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "." } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818198&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818206&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818201&type=", "width": "163.00000000", "height": "28.88610840", "fontsize": "" } ] } }, { "name": "p", "data": [ { "name": "text", "data": "1984年，Tzeng等在连续波激光器（514.5 nm）泵浦的直径为60 μm的含罗丹明6G (R6G)乙醇液滴中，首次观察到液滴中的激光发射" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "29", "type": "bibr", "rid": "R29", "data": [ { "name": "text", "data": "29" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。液滴的液-气界面作为光学微腔，其全内反射为选定波长处的形态相关共振提供了较高的光反馈，导致该微腔具有较高的" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值，激光发射表现出较低的阈值，阈值泵浦强度约为35 W/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "。1986年，钱士雄教授将这种相关共振归于WGM" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "30", "type": "bibr", "rid": "R30", "data": [ { "name": "text", "data": "30" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，首次提出了液滴WGM激光器的概念，在含有罗丹明590和罗丹明640的乙醇液滴中观察到低阈值激光发射。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "液滴作为光学微腔在发展的过程中存在一些问题，如液体蒸发速度快、尺寸和形状控制不好、输出耦合到波导元件的效率低等" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "31", "type": "bibr", "rid": "R31", "data": [ { "name": "text", "data": "31" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，严重阻碍了液滴激光器发展成为实用设备。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "针对液滴形状控制不好及液滴激光器稳定性差等问题，研究人员提出了光流体概念" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "32", "type": "bibr", "rid": "R32", "data": [ { "name": "text", "data": "32" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，将光学和流体技术的优势相结合，由此衍生出的光流体激光器具有较好的稳定性和兼容性。2011年，Lee等展示了一种基于极薄壁熔融石英微气泡的准液滴光流体环形谐振腔激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "31", "type": "bibr", "rid": "R31", "data": [ { "name": "text", "data": "31" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。如" }, { "name": "xref", "data": { "text": "图4", "type": "fig", "rid": "F4", "data": [ { "name": "text", "data": "图4" } ] } }, { "name": "text", "data": "（a）~（c）所示，在CO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "激光照射下对玻璃毛细管加压形成气泡，当气泡内充满液体时，微气泡和液体系统形成准液滴，此时大量的WGM激模式驻留在液体内部。由于熔融石英吸收损耗很小，可以忽略不计，微气泡谐振腔的" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值主要受液体吸收影响，该结构为腔内物质提供足够的光反馈，实现了阈值低至300 nJ/mm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "的激光发射。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "上述液滴微腔大都是利用染料作为增益介质，染料作为增益介质的最大问题就是染料的光漂白，使其在重复测量以及高功率泵浦时应用受限" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "33", "type": "bibr", "rid": "R33", "data": [ { "name": "text", "data": "33" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。随着研究的不断深入，研究人员尝试用聚合物代替染料解决该问题" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "34", "type": "bibr", "rid": "R34", "data": [ { "name": "text", "data": "34" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。2018年，Tang等利用共轭聚合物作为增益材料，得到的光流体激光器阈值低至7.8 μJ/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "，线宽约为0.1 nm，与尼罗红染料相比，共轭聚合物显著提高了激光的光稳定性" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "35", "type": "bibr", "rid": "R35", "data": [ { "name": "text", "data": "35" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "由生物材料制备的WGM微腔激光器被认为在生物传感领域具有广阔的应用潜力。荧光蛋白是制备光学微腔时常用的生物提取材料" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "36", "type": "bibr", "rid": "R36", "data": [ { "name": "text", "data": "36" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，但在生物材料中提取荧光蛋白成本很高。Nguyen等发现低成本、易获得的蛋清可作为生物材料激光微腔" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "37", "type": "bibr", "rid": "R37", "data": [ { "name": "text", "data": "37" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，其主要成分卵清蛋白具有高折射率，保证了微腔的高" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值，经染料掺杂后的蛋清激光器的阈值约为2.5 μJ。" } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "3.2　固体微腔" } ], "level": "2", "id": "s3b" } }, { "name": "p", "data": [ { "name": "text", "data": "制备液滴微腔所需设备的复杂性以及液滴的不可重复使用性，极大地阻碍了基于液滴微腔的回音壁模式激光器的实际应用。一般来说，基于固体材料的谐振腔比液滴微腔更容易制备，在保证高" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值的同时还可以重复使用。因而目前WGM光学微腔的研究大多都基于固体材料，包括玻璃材料和半导体材料等。" } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "3.2.1　稀土掺杂的玻璃材料微腔" } ], "level": "3", "id": "s3b1" } }, { "name": "p", "data": [ { "name": "text", "data": "玻璃材质的微球可形成" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值高达10" }, { "name": "sup", "data": [ { "name": "text", "data": "8" } ] }, { "name": "text", "data": "的微腔" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "38", "type": "bibr", "rid": "R38", "data": [ { "name": "text", "data": "38" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，" }, { "name": "xref", "data": { "text": "图4", "type": "fig", "rid": "F4", "data": [ { "name": "text", "data": "图4" } ] } }, { "name": "text", "data": "（e）为硅基板上制备的芯片级玻璃微球壳" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "39", "type": "bibr", "rid": "R39", "data": [ { "name": "text", "data": "39" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。这种微球本身不是光学增益介质，需要额外引入优异的发光材料，如稀土离子" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "40", "type": "bibr", "rid": "R40", "data": [ { "name": "text", "data": "40" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "、量子点或者染料分子" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "41", "type": "bibr", "rid": "R41", "data": [ { "name": "text", "data": "41" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "42", "type": "bibr", "rid": "R42", "data": [ { "name": "text", "data": "42" } ] } } ], "rid": [ "R41", "R42" ], "text": "41-42", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。稀土离子作为一种非常重要的激活离子，将其掺入激光工作物质可为激光发射提供增益" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "43", "type": "bibr", "rid": "R43", "data": [ { "name": "text", "data": "43" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "45", "type": "bibr", "rid": "R45", "data": [ { "name": "text", "data": "45" } ] } } ], "rid": [ "R43", "R44", "R45" ], "text": "43-45", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，在固体激光器领域具有非常重要的地位。稀土基晶体材料具有良好的光学性质，相对于其他材料具有声子能量低、发射截面大、激光阈值低等独特优势。Garrett等将这种优势应用到WGM激光中，于1961年，在Sm∶CaF" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "基回音壁腔中观察到受激辐射现象" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "7", "type": "bibr", "rid": "R7", "data": [ { "name": "text", "data": "7" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，测得的泵浦阈值约为20 W/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "在实际研究及应用过程中，晶体材料生长条件苛刻、加工难度高、不易于微腔成型。而玻璃材料具有长程无序、短程有序的结构，易于制备及加工，是替代晶体的良好材料，可以选择不同的玻璃基质来满足如高稀土掺杂浓度、低声子能量等不同要求。" } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "3.2.1.1　稀土掺杂的氧化物玻璃材料微腔" } ], "level": "4", "id": "s3b1a" } }, { "name": "p", "data": [ { "name": "text", "data": "氧化物玻璃包括硅酸盐玻璃、硼酸盐玻璃、碲酸盐玻璃、锗酸盐玻璃、磷酸盐玻璃等。其中硅酸盐玻璃主要是指由高纯SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "组成的非晶态玻璃。在早期的研究过程中，受到玻璃材料物化稳定性及加工工艺的限制，回音壁模式微腔大部分只由纯SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "玻璃材料加工制备。二氧化硅材料无法直接发光，通过不同的稀土离子掺杂可在不同波段实现低阈值的回音壁模式微腔激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "46", "type": "bibr", "rid": "R46", "data": [ { "name": "text", "data": "46" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "1996年，Sandoghdar等制备出掺杂Nd" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "的SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "玻璃微球腔" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "47", "type": "bibr", "rid": "R47", "data": [ { "name": "text", "data": "47" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，通过棱镜耦合的方式实现了 1 065～1 090 nm波段的多模回音壁模式激光输出，阈值泵浦功率为200 nW。2003年，Yang等采用溶胶-凝胶法在硅片上制备出Er" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "掺杂的SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "环形微腔激光器，如" }, { "name": "xref", "data": { "text": "图4", "type": "fig", "rid": "F4", "data": [ { "name": "text", "data": "图4" } ] } }, { "name": "text", "data": "（f）所示，实现了1 550 nm附近的阈值泵浦功率低至34 μW的单模激光输出" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "48", "type": "bibr", "rid": "R48", "data": [ { "name": "text", "data": "48" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。2007年，Ostby等采用溶胶凝胶法制备出Yb" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "掺杂的玻璃微球激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "49", "type": "bibr", "rid": "R49", "data": [ { "name": "text", "data": "49" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，通过光纤耦合在 1 042 nm处得到了阈值低至1.8 μW的单模激光输出。之后，掺杂其他稀土离子的回音壁模式激光也相继被报道" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "50", "type": "bibr", "rid": "R50", "data": [ { "name": "text", "data": "50" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "51", "type": "bibr", "rid": "R51", "data": [ { "name": "text", "data": "51" } ] } } ], "rid": [ "R50", "R51" ], "text": "50-51", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "为拓宽单一离子的发光波段，稀土离子共掺也被用于激光发射，Dong等将Er" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "/Yb" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "共掺的磷酸盐玻璃涂覆在SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "微球上" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "52", "type": "bibr", "rid": "R52", "data": [ { "name": "text", "data": "52" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，采用接触式光纤耦合在1 550 nm处实现了阈值泵浦功率低至30 μW的单模激光器。2018年，Li等制备的Er" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "/Yb" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "共掺磷酸盐玻璃微球激光器在1 544.43 nm处实现了单模激光发射" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "53", "type": "bibr", "rid": "R53", "data": [ { "name": "text", "data": "53" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，阈值为163 μW。2019年，Li等采用锥形光纤耦合法制备的Tm" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "/Ho" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "共掺碲酸盐玻璃微球激光器在1 494.9 nm处实现单模激光发射" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "54", "type": "bibr", "rid": "R54", "data": [ { "name": "text", "data": "54" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，激光阈值功率小于1.5 mW。2019年，Qin等制备了Er" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "/Tm" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "共掺杂碲酸盐玻璃微球激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "55", "type": "bibr", "rid": "R55", "data": [ { "name": "text", "data": "55" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，在红光、绿光以及1.9 μm处实现了激光发射，其中1.9 μm处的阈值功率为1.5 mW。实验中发现，在离子掺杂微腔中，发光依赖于主体材料的声子能量，主体材料的声子能量越低，越有利于发光，更容易实现激光发射。" } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "3.2.1.2　稀土掺杂的氟化物玻璃材料微腔" } ], "level": "4", "id": "s3b1b" } }, { "name": "p", "data": [ { "name": "text", "data": "以氧化物玻璃为主体的微球腔具有高声子能量和低稀土掺杂浓度等特点，导致光转换效率不高。而稀土离子在可见波段和中红外波段的辐射跃迁非常依赖于基质的低声子能量环境。氟化物玻璃具有很低的声子能量，被认为是优良的稀土离子掺杂基质。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "1996年，Miura等首次成功制备了掺杂稀土离子的氟化物玻璃微球激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "56", "type": "bibr", "rid": "R56", "data": [ { "name": "text", "data": "56" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，他们将Nd" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "掺入氟化物玻璃中，采用空间光耦合的方式在1 051 nm和1 334 nm处实现了激光发射，泵浦阈值分别低至5 mW和60 mW。在通常使用的石英玻璃等氧化物玻璃中，激光在1 340 nm附近振荡非常困难" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "56", "type": "bibr", "rid": "R56", "data": [ { "name": "text", "data": "56" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，而使用氟化物玻璃进行1 340 nm附近的低阈值激光发射被证明是可行的。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "ZBLAN（ZrF" }, { "name": "sub", "data": [ { "name": "text", "data": "4" } ] }, { "name": "text", "data": "-BaF" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "-LaF" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "-AlF" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "-NaF）是一种常用的氟酸盐玻璃，具有低声子能量（565 cm" }, { "name": "sup", "data": [ { "name": "text", "data": "-1" } ] }, { "name": "text", "data": "）的特性，在中红外光纤激光器中得到了广泛的研究" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "57", "type": "bibr", "rid": "R57", "data": [ { "name": "text", "data": "57" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。2014年，Deng等制备了掺Er" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "的ZBLAN玻璃微球激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "58", "type": "bibr", "rid": "R58", "data": [ { "name": "text", "data": "58" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，" }, { "name": "xref", "data": { "text": "图5", "type": "fig", "rid": "F5", "data": [ { "name": "text", "data": "图5" } ] } }, { "name": "text", "data": "（a）是该微球的光学显微镜图像，他们采用锥形光纤耦合实现了第一个连续波泵浦的室温中红外WGM微激光系统，该系统能够在波长2.7 ~ 2.8 μm工作。在" }, { "name": "italic", "data": [ { "name": "text", "data": "λ" } ] }, { "name": "text", "data": " " }, { "name": "text", "data": ">" }, { "name": "text", "data": "2 μm波段，硅基玻璃材料由于光吸收强烈而不适用，氟酸盐玻璃材料弥补了该波段内玻璃材料的空白。但ZBLAN玻璃的化学稳定性往往较差，限制了ZBLAN玻璃器件的实际应用" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "59", "type": "bibr", "rid": "R59", "data": [ { "name": "text", "data": "59" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。相比之下，ZBYA(ZrF" }, { "name": "sub", "data": [ { "name": "text", "data": "4" } ] }, { "name": "text", "data": "-BaF" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "-YF" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "-AlF" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": ")氟化物玻璃比ZBLAN玻璃具有更好的化学稳定性和热稳定性。2019年，Zhao等通过锥形光纤耦合，首次在∼2.0 μm处实现了Tm" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "掺杂的ZBYA氟化物玻璃微球激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "60", "type": "bibr", "rid": "R60", "data": [ { "name": "text", "data": "60" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，激光器阈值为4.5 mW。" } ] }, { "name": "fig", "data": { "id": "F5", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图5" } ], "title": [ { "name": "text", "data": "（a）Er∶ZBLAN微球的光学显微镜图像" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "58", "type": "bibr", "rid": "R58", "data": [ { "name": "text", "data": "58" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "；（b）WGM的微柱激光" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "70", "type": "bibr", "rid": "R70", "data": [ { "name": "text", "data": "70" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "；（c）微盘和微环激光的俯视扫描电镜图像" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "75", "type": "bibr", "rid": "R75", "data": [ { "name": "text", "data": "75" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "。" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig.5" } ], "title": [ { "name": "text", "data": "（a）Optical microscope image of the ZBLAN glass microsphere" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "58", "type": "bibr", "rid": "R58", "data": [ { "name": "text", "data": "58" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": ". （b）Lasing of micropillar WGM" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "70", "type": "bibr", "rid": "R70", "data": [ { "name": "text", "data": "70" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": ". （c）Top-view SEM images of micro-disk and micro-ring laser accordingly" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "75", "type": "bibr", "rid": "R75", "data": [ { "name": "text", "data": "75" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "." } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818209&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818217&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818213&type=", "width": "163.00000000", "height": "41.44805908", "fontsize": "" } ] } } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "3.2.1.3　复合玻璃材料微腔" } ], "level": "4", "id": "s3b1c" } }, { "name": "p", "data": [ { "name": "text", "data": "为使玻璃主体材料兼具低声子能量和高稳定性，复合玻璃材料微腔也得到了广泛的研究。2012年，Guo等采用复合微球掺杂系统，将Er" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "掺杂进氟化物玻璃和碲酸盐玻璃组成的复合微球系统中，制备了氟碲酸盐玻璃微球激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "61", "type": "bibr", "rid": "R61", "data": [ { "name": "text", "data": "61" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。该微球激光器表现出了良好的稳定性，在~2.7 μm处实现了激光发射。2019年，Wang等制备了掺Nd" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "的氟硅酸盐复合玻璃微球激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "62", "type": "bibr", "rid": "R62", "data": [ { "name": "text", "data": "62" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，该激光器兼具了氟化物玻璃的低声子能量和硅酸盐玻璃的稳定性特点，通过锥形光纤耦合，在1 056 ~1 071 nm波长范围内实现单模和多模激光，激光阈值低至1.5 mW。" } ] } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "3.2.2　半导体材料微腔" } ], "level": "3", "id": "s3b2" } }, { "name": "p", "data": [ { "name": "text", "data": "在玻璃材质的微球腔激光器的发展过程中，将增益材料加入微腔中比较困难。为满足器件小型化的发展需求，WGM微腔的研究从球形玻璃微腔转向更紧凑的平面结构，如微盘、微环" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "63", "type": "bibr", "rid": "R63", "data": [ { "name": "text", "data": "63" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。半导体材料通常与周围材料有较大的折射率对比度，能对处于其中的光进行很好的限制，是平面WGM微腔制备中最常用的材料。" } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "3.2.2.1　半导体量子阱材料" } ], "level": "4", "id": "s3b2a" } }, { "name": "p", "data": [ { "name": "text", "data": "量子阱微盘结构具有高折射率对比度，能很大程度上将光学模式限制在微盘内，与量子阱增益重合。由于微盘的模式体积足够小，基本上只有一个模式在空间和光谱上与量子阱发射重叠" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "64", "type": "bibr", "rid": "R64", "data": [ { "name": "text", "data": "64" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，容易得到单模WGM激光输出。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "1992年，McCall等提出了基于InP/InGaAsP的微盘激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "64", "type": "bibr", "rid": "R64", "data": [ { "name": "text", "data": "64" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，采用InGaAsP量子阱为该激光器提供了光学增益，在1.3 μm和1.5 μm处获得了阈值泵浦功率低于100 μW的单模激光输出。2004年，Haberer等制备了蘑菇形的GaN/InGaN微盘激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "65", "type": "bibr", "rid": "R65", "data": [ { "name": "text", "data": "65" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，采用光电化学刻蚀法进行底切制备独立的微盘，替代传统湿法刻蚀的微盘腔，解决了蓝宝石衬底较低折射率导致的垂直光限制较差的问题。在10 K温度下，于418.2 nm处观察到了激光出射，阈值为12.1 W/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "。2006年，Adele等利用高质量的小直径微盘，减少耦合到量子阱的模式数量，实现了首个室温GaN微盘激光器，其阈值低于当时报道的其他同类微盘激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "66", "type": "bibr", "rid": "R66", "data": [ { "name": "text", "data": "66" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。2018年，Moiseev等制备了InGaAsN/GaAs量子阱微盘激光器，是室温下首个发光波段在1.2 μm处的微盘激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "67", "type": "bibr", "rid": "R67", "data": [ { "name": "text", "data": "67" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。2021年，Fu等利用高质量的同质外延膜和先进的微加工工艺，制备了高质量的InGaN/GaN多量子阱微盘激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "68", "type": "bibr", "rid": "R68", "data": [ { "name": "text", "data": "68" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，在436.8 nm的主激射波长下，测量得到了~5.2 mJ/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "的阈值。他们对比了GaN和Si作衬底的微盘激光器的激光阈值和" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值，发现GaN衬底的低位错密度使激光器激射阈值显著降低。该微盘还支持电致发光，但" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值明显降低，仍需研究人员进一步改进方案。" } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "3.2.2.2　半导体量子点材料" } ], "level": "4", "id": "s3b2b" } }, { "name": "p", "data": [ { "name": "text", "data": "除了量子阱微盘，量子点微盘结构也是半导体微腔的研究重点。量子点微盘结构结合了小模式体积和零维电子态密度的特点，增益更高进而更容易实现超低阈值激射。同样，在量子点微腔结构中也只有少数腔模位于量子点增益谱内，容易实现激光的单模输出" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "69", "type": "bibr", "rid": "R69", "data": [ { "name": "text", "data": "69" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。2000年，Michler等通过分子束外延在GaAs衬底上生长了（In，Ga）As量子点微盘激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "69", "type": "bibr", "rid": "R69", "data": [ { "name": "text", "data": "69" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，在900~ 990 nm的波长范围内实现了激光激射，阈值泵浦密度为20 ~ 200 W/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "。2010年，Jaffrennou等在嵌入了三个自组装InAs量子点的高质量GaAs/AlAs微柱中实现了激光发射" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "70", "type": "bibr", "rid": "R70", "data": [ { "name": "text", "data": "70" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。如" }, { "name": "xref", "data": { "text": "图5", "type": "fig", "rid": "F5", "data": [ { "name": "text", "data": "图5" } ] } }, { "name": "text", "data": "（b）所示，微柱基座与传统微盘谐振腔面积一样大，相比于之前直径更小的半导体基座支撑的空气包覆结构，这种结构提供了更好的散热，在5 K的温度下，实现了激光发射，阈值泵浦功率7 mW。2018年， Lebedev等通过湿法化学刻蚀制备了InP/GaInP量子点微盘腔" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "71", "type": "bibr", "rid": "R71", "data": [ { "name": "text", "data": "71" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，实现了1 μW阈值的室温激光激射。2011年，Mao等制备了支持电注入的苯丙环丁烯包覆的InGaAs量子点微盘激光器，在室温下1 064 nm处实现了激光出射，其中直径为6.5 μm的微盘激光器的阈值电流为0.45 mA" }, { "name": "sup", "data": [ { "name": "text", "data": " [" }, { "name": "xref", "data": { "text": "72", "type": "bibr", "rid": "R72", "data": [ { "name": "text", "data": "72" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。电注入的微腔激光器易于集成，利于作为微纳光源应用于片上集成领域。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "圆盘谐振腔中有源区的中心部分实际上不与位于腔外边界附近的高" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值WGM光场相互作用。有源区的中心部分消耗一定部分的泵浦功率，而不产生激光。因而WGM环形谐振腔结构有望在微腔激光器中实现更低的激射阈值" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "73", "type": "bibr", "rid": "R73", "data": [ { "name": "text", "data": "73" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "74", "type": "bibr", "rid": "R74", "data": [ { "name": "text", "data": "74" } ] } } ], "rid": [ "R73", "R74" ], "text": "73-74", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。2021年,Lin等在硅晶片上制备超低阈值InP材料WGM微环激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "75", "type": "bibr", "rid": "R75", "data": [ { "name": "text", "data": "75" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，" }, { "name": "xref", "data": { "text": "图5", "type": "fig", "rid": "F5", "data": [ { "name": "text", "data": "图5" } ] } }, { "name": "text", "data": "（c）为他们制备的微盘和微环激光的俯视扫描电镜图像。室温光泵浦下在直径为0.8 µm的微盘和外径1.8 µm、内径1.2 µm的微环激光器中观察到单模激光，在900 ~ 960 nm阈值分别为12 µJ/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "和45 µJ/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "。与微盘相比，他们将微环激光器较高的阈值归结为微环较小的增益面积及内外壁粗糙导致的高损耗。同时发现与缩小微盘谐振腔直径不同，减小微环激光器的微环宽度可以实现单模激光。" } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "3.2.2.3　钙钛矿材料" } ], "level": "4", "id": "s3b2c" } }, { "name": "p", "data": [ { "name": "text", "data": "钙钛矿材料有较强的激子结合能，其作为增益介质，增益系数高达3 200 cm" }, { "name": "sup", "data": [ { "name": "text", "data": "-1[" }, { "name": "xref", "data": { "text": "76", "type": "bibr", "rid": "R76", "data": [ { "name": "text", "data": "76" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，确保了低阈值光泵浦下产生足够的增益和有效的光反馈。通过改变卤素成分，可以调节光电特性，从而实现不同波段的光谱发射，发光范围覆盖了可见光和近红外波段" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "77", "type": "bibr", "rid": "R77", "data": [ { "name": "text", "data": "77" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。2014年，Xing等首次报道了杂化钙钛矿薄膜中的受激辐射现象" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "78", "type": "bibr", "rid": "R78", "data": [ { "name": "text", "data": "78" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，由此拉开了钙钛矿激光发展的序幕。同年，南洋理工大学研究人员报道了第一个基于WGM的钙钛矿激光" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "79", "type": "bibr", "rid": "R79", "data": [ { "name": "text", "data": "79" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。研究人员利用两步化学气相沉积法合成了多边形的钙钛矿薄片，通过飞秒光泵浦，在室温近红外波段实现了激光发射，阈值约为37 μJ/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "。在不同基底上，钙钛矿薄片激光的阈值和激光峰波长几乎没有变化，在片上集成光电子领域有着广阔的应用前景。2017年，Cegielski等首次实现了钙钛矿激光器与氮化硅波导的集成" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "80", "type": "bibr", "rid": "R80", "data": [ { "name": "text", "data": "80" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，通过将钙钛矿溶液旋涂到二氧化硅微环内，形成了WGM微腔，实现了激光发射，激光阈值为19.6 μJ/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "。" } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "3.2.2.4　二维半导体材料" } ], "level": "4", "id": "s3b2d" } }, { "name": "p", "data": [ { "name": "text", "data": "二维材料是一种厚度仅仅具有单个或者多个原子层、依靠层间的范德瓦尔斯力堆叠而成的层状材料。自机械剥离法获得单层石墨烯以来" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "8", "type": "bibr", "rid": "R8", "data": [ { "name": "text", "data": "8" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，二维材料获得了快速发展。凭借原子级别的厚度和表面无悬挂键等特殊性能，二维材料在开发高集成度、纳米级和低能耗的芯片级激光器上颇具潜力。与多数三维体材料半导体的载流子带-带跃迁发光机制不同，二维材料以激子发光占主导。由于介电屏蔽作用减小、强量子限域效应及较大的载流子有效质量，单层二维材料具有很强的激子结合能，使激子能够在室温下稳定存在。二维材料的薄原子层对光限制能力差，通过借助微腔对光场的强限制作用，可实现腔内量子体系（激子）和量子化光场（光子）之间的相互耦合" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "81", "type": "bibr", "rid": "R81", "data": [ { "name": "text", "data": "81" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，该耦合能够增强激子的自发荧光辐射，降低激光阈值" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "82", "type": "bibr", "rid": "R82", "data": [ { "name": "text", "data": "82" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "83", "type": "bibr", "rid": "R83", "data": [ { "name": "text", "data": "83" } ] } } ], "rid": [ "R82", "R83" ], "text": "82-83", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。这为光腔量子电动力学研究激子与特定边界条件下量子化场之间的相互作用提供了一个完美平台。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "石墨烯作为最早被发现的二维材料，其与WGM微腔的耦合得到了研究。早期基于六边形横截面的ZnO微棒和GaN都实现了WGM激射" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "84", "type": "bibr", "rid": "R84", "data": [ { "name": "text", "data": "84" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "86", "type": "bibr", "rid": "R86", "data": [ { "name": "text", "data": "86" } ] } } ], "rid": [ "R84", "R85", "R86" ], "text": "84-86", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。但由于微腔尺寸的减小，光学损耗急剧增加，研究人员采用等离激元耦合来解决该问题。传统金属涂覆的WGM微腔被发现可以支持等离子体模，但这种结构通常有较大的欧姆接触。单层石墨烯中具有高度受限的等离激元" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "87", "type": "bibr", "rid": "R87", "data": [ { "name": "text", "data": "87" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "88", "type": "bibr", "rid": "R88", "data": [ { "name": "text", "data": "88" } ] } } ], "rid": [ "R87", "R88" ], "text": "87-88", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，被用来代替涂覆WGM腔的金属，加强腔内光与物质的相互作用" }, { "name": "sup", "data": [ { "name": "text", "data": " [" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "89", "type": "bibr", "rid": "R89", "data": [ { "name": "text", "data": "89" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "90", "type": "bibr", "rid": "R90", "data": [ { "name": "text", "data": "90" } ] } } ], "rid": [ "R89", "R90" ], "text": "89-90", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "基于此，Jiang等提出了一种由单层石墨烯覆盖的六边形截面ZnO微棒组成的杂化等离激元WGM微腔" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "91", "type": "bibr", "rid": "R91", "data": [ { "name": "text", "data": "91" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。具体结构如" }, { "name": "xref", "data": { "text": "图6", "type": "fig", "rid": "F6", "data": [ { "name": "text", "data": "图6" } ] } }, { "name": "text", "data": "（a）~（b）所示，与纯ZnO微腔相比，石墨烯包覆的ZnO微腔对光的限制作用得到明显改善，腔内全内反射作用得到增强。Li等在ZnO微棒上覆盖单层石墨烯，在紫外波长处获得了单模激光" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "92", "type": "bibr", "rid": "R92", "data": [ { "name": "text", "data": "92" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，微腔激射阈值从覆盖前的800 kW/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "降低到覆盖后的600 kW/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "。Baek等于2013年将石墨烯置于直径8 μm的GaN微盘上，实现了激光发射" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "93", "type": "bibr", "rid": "R93", "data": [ { "name": "text", "data": "93" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，阈值为250 kW/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "。" } ] }, { "name": "fig", "data": { "id": "F6", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图6" } ], "title": [ { "name": "text", "data": "（a）石墨烯单层涂层氧化锌六边形微棒示意图" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "91", "type": "bibr", "rid": "R91", "data": [ { "name": "text", "data": "91" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "；（b）沿石墨烯与氧化锌界面激发的表面等离激元示意图" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "91", "type": "bibr", "rid": "R91", "data": [ { "name": "text", "data": "91" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "；（c）过渡金属二硫化物的原子组成结构示意图；（d）单层WS" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "微盘光腔结构示意图" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "11", "type": "bibr", "rid": "R11", "data": [ { "name": "text", "data": "11" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "；（e）采用二维MoS" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "实现的微球/微盘光腔结构示意图" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "12", "type": "bibr", "rid": "R12", "data": [ { "name": "text", "data": "12" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "；（f）MoS" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/微球激光工作原理图" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "94", "type": "bibr", "rid": "R94", "data": [ { "name": "text", "data": "94" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "；（g）四种不同球体尺寸的MoSe" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/微球光腔结构示意图" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "95", "type": "bibr", "rid": "R95", "data": [ { "name": "text", "data": "95" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "。" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig.6" } ], "title": [ { "name": "text", "data": "（a）Schematic diagram of graphene monolayer coated ZnO hexagonal microrod" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "91", "type": "bibr", "rid": "R91", "data": [ { "name": "text", "data": "91" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": ". （b）Excitation of surface plasmons along the interface between graphene and ZnO" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "91", "type": "bibr", "rid": "R91", "data": [ { "name": "text", "data": "91" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": ". （c）Schematic of atomics structure of TMDC " }, { "name": "italic", "data": [ { "name": "text", "data": "MX" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": ". （d）Schematic image of a monolayer WS" }, { "name": "sub", "data": [ { "name": "text", "data": "2 " } ] }, { "name": "text", "data": "microdisk laser" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "11", "type": "bibr", "rid": "R11", "data": [ { "name": "text", "data": "11" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": ". （e）Schematic configuration of the coupled microsphere/microdisk optical cavity with the incorporation of 2D MoS" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "12", "type": "bibr", "rid": "R12", "data": [ { "name": "text", "data": "12" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": ". （f）The principle diagram of MoS" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/microsphere laser operation" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "94", "type": "bibr", "rid": "R94", "data": [ { "name": "text", "data": "94" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": ". （g）Design of the MoSe" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/microsphere WGM cavities with four different sphere sizes" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "95", "type": "bibr", "rid": "R95", "data": [ { "name": "text", "data": "95" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "." } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818220&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818226&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818224&type=", "width": "154.40827942", "height": "83.16589355", "fontsize": "" } ] } }, { "name": "p", "data": [ { "name": "text", "data": "在上述石墨烯覆盖的WGM微腔结构激光器的研究中，石墨烯没有带隙不能作为增益介质，仅仅利用其高折射率的特性增强WGM微腔的腔内全反射，以此降低相关WGM激光器的阈值。随着具有带隙的新型二维材料，如过渡金属二硫化物（TMDC）、黑磷（BP）等相继被发现，二维材料微腔激光器又得到了进一步的发展。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "TMDC一般用分子式" }, { "name": "italic", "data": [ { "name": "text", "data": "MX" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "来表示，其中" }, { "name": "italic", "data": [ { "name": "text", "data": "M" } ] }, { "name": "text", "data": "代表过渡金属，" }, { "name": "italic", "data": [ { "name": "text", "data": "X" } ] }, { "name": "text", "data": "代表硫族元素，其原子结构如" }, { "name": "xref", "data": { "text": "图 6", "type": "fig", "rid": "F6", "data": [ { "name": "text", "data": "图 6" } ] } }, { "name": "text", "data": "（c）所示" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "9", "type": "bibr", "rid": "R9", "data": [ { "name": "text", "data": "9" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。TMDC具有自然带隙，其电导可以在“开或关”之间切换，与BP相比其化学性质更加稳定，更适合制造发光设备。单层TMDC的激子结合能（~500 meV）远远超过了其室温热扰动（26 meV）,使激子能在室温下稳定存在，为实现基于二维材料的室温激子激光提供了机会。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "基于TMDC材料的WGM激光主要是通过对光腔的设计和优化完成的，最终得以在低阈值下实现激射。2015年，张翔等将单层WS" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "嵌入两个介电层Si" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "N" }, { "name": "sub", "data": [ { "name": "text", "data": "4" } ] }, { "name": "text", "data": "和氢倍半硅氧烷（HSQ）之间，使WGM微腔产生的共振与WS" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "的增益谱重叠" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "11", "type": "bibr", "rid": "R11", "data": [ { "name": "text", "data": "11" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。如" }, { "name": "xref", "data": { "text": "图6", "type": "fig", "rid": "F6", "data": [ { "name": "text", "data": "图6" } ] } }, { "name": "text", "data": "（d）所示，夹层结构提供了比直接转移到顶部高30%的光学限制因子，并对WS" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "进行了很好的保护。在10 K温度下，实现了612.2 nm的二维材料激子型激光发射，激光阈值5 W/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "。同样在2015年，Salehzadeh等首次在室温下实现了二维层状材料激光" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "12", "type": "bibr", "rid": "R12", "data": [ { "name": "text", "data": "12" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。如" }, { "name": "xref", "data": { "text": "图6", "type": "fig", "rid": "F6", "data": [ { "name": "text", "data": "图6" } ] } }, { "name": "text", "data": "（e）所示，他们将机械剥离得到的四层MoS" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "嵌入到SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "微盘和独立的微球之间，这种独特的微腔耦合结构为四层MoS" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "提供了更强的光学限制，在600~800 nm处实现了阈值为5 μW的激光激射。2018年，张青等采用化学气相沉积法代替传统的机械剥离法得到高质量的单层MoS" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "薄膜，如" }, { "name": "xref", "data": { "text": "图6", "type": "fig", "rid": "F6", "data": [ { "name": "text", "data": "图6" } ] } }, { "name": "text", "data": "（f）所示，通过将该膜与SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "微球耦合,在77~400 K温度范围内，于664 nm处实现了阈值为32~580 W/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "的激光发射" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "94", "type": "bibr", "rid": "R94", "data": [ { "name": "text", "data": "94" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。2020年，本课题组通过将不同直径的SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "微球和单层MoSe" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "耦合，在750~875 nm波段处实现了室温下激光发射的模式调谐" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "95", "type": "bibr", "rid": "R95", "data": [ { "name": "text", "data": "95" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，阈值约为107~215 W/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "，其光腔结构如" }, { "name": "xref", "data": { "text": "图6", "type": "fig", "rid": "F6", "data": [ { "name": "text", "data": "图6" } ] } }, { "name": "text", "data": "（g）所示。目前基于TMDC的WGM激光器均为多模各向同性输出，通过进一步改进WGM腔体结构，利用激子的新奇物理特性，有望进一步提升基于TMDC材料的WGM激光器输出性能。" } ] } ] } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "3.3　WGM微腔激光器性能比较" } ], "level": "2", "id": "s3c" } }, { "name": "p", "data": [ { "name": "xref", "data": { "text": "表1", "type": "table", "rid": "T1", "data": [ { "name": "text", "data": "表1" } ] } }, { "name": "text", "data": "列出了上述几种材料制备的典型WGM激光器的相关参数。通过比较可知，由表面张力形成的液滴WGM微腔拥有比大多数固体WGM微腔更高的" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值（10" }, { "name": "sup", "data": [ { "name": "text", "data": "7" } ] }, { "name": "text", "data": " ~10" }, { "name": "sup", "data": [ { "name": "text", "data": "8" } ] }, { "name": "text", "data": "量级），可通过使用不同的染料或聚合物在所需波段处实现低阈值的WGM激光。但染料作为增益介质的光漂白及液滴微腔的不稳定性等问题仍然存在，影响了基于液滴微腔的WGM激光器的应用。基于固体微腔的WGM激光器有微盘、微球、微环等多种结构，并具有良好的环境稳定性，可根据应用场景和需求的不同来选择合适的微腔结构和增益介质材料。由于微腔制备工艺的局限性，固体微腔的品质因子往往比液滴微腔差，其中稀土掺杂的玻璃微球激光器的" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值可达10" }, { "name": "sup", "data": [ { "name": "text", "data": "5" } ] }, { "name": "text", "data": "~10" }, { "name": "sup", "data": [ { "name": "text", "data": "7" } ] }, { "name": "text", "data": "量级，半导体量子阱、量子点结构的" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值大多数为10" }, { "name": "sup", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "~10" }, { "name": "sup", "data": [ { "name": "text", "data": "4" } ] }, { "name": "text", "data": "量级，钙钛矿材料以及二维材料微腔由于散射损耗过大的问题，" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值甚至只能达到数百。" } ] }, { "name": "table", "data": { "id": "T1", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "表1" } ], "title": [ { "name": "text", "data": "几种典型WGM激光器的相关参数" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Tab.1" } ], "title": [ { "name": "text", "data": "Parameters of several typical WGM lasers" } ] } ], "note": [], "table": [ { "head": [ [ { "align": "center", "style": "border-top:solid;border-bottom:solid;", "data": [ { "name": "text", "data": "微腔材料" } ] }, { "align": "center", "style": "border-top:solid;border-bottom:solid;", "data": [ { "name": "text", "data": "增益介质" } ] }, { "align": "center", "style": "border-top:solid;border-bottom:solid;", "data": [ { "name": "p", "data": [ { "name": "text", "data": 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"text", "data": "552 nm" } ] }, { "align": "center", "data": [ { "name": "text", "data": "7.8 μJ/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] } ] }, { "align": "center", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "36", "type": "bibr", "rid": "R36", "data": [ { "name": "text", "data": "36" } ] } }, { "name": "text", "data": "］" } ] } ], [ { "align": "center", "data": [ { "name": "text", "data": "染料" } ] }, { "align": "center", "data": [ { "name": "text", "data": "43" } ] }, { "align": "center", "data": [ { "name": "text", "data": "3×10" }, { "name": "sup", "data": [ { "name": "text", "data": "3" } ] } ] }, { "align": "center", "data": [ { "name": "text", "data": "—" } ] }, { "align": "center", "data": [ { "name": "text", "data": "610~620 nm" } ] }, { "align": "center", "data": [ { "name": "text", "data": "2.5 μJ" } ] }, { "align": "center", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "37", 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"name": "text", "data": "1 042 nm" } ] }, { "align": "center", "data": [ { "name": "text", "data": "1.8 μW" } ] }, { "align": "center", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "48", "type": "bibr", "rid": "R48", "data": [ { "name": "text", "data": "48" } ] } }, { "name": "text", "data": "］" } ] } ], [ { "align": "center", "data": [ { "name": "text", "data": "Er" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "∶Yb" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "⁃磷酸盐" } ] }, { "align": "center", "data": [ { "name": "text", "data": "57" } ] }, { "align": "center", "data": [ { "name": "text", "data": "10" }, { "name": "sup", "data": [ { "name": "text", "data": "7" } ] } ] }, { "align": "center", "data": [ { "name": "text", "data": "0.05" } ] }, { "align": "center", "data": [ { "name": "text", "data": "1 550 nm" } ] }, { "align": "center", "data": [ { "name": 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"name": "text", "data": "图7" } ] } }, { "name": "text", "data": "（b）所示为通过内吞作用将荧光WGM微珠吸收到细胞质中实现细胞内光学微谐振器的活细胞内激光" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "2", "type": "bibr", "rid": "R2", "data": [ { "name": "text", "data": "2" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" } ] }, { "name": "fig", "data": { "id": "F7", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图7" } ], "title": [ { "name": "text", "data": "（a）以R6G为增益介质的WGM激光器，通过波长漂移和强度变化进行传感，进行折射率变化测量；（b）通过内吞作用将荧光WGM微珠激光吸收到细胞质中实现细胞内光学微谐振器的活细胞内激光；（c）微波调控光子分子的耦合微环谐振腔" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "100", "type": "bibr", "rid": "R100", "data": [ { "name": "text", "data": "100" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "。" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig.7" } ], "title": [ { "name": "text", "data": "（a）The refractive index change of WGM laser with R6G as gain medium is measured. （b）Lasing within live cells containing intracellular optical microresonators. （c）Coupled microring resonators for microwave controlled photonic molecules" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "101", "type": "bibr", "rid": "R101", "data": [ { "name": "text", "data": "101" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "." } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818237&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818242&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818240&type=", "width": "163.44433594", "height": "31.02259827", "fontsize": "" } ] } }, { "name": "p", "data": [ { "name": "text", "data": "基于固体WGM微腔的传感原理和液滴微腔有所不同。固体微腔把大多数的光限制在其电介质内，只有微弱的倏逝场与外部样品相互作用，能够对折射率、温度、压力、磁场等微小环境变化做出良好反应" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "3", "type": "bibr", "rid": "R3", "data": [ { "name": "text", "data": "3" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。通过识别WGM光谱的模式转移、模式展宽和模式劈裂即可实现对上述参数的测量" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "96", "type": "bibr", "rid": "R96", "data": [ { "name": "text", "data": "96" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。如Zhang等制备的芯片级玻璃微球腔激光器表现出高温度灵敏度（~1.8 GHz·K" }, { "name": "sup", "data": [ { "name": "text", "data": "-1" } ] }, { "name": "text", "data": "），可作为超高灵敏度温度传感器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "45", "type": "bibr", "rid": "R45", "data": [ { "name": "text", "data": "45" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。Martin等制备的Nd" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "掺杂的硅酸钡微球激光器的压力灵敏度为6.5×10" }, { "name": "sup", "data": [ { "name": "text", "data": "-4 " } ] }, { "name": "text", "data": "GPa" }, { "name": "sup", "data": [ { "name": "text", "data": "-1" } ] }, { "name": "text", "data": "，高于传统的红宝石压力传感器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "97", "type": "bibr", "rid": "R97", "data": [ { "name": "text", "data": "97" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "WGM激光器除了用于上述提到的生物传感和一些物理参量的传感外，还可用于基于强度变化原理的传感器。基于强度变化的传感器灵敏度相较基于模式移动的传感器更加依赖于WGM微腔的" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值。2012年，Sun等实现了对两种不同序列的DNA进行检测" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "98", "type": "bibr", "rid": "R98", "data": [ { "name": "text", "data": "98" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，他们将DNA样品和探针作为激光增益介质的一部分，虽然两种被探测的DNA之间的热力学差异仅仅能够引起激光增益系数的微小变化，但WGM微腔的强光学反馈可以将这种微小变化放大到足以可探测的范围。根据激光的阈值可以分辨两种DNA的差异，探测的分辨率比为240∶1，比基于荧光探测的分辨率高大约两个数量级。" } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "4.2　微波光子学" } ], "level": "2", "id": "s4b" } }, { "name": "p", "data": [ { "name": "text", "data": "微波光子学主要研究利用光电子学的方法实现对微波、毫米波信号的产生、处理和转换的问题。利用高品质因子WGM微腔可实现微波源、微波滤波器、微波信号调制器等应用功能。早在2001年，Cohen等就对WGM微腔中的光电效应进行了理论研究。之后，他们利用LiNbO" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "晶体制备了高" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值的微盘腔，将37.9 GHz微波信号上转换到1.55 μm的通信光波段" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "99", "type": "bibr", "rid": "R99", "data": [ { "name": "text", "data": "99" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。2015年，郭长磊等报道了基于微球布里渊激光器的可调谐微波源，在11 GHz和22 GHz附近微波信号调谐范围分别为40 MHz和20 MHz" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "4", "type": "bibr", "rid": "R4", "data": [ { "name": "text", "data": "4" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。2019年，Xie等制备的片上受激布里渊散射微波光子滤波器，改善了布里渊增益过程引起的放大噪声，当波导损耗从0.5 dB/cm变化到0.1 dB/cm，噪声系数从28 dB减小到24 dB" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "100", "type": "bibr", "rid": "R100", "data": [ { "name": "text", "data": "100" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "4.3　片上集成" } ], "level": "2", "id": "s4c" } }, { "name": "p", "data": [ { "name": "text", "data": "集成光子学回路是类比集成电路的一种包含多个光子学功能器件的片上集成结构，是片上光互联和宽带集成光计算的重要基础。回音壁光学微腔具有高品质因子，而具有很长的腔内光子寿命(超过百纳秒)，是一个天然的光子存储器。Zhang等制备了一对具有两个不同能级的铌酸锂微环谐振腔" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "101", "type": "bibr", "rid": "R101", "data": [ { "name": "text", "data": "101" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，如" }, { "name": "xref", "data": { "text": "图7", "type": "fig", "rid": "F7", "data": [ { "name": "text", "data": "图7" } ] } }, { "name": "text", "data": "（c）所示，通过外部微波激发进行控制，证明了光的频率和相位可以被编程的微波信号精确控制，通过外部调控实现任意读取和写入操作，在片上集成应用中有巨大潜能。2021年，Chen等制备的掺Er" }, { "name": "sup", "data": [ { "name": "text", "data": "3+" } ] }, { "name": "text", "data": "铌酸锂微盘激光器能够在1 530 nm和1 560 nm处产生激光发射，实现了通信波段的片上可集成光源" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "102", "type": "bibr", "rid": "R102", "data": [ { "name": "text", "data": "102" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" } ] } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "5　结论和展望" } ], "level": "1", "id": "s5" } }, { "name": "p", "data": [ { "name": "text", "data": "WGM微腔内光场在满足表面全反射条件下围绕曲型腔内壁形成了闭合稳定传播模式，能够提供增益介质受激发射的谐振反馈，具有较大的品质因子与较小模式体积，经其构造的激光器展现出了低阈值、窄线宽的特点，受到了研究人员的广泛关注。本文从WGM微腔激光器的特性参数和耦合方式出发，介绍了包括液滴微腔、玻璃微腔、半导体材料微腔等在内的几种典型WGM微腔激光的研究结果以及相关应用场景。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "从目前的研究结果来看，基于液滴微腔的WGM激光器拥有更高的品质因子，可达10" }, { "name": "sup", "data": [ { "name": "text", "data": "7" } ] }, { "name": "text", "data": " ~ 10" }, { "name": "sup", "data": [ { "name": "text", "data": "8" } ] }, { "name": "text", "data": "量级，能够为腔内增益介质提供更强的光反馈，以实现低阈值的WGM激光器。但液滴微腔环境稳定性较差，在一定程度上降低了激光器的性能，限制了液滴WGM激光器的实际应用。未来可通过设计合适的液滴封装及固定方式，提升激光器的稳定性。基于固体微腔的WGM激光器相对液滴微腔来说结构更加灵活，性能更加稳定，但由于制备工艺的限制，微腔质量较差，品质因子相对较小。其中稀土掺杂的玻璃微球激光器的" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值比液滴微腔低一个数量级，半导体量子阱、量子点结构的" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值比液滴微腔低4~5个数量级，钙钛矿材料以及二维材料微腔" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值甚至只能达到数百。如何通过对固体材料组分的合理控制以及对微腔结构热处理方式的准确调控，有效降低由于边缘散射效应带来的不良损耗，实现激射阈值更低、波长更灵活、模式更可控、制备更简单、成本更低廉的激光输出，是未来WGM微腔激光器领域的发展方向之一。此外，目前对于WGM微腔激光器的研究集中在对单个器件或功能的探索上，提升光学微腔的集成度，将各种不同结构、不同材料、不同性能的激光器件集成在一起，满足不同应用场景的需求，实现效率更高、体积更小、性能更稳定的光学系统也将成为未来发展趋势之一。各种类型的WGM微腔激光器具有巨大的应用潜力，其优异的性能能够满足超高灵敏传感、微波光子学和片上集成等诸多应用需求，相信随着研究的不断深入及微纳加工技术的发展，更多的WGM微腔激光器将走出实验室，服务于社会生产生活。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "本文专家审稿意见及作者回复内容的下载地址：" }, { "name": "extlink", "data": { "text": [ { "name": "text", "data": "http://cjl.lightpublishing.cn/thesisDetails#10.37188/" } ], "href": "http://cjl.lightpublishing.cn/thesisDetails#10.37188/" } } ] }, { "name": "p", "data": [ { "name": "text", "data": "CJL.20220236." } ] } ] } 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