表面等离激元金属‐绝缘体‐半导体波导激光器研究进展

何庆叶; 李国辉; 潘登; 冀婷; 王文艳; 崔艳霞

doi:10.37188/CJL.20220238

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表面等离激元金属‐绝缘体‐半导体波导激光器研究进展

特邀综述 | 更新时间：2023-02-13

- 表面等离激元金属‐绝缘体‐半导体波导激光器研究进展增强出版
- Research Progress of Surface Plasmon Polariton Metal-Insulator-Semiconductor Waveguide Lasers
- 发光学报 2022年 43卷第12期 (2022)
- 作者机构：
  
  太原理工大学物理与光电工程学院,山西,太原,030024
- 作者简介：
- 基金信息：
  
  国家自然科学基金(U21A20496;61922060;61775156;61805172;12104334;62174117;61905173);山西省自然科学基金面上青年基金(20210302123154;20210302123169)
- DOI：10.37188/CJL.20220238 中图分类号： TN248.4
- 纸质出版日期：2022-12-05，
  
  收稿日期：2022-06-15，
  
  修回日期：2022-06-30，
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引用本文
何庆叶,李国辉,潘登等.表面等离激元金属‐绝缘体‐半导体波导激光器研究进展[J].发光学报,2022,43(12):1839-1854.

HE Qing-ye,LI Guo-hui,PAN Deng,et al.Research Progress of Surface Plasmon Polariton Metal-Insulator-Semiconductor Waveguide Lasers[J].Chinese Journal of Luminescence,2022,43(12):1839-1854.
何庆叶,李国辉,潘登等.表面等离激元金属‐绝缘体‐半导体波导激光器研究进展[J].发光学报,2022,43(12):1839-1854. DOI： 10.37188/CJL.20220238.

HE Qing-ye,LI Guo-hui,PAN Deng,et al.Research Progress of Surface Plasmon Polariton Metal-Insulator-Semiconductor Waveguide Lasers[J].Chinese Journal of Luminescence,2022,43(12):1839-1854. DOI： 10.37188/CJL.20220238.

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"data": "太原理工大学物理与光电工程学院，山西太原　030024" } ] }, { "lang": "en", "text": "College of Physics and Optoelectronics， Taiyuan University of Technology， Taiyuan 030024， China", "data": [ { "name": "text", "data": "College of Physics and Optoelectronics， Taiyuan University of Technology， Taiyuan 030024， China" } ] } ] } ] }, "abstracts": [ { "lang": "zh", "data": [ { "name": "p", "data": [ { "name": "text", "data": "纳米激光器在光通信、全息技术、生物医疗成像等领域有着广泛的应用前景。表面等离激元（Surface plasmon polariton， SPP）沿着金属表面传播，基于该特性可制成突破衍射极限的低阈值纳米激光器。它们不但具有小尺寸特征，同时还能激发Purcell效应，表现出更高的自发辐射效率。近年来，金属‐绝缘体‐半导体（MIS）波导结构的SPP激光器因具有超强的模式约束能力被大量报道。本文以基于MIS结构的SPP激光器为主题进行综述。首先，介绍了SPP激光器的工作原理，接着分别介绍了基于MIS波导结构的纳米片型和纳米线型SPP激光器的工作原理。然后，依据增益介质材料的不同，依次介绍了增益介质分别为Ⅱ‐Ⅵ半导体、Ⅲ‐Ⅴ半导体以及钙钛矿的SPP MIS波导激光器研究进展。最后，总结全文，并对基于MIS波导的SPP激光器未来的发展和挑战进行了展望。" } ] } ] }, { "lang": "en", "data": [ { "name": "p", "data": [ { "name": "text", "data": "Micro-lasers have wide application prospects in optical communication， holographic technology， biomedical imaging and other fields. Surface plasmon polariton（SPP） propagates along the metal surface， which can be used to fabricate low-threshold nanolasers that break the diffraction limit.. They not only have the characteristic of small size， but also can induce the Purcell effect， so that the spontaneous emission efficiency can be significantly enhanced. In recent years， SPP lasers based on metal-insulator-semiconductor（MIS） waveguide structures have attracted much attention because of their ability of extremely large mode constraint. In this paper， SPP lasers based on MIS waveguide structures will be reviewed. Firstly， the basic mechanism of SPP laser is introduced， and the working principles of nanoplatelet type and nanowire type SPP lasers based on MIS waveguides are introduced respectively. Then， according to different gain medium materials， this paper introduces the research progress of SPP MIS waveguide lasers whose gain media are Ⅱ-Ⅵ semiconductor， Ⅲ-Ⅴ semiconductor and perovskite respectively. Finally， the thesis is summarized， and the future development and challenges of SPP MIS waveguide lasers are prospected." } ] } ] } ], "keyword": [ { "lang": "zh", "data": [ [ { "name": "text", "data": "表面等离激元" } ], [ { "name": "text", "data": "金属-绝缘体-半导体" } ], [ { "name": "text", "data": "激光器" } ], [ { "name": "text", "data": "纳米片" } ], [ { "name": "text", "data": "纳米线" } ] ] }, { "lang": "en", "data": [ [ { "name": "text", "data": "surface plasmon polariton" } ], [ { "name": "text", "data": "metal-insulator-semiconductor" } ], [ { "name": "text", "data": "laser" } ], [ { "name": "text", "data": "nanoplatelet" } ], [ { "name": "text", "data": "nanowire" } ] ] } ], "highlights": [], "body": [ { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "1　引　　言" } ], "level": "1", "id": "s1" } }, { "name": "p", "data": [ { "name": "text", "data": "激光的单色性好、强度高、方向性好等特点使其在工业、医疗、信息、军事等领域得到了广泛应用" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "1", "type": "bibr", "rid": "R1", "data": [ { "name": "text", "data": "1" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "5", "type": "bibr", "rid": "R5", "data": [ { "name": "text", "data": "5" } ] } } ], "rid": [ "R1", "R2", "R3", "R4", "R5" ], "text": "1-5", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。纳米激光器是激光领域发展的一个重要方向，有望推动光通信、全息技术、生物医疗成像等领域向集成度更高、性能更优的方向发展" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "6", "type": "bibr", "rid": "R6", "data": [ { "name": "text", "data": "6" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "12", "type": "bibr", "rid": "R12", "data": [ { "name": "text", "data": "12" } ] } } ], "rid": [ "R6", "R7", "R8", "R9", "R10", "R11", "R12" ], "text": "6-12", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。然而，由于衍射极限的限制，传统激光器的尺寸通常远大于光的波长。为了突破这一限制，研究者们提出了基于表面等离激元（Surface plasmon polariton，SPP）效应的纳米激光器。SPP是一种沿着介质和导体界面方向传播的电子疏密波，只允许在横磁模式下激发。最简单的金属/介质界面上激发的SPP在界面处磁场强度最强，沿着界面法向向两侧逐渐衰减" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "13", "type": "bibr", "rid": "R13", "data": [ { "name": "text", "data": "13" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "16", "type": "bibr", "rid": "R16", "data": [ { "name": "text", "data": "16" } ] } } ], "rid": [ "R13", "R14", "R15", "R16" ], "text": "13-16", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。基于SPP效应可制成突破衍射极限的优质相干激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "17", "type": "bibr", "rid": "R17", "data": [ { "name": "text", "data": "17" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "18", "type": "bibr", "rid": "R18", "data": [ { "name": "text", "data": "18" } ] } } ], "rid": [ "R17", "R18" ], "text": "17-18", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，其光场被压缩至深亚波长尺度，在拥有缩小的器件尺寸的同时，还有效减小了光模式体积，增强了Purcell效应，大幅度提高了自发辐射效率，十分有利于实现低阈值激光。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "2009年，Hill等" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "19", "type": "bibr", "rid": "R19", "data": [ { "name": "text", "data": "19" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "报道了SPP激光器，Zhang等" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "20", "type": "bibr", "rid": "R20", "data": [ { "name": "text", "data": "20" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "报道了金属-绝缘体-半导体（MIS）纳米线结构的SPP激光器。迄今为止，已经实现了MIS波导" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "21", "type": "bibr", "rid": "R21", "data": [ { "name": "text", "data": "21" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "23", "type": "bibr", "rid": "R23", "data": [ { "name": "text", "data": "23" } ] } } ], "rid": [ "R21", "R22", "R23" ], "text": "21-23", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "、金属-绝缘体-金属（MIM）波导" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "24", "type": "bibr", "rid": "R24", "data": [ { "name": "text", "data": "24" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "、SPP纳米阵列" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "25", "type": "bibr", "rid": "R25", "data": [ { "name": "text", "data": "25" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "等不同结构的SPP激光器。其中MIS波导结构的SPP激光器具有欧姆损耗低、模式约束力强、衰减动力学快等优点" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "23", "type": "bibr", "rid": "R23", "data": [ { "name": "text", "data": "23" } ] } }, { "name": "text", "data": "," }, { "name": "xref", "data": { "text": "26", "type": "bibr", "rid": "R26", "data": [ { "name": "text", "data": "26" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，这类纳米激光器与芯片相结合的技术可促进半导体集成领域中电子器件纳米化的发展。研究人员不仅利用Ⅱ-Ⅵ半导体" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "23", "type": "bibr", "rid": "R23", "data": [ { "name": "text", "data": "23" } ] } }, { "name": "text", "data": "," }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "27", "type": "bibr", "rid": "R27", "data": [ { "name": "text", "data": "27" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "28", "type": "bibr", "rid": "R28", "data": [ { "name": "text", "data": "28" } ] } } ], "rid": [ "R27", "R28" ], "text": "27-28", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "与Ⅲ-Ⅴ" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "29", "type": "bibr", "rid": "R29", "data": [ { "name": "text", "data": "29" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "半导体等传统无机发光半导体材料制成了基于MIS波导结构的SPP激光器，还利用可溶液法制备的钙钛矿半导体材料实现了连续波泵浦SPP MIS波导激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "30", "type": "bibr", "rid": "R30", "data": [ { "name": "text", "data": "30" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "32", "type": "bibr", "rid": "R32", "data": [ { "name": "text", "data": "32" } ] } } ], "rid": [ "R30", "R31", "R32" ], "text": "30-32", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "2020年，Zhi等从增益介质、金属种类和器件结构三方面对SPP半导体纳米激光器进行了对比总结" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "22", "type": "bibr", "rid": "R22", "data": [ { "name": "text", "data": "22" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，Gu等对增益介质为纳米线的SPP激光器的工作原理和重要进展做了描述" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "33", "type": "bibr", "rid": "R33", "data": [ { "name": "text", "data": "33" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。除此之外，MIS结构的SPP激光器可将光场限制在薄绝缘层内，有利于微纳激光器的实现，纳米片形状的激光器因具有回音壁模式的工作原理更具有研究意义。因此，本文围绕基于MIS波导结构的SPP激光器展开综述。首先，简要介绍了SPP激光器的基本工作原理，指出了它们与传统激光器在工作原理上的差异。基于MIS波导结构的SPP激光器主要包括纳米片和纳米线型两类，前者是回音壁共振腔，而后者是法布里-玻罗（F-P）共振腔，本文详细阐述了它们的工作原理。然后，本文依次介绍了激光增益介质分别为Ⅱ-Ⅵ半导体（以CdS、ZnO为代表）、Ⅲ-Ⅴ半导体（以GaN为代表）以及钙钛矿（以MAPbI" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "、CsPbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "为代表）制成的SPP MIS波导激光器的研究进展，其中ZnO、GaN、CsPbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "等材料的激光腔主要为纳米线形式，MAPbI" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "激光腔主要为纳米片形式，而基于CdS的两类腔都有报道。最后，总结全文，并对基于MIS波导的SPP激光器未来的发展和挑战做出了展望。" } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "2　SPP激光器的基本原理" } ], "level": "1", "id": "s2" } }, { "name": "p", "data": [ { "name": "text", "data": "目前，人们普遍认为SPP激光器的产生是由于光学增益材料中的激子和SPP发生了耦合" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "34", "type": "bibr", "rid": "R34", "data": [ { "name": "text", "data": "34" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。与传统光子激光器中产生相干光子（频率和相位与入射光子均一样）的受激辐射一样，SPP激光器可以产生SPP的受激辐射，激光的能量则以SPP的形式存储在亚波长尺度的局域范围内。" }, { "name": "xref", "data": { "text": "图 1", "type": "fig", "rid": "F1", "data": [ { "name": "text", "data": "图 1" } ] } }, { "name": "text", "data": "（a）、（b）分别为传统三能级激光系统" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "35", "type": "bibr", "rid": "R35", "data": [ { "name": "text", "data": "35" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "与SPP激光过程原理对比。如" }, { "name": "xref", "data": { "text": "图1", "type": "fig", "rid": "F1", "data": [ { "name": "text", "data": "图1" } ] } }, { "name": "text", "data": " （a）所示，在传统的三能级激光系统中，当一个光子入射到被激发的原子时，基态能级" }, { "name": "italic", "data": [ { "name": "text", "data": "E" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "1" } ] }, { "name": "text", "data": "上的电子被抽运到" }, { "name": "italic", "data": [ { "name": "text", "data": "E" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "能级；" }, { "name": "italic", "data": [ { "name": "text", "data": "E" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "能级上的电子寿命很短，会通过非辐射跃迁转移到亚稳态能级" }, { "name": "italic", "data": [ { "name": "text", "data": "E" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "上；当满足粒子数反转条件时，处于" }, { "name": "italic", "data": [ { "name": "text", "data": "E" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "的电子会跃迁至" }, { "name": "italic", "data": [ { "name": "text", "data": "E" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "1" } ] }, { "name": "text", "data": "；同时向外辐射出激光，完成“受激辐射”过程。而从" }, { "name": "xref", "data": { "text": "图1", "type": "fig", "rid": "F1", "data": [ { "name": "text", "data": "图1" } ] } }, { "name": "text", "data": "（b）可以看出，SPP激光的产生过程首先是增益介质受到外部光子辐射激发出电子-空穴对，之后电子-空穴对会弛豫到激子状态；当增益介质位于共振的金属表面时，激子能量会通过共振耦合转移到金属层中的SPP模式中；当增益介质中被局域在SPP模式状态的电子满足粒子数反转条件时，会辐射出激光。SPP激光器的本质是指在超越衍射极限的空间范围内实现金属纳米结构与半导体增益介质的能量交换与光学放大，是金属的SPP模式与光学增益材料之间的杂化。SPP的参与使得这种激光具有超小集成的特点" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "36", "type": "bibr", "rid": "R36", "data": [ { "name": "text", "data": "36" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" } ] }, { "name": "fig", "data": { "id": "F1", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图1" } ], "title": [ { "name": "text", "data": "（a）传统的三能级激光系统产生激光过程示意图" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "35", "type": "bibr", "rid": "R35", "data": [ { "name": "text", "data": "35" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "；（b）表面等离激元激光辐射过程示意图" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "26", "type": "bibr", "rid": "R26", "data": [ { "name": "text", "data": "26" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "。" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig.1" } ], "title": [ { "name": "text", "data": "（a）Schematic diagram of laser generation process in a conventional three-level laser system" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "35", "type": "bibr", "rid": "R35", "data": [ { "name": "text", "data": "35" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": ". （b）Schematic diagram of the radiation process of surface plasmon polariton lasers" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "26", "type": "bibr", "rid": "R26", "data": [ { "name": "text", "data": "26" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "." } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818104&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818111&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818108&type=", "width": "136.08465576", "height": "33.78495789", "fontsize": "" } ] } }, { "name": "p", "data": [ { "name": "text", "data": "基于MIS波导结构的SPP激光器包括三层：位于上层的半导体层和位于下层的金属层，以及位于金属层和半导体层之间的绝缘材料层，如" }, { "name": "xref", "data": { "text": "图2", "type": "fig", "rid": "F2", "data": [ { "name": "text", "data": "图2" } ] } }, { "name": "text", "data": "所示。MIS波导结构所支撑的SPP模式沿着多层结构的界面传播，通过回音壁共振腔或F-P共振腔实现了对界面传播模式的选择。半导体材料构成了MIS激光的增益介质，它们为所激发的SPP模式提供放大的来源。金属层通常选用贵金属材料，如金、银等，主要是因为这些材料在可见-近红外区域内可以激发SPP模式，可以与半导体腔内的激子共振波段相重合。此外，这些贵金属材料的介电常数虚部比其他金属材料的要小很多。介电常数的虚部越小，波导传播模式所对应的光学损耗也越小，因此用来弥补这些光学损耗所需要消耗的半导体增益就越少，从而更有利于激光的实现。中间插入的绝缘层可避免SPP对半导体发光过程造成的猝灭现象" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "37", "type": "bibr", "rid": "R37", "data": [ { "name": "text", "data": "37" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，通常由二氧化硅、氟化镁等折射率较低的材料构成。此外，基于MIS波导结构的SPP激光器通常都会辐射激光。" } ] }, { "name": "fig", "data": { "id": "F2", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图2" } ], "title": [ { "name": "text", "data": "MIS波导结构表面等离激元激光器截面图及基本原理示意图" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig.2" } ], "title": [ { "name": "text", "data": "Cross-section view of MIS waveguide based surface plasmon polariton lasers and the schematic diagram of their basic principle" } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818116&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818124&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818121&type=", "width": "62.06085205", "height": "40.99371338", "fontsize": "" } ] } } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "3　MIS波导结构的SPP共振原理" } ], "level": "1", "id": "s3" } }, { "name": "p", "data": [ { "name": "text", "data": "基于MIS波导结构的SPP激光器根据增益介质的形状不同，主要分为纳米片和纳米线两类。针对三维（3D）纳米片与纳米线结构的仿真建模，可以采用两步等效模型法进行，即分解为一维（1D）模型与二维（2D）模型的组合，依次进行本征模式的求解。该方法在大大减小了仿真计算量的同时，也有助于依据共振原理来提出优化的设计方案。接下来，本文将从波导理论出发，对纳米片MIS波导和纳米线MIS波导的共振原理给出分析与讨论。" } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "3.1　纳米片MIS结构波导" } ], "level": "2", "id": "s3a" } }, { "name": "p", "data": [ { "name": "text", "data": "对于纳米片MIS波导结构，可将其等效成一个1D MIS波导结构和一个2D回音壁共振腔结构的组合，如" }, { "name": "xref", "data": { "text": "图3", "type": "fig", "rid": "F3", "data": [ { "name": "text", "data": "图3" } ] } }, { "name": "text", "data": "所示。在仿真分析中，首先需要求解1D MIS波导所支撑的SPP波导模式在不同波长下的等效折射率，再将其导入到2D回音壁共振腔结构中进行本征模式的求解。" } ] }, { "name": "fig", "data": { "id": "F3", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图3" } ], "title": [ { "name": "text", "data": "纳米片MIS波导结构示意图（a）及其两步等效模型（（b）~（c））。（b）第一步等效模型：1D MIS波导；（c）第二步等效模型：2D回音壁共振腔。（b）图中曲线展示了SPP间隙模的磁场分量（|" }, { "name": "italic", "data": [ { "name": "text", "data": "H" }, { "name": "sub", "data": [ { "name": "text", "data": "z" } ] } ] }, { "name": "text", "data": "|" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "）与电场分量（|" }, { "name": "italic", "data": [ { "name": "text", "data": "E" }, { "name": "sub", "data": [ { "name": "text", "data": "y" } ] } ] }, { "name": "text", "data": "|" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "）的强度分布示意图。" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig.3" } ], "title": [ { "name": "text", "data": "Schematic diagram of the nanoplatelet MIS waveguide（a） and its two-step equivalent models（（b）-（c））. （b）The first step equivalent model： 1D MIS waveguide. （c）The second step equivalent model： 2D whispering gallery resonator. The curve in （b） represents the distribution of magnetic field |" }, { "name": "italic", "data": [ { "name": "text", "data": "H" }, { "name": "sub", "data": [ { "name": "text", "data": "z" } ] } ] }, { "name": "text", "data": "|" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": " and electric field |" }, { "name": "italic", "data": [ { "name": "text", "data": "E" }, { "name": "sub", "data": [ { "name": "text", "data": "y" } ] } ] }, { "name": "text", "data": "|" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": " for the SPP gap mode." } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818129&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818138&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818132&type=", "width": "156.34124756", "height": "32.89216614", "fontsize": "" } ] } }, { "name": "p", "data": [ { "name": "text", "data": "1D MIS波导结构是由金属、绝缘间隙层、半导体介质层（仿真时只需考虑折射率的实部，因其虚部可借助增益获得补偿）、空气包覆层构成的一个四层膜系统，如" }, { "name": "xref", "data": { "text": "图3", "type": "fig", "rid": "F3", "data": [ { "name": "text", "data": "图3" } ] } }, { "name": "text", "data": "（a）所示。该四层膜系统所支撑的SPP波导模式在间隙层足够薄时，对应的模式电场强度在间隙层中急剧增大。由于有效模式长度（" }, { "name": "italic", "data": [ { "name": "text", "data": "L" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "m" } ] }, { "name": "text", "data": "）反比于模式分布中最大的电磁能量密度，因此急剧增大的模式电场会带来有效模式体积的大幅度降低。有效模式体积对间隙层的厚度（" }, { "name": "italic", "data": [ { "name": "text", "data": "t" } ] }, { "name": "text", "data": "）十分敏感，随着间隙层厚度的增大，其SPP波导模式的模式体积先减小后增加。通常情况下，模式体积最小时对应的间隙层厚度在5~20 nm范围内。" }, { "name": "xref", "data": { "text": "图3", "type": "fig", "rid": "F3", "data": [ { "name": "text", "data": "图3" } ] } }, { "name": "text", "data": "（b）中的两组曲线分别给出了当间隙层厚度较小时，MIS波导结构所支撑的SPP模式的切向磁场分量（|" }, { "name": "italic", "data": [ { "name": "text", "data": "H" }, { "name": "sub", "data": [ { "name": "text", "data": "z" } ] } ] }, { "name": "text", "data": "|" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "）的分布示意图以及法向电场分量（|" }, { "name": "italic", "data": [ { "name": "text", "data": "E" }, { "name": "sub", "data": [ { "name": "text", "data": "y" } ] } ] }, { "name": "text", "data": "|" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "）的分布示意图，图示中SPP模式的传播方向为" }, { "name": "italic", "data": [ { "name": "text", "data": "x" } ] }, { "name": "text", "data": "。从图中看出，该SPP模式的|" }, { "name": "italic", "data": [ { "name": "text", "data": "E" }, { "name": "sub", "data": [ { "name": "text", "data": "y" } ] } ] }, { "name": "text", "data": "|" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "被有效束缚在低折射率绝缘间隙层内部。这一特征与金属导体、绝缘间隙层、半无限大介质层构成的三层膜 Conductor-gap-dielectric（CGD）系统上所支撑的SPP间隙模十分相似。鉴于此，这一模式又可称之为杂化SPP间隙模" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "38", "type": "bibr", "rid": "R38", "data": [ { "name": "text", "data": "38" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。杂化SPP间隙模可将光转换为沿着金属表面传播的电子振荡，但同时受到纳米线（纳米片）波导的引导。CGD结构中的绝缘层有截止厚度" }, { "name": "italic", "data": [ { "name": "text", "data": "t" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "min" } ] }, { "name": "text", "data": "，当" }, { "name": "italic", "data": [ { "name": "text", "data": "t" } ] }, { "name": "text", "data": "<" }, { "name": "italic", "data": [ { "name": "text", "data": "t" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "min" } ] }, { "name": "text", "data": "时，CGD结构存在着TM和TE两种波导模式。TM模式下在较薄的绝缘层内有相对较高的电场值；TE模式下在半导体层内分布着奇模和偶模波导，其分布情况与绝缘层的厚度没有关系。当" }, { "name": "italic", "data": [ { "name": "text", "data": "t" } ] }, { "name": "text", "data": ">" }, { "name": "italic", "data": [ { "name": "text", "data": "t" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "min" } ] }, { "name": "text", "data": "时，TM模式的电场模会发生泄露。MIS结构中也存在着TM和TE两种波导模式。TM模式下，当绝缘层厚度较小时，在较薄的绝缘层内有相对较高的电场值；当绝缘层厚度较大时，半导体层内的电场值要高于绝缘层内的电场值。TE模式下的分布情况与CGD结构的相同。SPP MIS波导激光器的单模、多模特性与品质因子" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "密切相关。通过仿真分析可以得到，在MIS波导结构中，当绝缘层厚度小于20 nm时，" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值的数量级在10" }, { "name": "sup", "data": [ { "name": "text", "data": "7" } ] }, { "name": "text", "data": "左右，纳米腔内也更容易激发出单模激光；当绝缘层厚度在20~40 nm之间时，" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值的数量级在10" }, { "name": "sup", "data": [ { "name": "text", "data": "5" } ] }, { "name": "text", "data": "左右，纳米腔内也可以激发出单模激光；而当绝缘层厚度大于40 nm时，" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值仅为几百，纳米腔内只能激发出多模激光。由此可知，SPP MIS波导激光器的绝缘层厚度在10 nm左右时，更容易激发出单模激光" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "39", "type": "bibr", "rid": "R39", "data": [ { "name": "text", "data": "39" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "通过仿真得到1D MIS波导所支撑的杂化SPP间隙模在不同波长下的等效折射率" }, { "name": "italic", "data": [ { "name": "text", "data": "n" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "eff" } ] }, { "name": "text", "data": "之后，可进一步依据纳米片的水平剖面结构对其进行二维建模。常见的纳米片水平剖面呈三角形、四边形、六边形、圆形等形式。水平传播的SPP间隙模可在这些几何结构的内壁发生全内反射，特定的波长下发生相长干涉，使得光场被严格地限制在纳米腔中，获得了稳定模式，这类模式统称为回音壁模式（WGM）" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "40", "type": "bibr", "rid": "R40", "data": [ { "name": "text", "data": "40" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "41", "type": "bibr", "rid": "R41", "data": [ { "name": "text", "data": "41" } ] } } ], "rid": [ "R40", "R41" ], "text": "40-41", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "接下来，本文以边长为" }, { "name": "italic", "data": [ { "name": "text", "data": "a" } ] }, { "name": "text", "data": "的三角形腔为例，简要说明WGM模式的工作原理" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "42", "type": "bibr", "rid": "R42", "data": [ { "name": "text", "data": "42" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "43", "type": "bibr", "rid": "R43", "data": [ { "name": "text", "data": "43" } ] } } ], "rid": [ "R42", "R43" ], "text": "42-43", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" }, { "name": "xref", "data": { "text": "图4", "type": "fig", "rid": "F4", "data": [ { "name": "text", "data": "图4" } ] } }, { "name": "text", "data": "（a）~（b）给出了等边三角形腔中支撑的两类模式，假设它们的有效波矢分别为" }, { "name": "italic", "data": [ { "name": "text", "data": "k" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "1" } ] }, { "name": "text", "data": "与" }, { "name": "italic", "data": [ { "name": "text", "data": "k" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "。其中，" }, { "name": "xref", "data": { "text": "图4", "type": "fig", "rid": "F4", "data": [ { "name": "text", "data": "图4" } ] } }, { "name": "text", "data": "（a）所示模式具有循环路径，共包含了三组平面波，每组平面波的路径总是平行于三角形的一条边，可以用平面波函数" }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "

e^{i k l x}

", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818146&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818142&type=", "width": "4.57200003", "height": "2.96333337", "fontsize": "" } } } ] }, { "name": "text", "data": "、" }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "

e^{- i k_{1} \"[\"(x + a) / 2 - \sqrt[]{3} y / 2\"]\"}

", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818154&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818149&type=", "width": "22.43666649", "height": "4.48733330", "fontsize": "" } } } ] }, { "name": "text", "data": "、" }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "

e^{- i k_{1} \"[\"(x + a) / 2 + \sqrt[]{3} y / 2\"]\"}

", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818162&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818157&type=", "width": "22.43666649", "height": "4.48733330", "fontsize": "" } } } ] }, { "name": "text", "data": "分别表示。" }, { "name": "xref", "data": { "text": "图4", "type": "fig", "rid": "F4", "data": [ { "name": "text", "data": "图4" } ] } }, { "name": "text", "data": "（b）所示模式呈驻波形式，也由三组平面波构成，它们的分路径总是垂直于三角形的一条边，可以用正弦函数" }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "

s i n \"[\"k_{2} (y + a / (2 \sqrt[]{3}))\"]\"

", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818169&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818164&type=", "width": "34.79800034", "height": "7.11199999", "fontsize": "" } } } ] }, { "name": "text", "data": "、sin" }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "

\"[\"k_{2} (\frac{\sqrt[]{3} x}{2} + \frac{1}{2 y} - \frac{a}{2 \sqrt[]{3}})\"]\"

", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818178&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818173&type=", "width": "39.28533173", "height": "11.85333347", "fontsize": "" } } } ] }, { "name": "text", "data": "、" }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "

s i n \"[\"k_{2} (\frac{\sqrt[]{3} x}{2} - \frac{1}{2 y} + \frac{a}{2 \sqrt[]{3}})\"]\"

", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818187&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818181&type=", "width": "44.28066635", "height": "11.85333347", "fontsize": "" } } } ] }, { "name": "text", "data": "分别表示。" } ] }, { "name": "fig", "data": { "id": "F4", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图4" } ], "title": [ { "name": "text", "data": "三角形腔内传播模式原理分解图" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "42", "type": "bibr", "rid": "R42", "data": [ { "name": "text", "data": "42" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "43", "type": "bibr", "rid": "R43", "data": [ { "name": "text", "data": "43" } ] } } ], "rid": [ "R42", "R43" ], "text": "42-43", "type": "bibr" } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "。（a）波矢为" }, { "name": "bold", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "k" } ] } ] }, { "name": "sub", "data": [ { "name": "text", "data": "1" } ] }, { "name": "text", "data": "的模式在腔内循环，分路径总与三角形的某一条边平行；（b）波矢为" }, { "name": "bold", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "k" } ] } ] }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "的模式在腔内形成驻波模式，分路径总与三角形的某一条边垂直；（c）波矢为" }, { "name": "bold", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "k" } ] } ] }, { "name": "sub", "data": [ { "name": "text", "data": "1" } ] }, { "name": "text", "data": "（纵模）与波矢为" }, { "name": "bold", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "k" } ] } ] }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "（横模）的模式正交叠加，形成三角形腔内传播的复合模式。" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig.4" } ], "title": [ { "name": "text", "data": "Decomposition diagram of modes propagating in a triangular cavity" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "42", "type": "bibr", "rid": "R42", "data": [ { "name": "text", "data": "42" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "43", "type": "bibr", "rid": "R43", "data": [ { "name": "text", "data": "43" } ] } } ], "rid": [ "R42", "R43" ], "text": "42-43", "type": "bibr" } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": ". （a）The mode with wave vector " }, { "name": "bold", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "k" } ] } ] }, { "name": "sub", "data": [ { "name": "text", "data": "1" } ] }, { "name": "text", "data": " circulates in the cavity and its segment path is always parallel to one side of the triangle. （b）The mode with wave vector " }, { "name": "bold", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "k" } ] } ] }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": " forms a standing wave mode in the cavity， and its segment path is always perpendicular to one side of the triangle. （c）Orthogonal superposition of modes with wave vector " }, { "name": "bold", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "k" } ] } ] }, { "name": "sub", "data": [ { "name": "text", "data": "1" } ] }, { "name": "text", "data": "（longitudinal mode） and wave vector " }, { "name": "bold", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "k" } ] } ] }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "（transverse mode） to form a composite mode that propagates in a triangular cavity." } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818190&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818199&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818193&type=", "width": "63.48071289", "height": "45.04266357", "fontsize": "" } ] } }, { "name": "p", "data": [ { "name": "xref", "data": { "text": "图4", "type": "fig", "rid": "F4", "data": [ { "name": "text", "data": "图4" } ] } }, { "name": "text", "data": "（a）所示的三组平面波与" }, { "name": "xref", "data": { "text": "图4", "type": "fig", "rid": "F4", "data": [ { "name": "text", "data": "图4" } ] } }, { "name": "text", "data": "（b）所示的平面波正好两两正交，可以将两个正交模式按如" }, { "name": "xref", "data": { "text": "图4", "type": "fig", "rid": "F4", "data": [ { "name": "text", "data": "图4" } ] } }, { "name": "text", "data": "（c）所示进行叠加，总的波矢" }, { "name": "bold", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "k" } ] } ] }, { "name": "text", "data": "满足" }, { "name": "bold", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "k" } ] } ] }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "=" }, { "name": "bold", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "k" } ] } ] }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "

_{1}^{2}

", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818207&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818204&type=", "width": "1.18533325", "height": "4.40266657", "fontsize": "" } } } ] }, { "name": "bold", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "+k" } ] } ] }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "

_{2}^{2}

", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818214&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818211&type=", "width": "1.18533325", "height": "4.40266657", "fontsize": "" } } } ] }, { "name": "text", "data": "的条件。具体地，将相互正交的波函数两两相乘，然后进行线性叠加，便可得到三角形腔模的通解。接下来，进一步结合边界条件，进行化解，可得" }, { "name": "bold", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "k" } ] } ] }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "

_{1}^{}

", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818219&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818216&type=", "width": "1.18533325", "height": "4.40266657", "fontsize": "" } } } ] }, { "name": "text", "data": "=" }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "

\pm 2 l π / (3 a)

", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818225&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818222&type=", "width": "15.40933418", "height": "3.47133350", "fontsize": "" } } } ] }, { "name": "text", "data": "，" }, { "name": "bold", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "k" } ] } ] }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "

_{2}^{}

", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818232&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818229&type=", "width": "1.18533325", "height": "4.40266657", "fontsize": "" } } } ] }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "

= 2 m π / (\sqrt[]{3} a)

", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818238&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818235&type=", "width": "22.60600090", "height": "4.57200003", "fontsize": "" } } } ] }, { "name": "text", "data": "，其中" }, { "name": "italic", "data": [ { "name": "text", "data": "l" } ] }, { "name": "text", "data": "与" }, { "name": "italic", "data": [ { "name": "text", "data": "m" } ] }, { "name": "text", "data": "代表了两种模式的模式数，" }, { "name": "italic", "data": [ { "name": "text", "data": "l" } ] }, { "name": "text", "data": "+" }, { "name": "italic", "data": [ { "name": "text", "data": "m" } ] }, { "name": "text", "data": "=4,6,8,…。可以借鉴类似波导中的定义，将波矢为" }, { "name": "bold", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "k" } ] } ] }, { "name": "sub", "data": [ { "name": "text", "data": "1" } ] }, { "name": "text", "data": "的模式定义为纵模，纵模在腔内往返一圈的长度为3" }, { "name": "italic", "data": [ { "name": "text", "data": "a" } ] }, { "name": "text", "data": "；将波矢为" }, { "name": "bold", "data": [ { "name": "italic", "data": [ { "name": "text", "data": "k" } ] } ] }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "的模式定义为横模，横模在腔内往返一个周期的长度为" }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "

\sqrt[]{3} a

", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818244&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818241&type=", "width": "7.70466709", "height": "4.31799984", "fontsize": "" } } } ] }, { "name": "text", "data": "。对于有效折射率为" }, { "name": "italic", "data": [ { "name": "text", "data": "n" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "eff" } ] }, { "name": "text", "data": "的三角形腔，可以得到谐振模波长" }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "

λ_{l, m}

", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818250&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818246&type=", "width": "4.91066647", "height": "3.72533321", "fontsize": "" } } } ] }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "

= 3 n_{e f f} a / \sqrt[]{l^{2} + 3 m^{2}}

", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818255&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818252&type=", "width": "28.44799995", "height": "4.91066647", "fontsize": "" } } } ] }, { "name": "text", "data": "。横模的基模对应" }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "

m = 0

m = 0

", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818262&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818261&type=", "width": "9.05933285", "height": "2.70933342", "fontsize": "" } } } ] }, { "name": "text", "data": "时的纯纵模更有利于激光的形成。" } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "3.2　纳米线MIS结构波导" } ], "level": "2", "id": "s3b" } }, { "name": "p", "data": [ { "name": "text", "data": "当半导体纳米线的端面是规则的四边形时，对纳米线MIS波导的建模可以使用与上述纳米片MIS结构波导完全相似的方法。首先，求解1D MIS波导所支撑的SPP波导模式在不同波长下的等效折射率，再将其导入到1D F-P共振腔结构中进行本征模式的求解。然而，当纳米线的端面不是四边形时，需对其建模方法做出调整。此时，需要先求出2D MIS波导所支撑的SPP波导模式在不同波长下的等效折射率，再将其导入到1D F-P共振腔结构中进行本征模式的求解。当然，该方法同样也适用于端面为四边形的半导体纳米线构成的MIS波导。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "本文以如" }, { "name": "xref", "data": { "text": "图5", "type": "fig", "rid": "F5", "data": [ { "name": "text", "data": "图5" } ] } }, { "name": "text", "data": "（a）所示的圆形端面半导体纳米线加载的MIS结构波导为例进行说明，它可以分解为如" }, { "name": "xref", "data": { "text": "图5", "type": "fig", "rid": "F5", "data": [ { "name": "text", "data": "图5" } ] } }, { "name": "text", "data": "（b）所示的半导体区域为圆形的MIS波导结构与" }, { "name": "xref", "data": { "text": "图5", "type": "fig", "rid": "F5", "data": [ { "name": "text", "data": "图5" } ] } }, { "name": "text", "data": "（c）所示的1D F-P共振腔结构的组合。对于" }, { "name": "xref", "data": { "text": "图5", "type": "fig", "rid": "F5", "data": [ { "name": "text", "data": "图5" } ] } }, { "name": "text", "data": "（b）所示2D MIS波导，其本征模式的等效折射率可通过数值方法直接求得，亦可通过耦合模型对其进行建模分析" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "34", "type": "bibr", "rid": "R34", "data": [ { "name": "text", "data": "34" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。从原理上来看，间隙层厚度" }, { "name": "italic", "data": [ { "name": "text", "data": "t" } ] }, { "name": "text", "data": "较小的情形中，半导体纳米线介质波导模对SPP间隙模的杂化作用可以忽略，该2D结构所支撑的模式可近似为SPP间隙模的一种变形，" }, { "name": "xref", "data": { "text": "图5", "type": "fig", "rid": "F5", "data": [ { "name": "text", "data": "图5" } ] } }, { "name": "text", "data": "（b）箭头所指的区域绘制了其电场矢量（|" }, { "name": "italic", "data": [ { "name": "text", "data": "E" }, { "name": "sub", "data": [ { "name": "text", "data": "y" } ] } ] }, { "name": "text", "data": "|" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "）的强度分布图。由于SPP间隙模存在一个截止厚度" }, { "name": "italic", "data": [ { "name": "text", "data": "t" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "min" } ] }, { "name": "text", "data": "，这直接决定了该2D MIS波导结构在水平方向的模场约束力。纳米线的最底端对应的" }, { "name": "italic", "data": [ { "name": "text", "data": "t" } ] }, { "name": "text", "data": "为最小，向两侧演化过程中，复合间隙层（包含了绝缘间隙层与空气间隙层两部分）的厚度逐渐增大。当该厚度增大到一定程度，使得其模式等效折射率逼近半导体的折射率时，SPP间隙模截止。因此，圆形端面纳米线表现出非常高的模式约束力，相应的有效模式面积可以比衍射极限面积小百倍甚至千倍。" } ] }, { "name": "fig", "data": { "id": "F5", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图5" } ], "title": [ { "name": "text", "data": "纳米线MIS波导结构示意图（a）及其两步等效模型（（b）~（c）），其纳米线端面以圆形为例。（b）第一步等效模型：2D MIS波导；（c）第二步等效模型：FP共振腔。（b）图中给了所支撑变形SPP间隙模式的电场强度分布示意图（|" }, { "name": "italic", "data": [ { "name": "text", "data": "E" }, { "name": "sub", "data": [ { "name": "text", "data": "y" } ] } ] }, { "name": "text", "data": "|" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "）；（c）图中曲线展示了FP共振腔不同级次驻波的强度分布示意图。" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig.5" } ], "title": [ { "name": "text", "data": "Schematic diagram of the nanowire MIS waveguide（a） and its two-step equivalent models（（b）-（c））. （b）The first step equivalent model： 2D MIS waveguide. （c）The second step equivalent model： F-P resonant cavity. The map in （b） represents the distribution of electric field （|" }, { "name": "italic", "data": [ { "name": "text", "data": "E" }, { "name": "sub", "data": [ { "name": "text", "data": "y" } ] } ] }, { "name": "text", "data": "|" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "） for the distorted SPP gap mode. The curve in （c） represents the distribution of different orders of standing waves in the F-P resonator." } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818264&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818268&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818265&type=", "width": "156.38525391", "height": "35.56369019", "fontsize": "" } ] } }, { "name": "p", "data": [ { "name": "text", "data": "数值仿真得到2D MIS波导所支撑的变形SPP间隙模在不同波长下的等效折射率" }, { "name": "italic", "data": [ { "name": "text", "data": "n" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "eff" } ] }, { "name": "text", "data": "之后，可进一步对1D F-P共振腔结构进行建模。" }, { "name": "xref", "data": { "text": "图 5", "type": "fig", "rid": "F5", "data": [ { "name": "text", "data": "图 5" } ] } }, { "name": "text", "data": "（c）所示的F-P共振腔模型中，纳米线的端面天然构成了两个反射镜，光在纳米线的两个端面之间来回反射，发生相长干涉，形成驻波。由于光线在纳米线端面正入射，因此反射不完美，存在相对较高的光学损耗。对比纳米片与纳米线两类MIS波导结构，显然前者由于可以支撑全内反射的单纵模，所以更有利于输出高性能激光。对于腔体长度为" }, { "name": "italic", "data": [ { "name": "text", "data": "L" } ] }, { "name": "text", "data": "的F-P腔，如果忽略端面的反射相位，光线往返腔体一周的有效长度2" }, { "name": "italic", "data": [ { "name": "text", "data": "n" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "eff" } ] }, { "name": "italic", "data": [ { "name": "text", "data": "L" } ] }, { "name": "text", "data": "是其共振波长" }, { "name": "inlineformula", "data": [ { "name": "math", "data": { "math": "

λ

", "graphicsData": { "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818272&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818270&type=", "width": "2.28600001", "height": "2.62466669", "fontsize": "" } } } ] }, { "name": "text", "data": "的整数（" }, { "name": "italic", "data": [ { "name": "text", "data": "m" } ] }, { "name": "text", "data": "）倍，" }, { "name": "xref", "data": { "text": "图5", "type": "fig", "rid": "F5", "data": [ { "name": "text", "data": "图5" } ] } }, { "name": "text", "data": "（c）中分别给出" }, { "name": "italic", "data": [ { "name": "text", "data": "m" } ] }, { "name": "text", "data": " = 1，2，3时的共振模式分布。F-P腔的品质因子（" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "）可以表示F-P腔存储电磁能量的能力，它与腔体中光子的寿命（" }, { "name": "italic", "data": [ { "name": "text", "data": "τ" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "c" } ] }, { "name": "text", "data": "）成正比" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "44", "type": "bibr", "rid": "R44", "data": [ { "name": "text", "data": "44" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。然而，端面处所发生的不完美反射会在一定程度上缩短" }, { "name": "italic", "data": [ { "name": "text", "data": "τ" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "c" } ] }, { "name": "text", "data": "，从而降低" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值。为了提升纳米线MIS波导结构的品质因子，需要首先保证纳米线的端面尽可能平整，其次还需要尽可能提高" }, { "name": "xref", "data": { "text": "图5", "type": "fig", "rid": "F5", "data": [ { "name": "text", "data": "图5" } ] } }, { "name": "text", "data": "（b）所示2D MIS波导模式的有效折射率，以提高SPP间隙模在纳米端面处的反射率。" } ] } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "4　SPP MIS波导激光器研究进展" } ], "level": "1", "id": "s4" } }, { "name": "p", "data": [ { "name": "text", "data": "目前，已经报道的SPP MIS波导激光器所使用的增益介质包括Ⅱ-Ⅵ半导体、Ⅲ-Ⅴ半导体以及钙钛矿等。Ⅱ-Ⅵ半导体和Ⅲ-Ⅴ半导体因其宽禁带、波长可调特性成为最早作为SPP MIS波导激光器的增益介质材料" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "45", "type": "bibr", "rid": "R45", "data": [ { "name": "text", "data": "45" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "47", "type": "bibr", "rid": "R47", "data": [ { "name": "text", "data": "47" } ] } } ], "rid": [ "R45", "R46", "R47" ], "text": "45-47", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。最近几年来，钙钛矿因制备成本低、发光性能好等特性成为一种新型的SPP MIS波导激光器增益介质材料" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "48", "type": "bibr", "rid": "R48", "data": [ { "name": "text", "data": "48" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "50", "type": "bibr", "rid": "R50", "data": [ { "name": "text", "data": "50" } ] } } ], "rid": [ "R48", "R49", "R50" ], "text": "48-50", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。" } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "4.1　基于Ⅱ-Ⅵ半导体的SPP MIS波导激光器" } ], "level": "2", "id": "s4a" } }, { "name": "p", "data": [ { "name": "text", "data": "用于SPP MIS波导激光器的Ⅱ-Ⅵ半导体主要包括CdS、CdSe、ZnO，这些材料具有覆盖可见光波段到紫外光波段的禁带宽度、直接跃迁的能带结构等特点" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "51", "type": "bibr", "rid": "R51", "data": [ { "name": "text", "data": "51" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "53", "type": "bibr", "rid": "R53", "data": [ { "name": "text", "data": "53" } ] } } ], "rid": [ "R51", "R52", "R53" ], "text": "51-53", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，研究者们以这些材料为增益介质，研发出了低阈值、Purcell因子高、超快动力学等性能的MIS结构激光器。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "首先，介绍最早出现的以CdS为增益介质的MIS结构激光器。2009年，美国加州大学伯克利分校Zhang等报道了一种CdS基纳米线SPP MIS波导激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "20", "type": "bibr", "rid": "R20", "data": [ { "name": "text", "data": "20" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，纳米线加载在MgF" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/Ag膜上。由于该结构所支撑的杂化SPP间隙模具有强的模式约束能力，在端面处对应的模式面积小至" }, { "name": "italic", "data": [ { "name": "text", "data": "λ" } ] }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/400，所以靠近间隙的CdS纳米线区域具有较高的激子复合速率，这一特征有利于获得高性能激光。该器件在波长为405 nm（脉宽为100 fs，重复频率为80 MHz）泵浦源作用下，在490 nm波长附近获得了阈值为50 MW·cm" }, { "name": "sup", "data": [ { "name": "text", "data": "-2" } ] }, { "name": "text", "data": "的多模激光出射。进一步，他们基于辐射寿命测试结果，推算出该器件的Purcell因子大于6。该研究还表明，当纳米线直径小于140 nm时，光子模式会截止，而SPP MIS波导激光器在纳米线直径小于52 nm时仍可激发。2010年，Zhang等报道了一种CdS基纳米片SPP MIS波导激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "28", "type": "bibr", "rid": "R28", "data": [ { "name": "text", "data": "28" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，其中纳米片的水平剖面呈正方形，纳米片位于加载了MgF" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "的Ag膜上。对于该结构，只有TM偏振（磁场平行于金属平面）下的杂化SPP间隙模能够在方形纳米片内发生全内反射进而产生激光。而TE偏振下的光子模波在传播过程中会发生泄露，无法产生激光。在波长为405 nm（脉宽为100 fs，重复频率为10 kHz）泵浦源的作用下，由正方形CdS纳米片构成的MIS 波导腔中实现了阈值为3 074 MW·cm" }, { "name": "sup", "data": [ { "name": "text", "data": "-2" } ] }, { "name": "text", "data": "的多模（波长范围为485~510 nm）激光出射。由于SPP MIS波导激光器具有高品质因子以及强模式约束能力，其Purcell因子被大幅度提高，相应地，其自发辐射寿命缩短为参比器件（制作在石英基底上的CdS纳米片）的1/14。随着纳米片边长的减小，CdS基SPP MIS波导激光器的Purcell因子呈增加的趋势，边长为2 mm的器件具有高达18的Purcell因子。研究还表明，若CdS纳米片的形状从正方形变为呈低对称特性的不规则形状，MIS波导腔内只能激发单一模式，他们基于此观测到了单模激光的出射。这一现象为基于SPP MIS波导的单模激光器的开发提供了指导。2017年，Zhang等利用CdS材料的自吸收特性，开发了一种波长可调的CdS基纳米线SPP MIS波导激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "54", "type": "bibr", "rid": "R54", "data": [ { "name": "text", "data": "54" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，其具体结构如" }, { "name": "xref", "data": { "text": "图6", "type": "fig", "rid": "F6", "data": [ { "name": "text", "data": "图6" } ] } }, { "name": "text", "data": "（a）所示，绝缘层为SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "，金属层为Ag。由于一维纳米线半导体中存在强的激子-声子耦合，导致其能带发生波动，产生了位于Urbach带尾区域的光吸收与光发射。该带尾位于吸收截止边附近，其能量较光吸收截止边的能量更低。当有限长度的CdS纳米线辐射出光（光谱覆盖了Urbach带尾区域）时，其辐射光中能量较高的部分会因纳米线共振腔效应被其自身吸收掉，使得能量较低的光谱在辐射谱中占主导地位，该效应可称之为自吸收效应。随着纳米线的长度从5.2 μm变化到26.4 μm，其共振峰的波长发生红移，辐射光谱中被吸收掉的高能部分跟着发生红移，从而在发射光谱中留下一个发生了红移的主峰（从465 nm变化到491 nm），具体性能如" }, { "name": "xref", "data": { "text": "图6", "type": "fig", "rid": "F6", "data": [ { "name": "text", "data": "图6" } ] } }, { "name": "text", "data": "（b）所示。该发射主峰的FWHM为3.3 nm，已实现激射，为单模激光。其激射时所对应的泵浦源条件为：波长400 nm，脉宽120 fs，重复频率1 kHz，阈值110 μJ·cm" }, { "name": "sup", "data": [ { "name": "text", "data": "-2" } ] }, { "name": "bold", "data": [ { "name": "text", "data": "。" } ] }, { "name": "text", "data": "随着纳米线长度减小，CdS基SPP MIS波导激光器的Purcell因子呈增加的趋势，长度为2.2 μm的器件Purcell因子为4.25。" } ] }, { "name": "fig", "data": { "id": "F6", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图6" } ], "title": [ { "name": "text", "data": "（a）～（b）基于CdS纳米线/SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/Ag SPP激光结构示意图及激光光谱" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "54", "type": "bibr", "rid": "R54", "data": [ { "name": "text", "data": "54" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "；（c）～（d）基于ZnO纳米线-Al" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "O" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "-Al（Ag） SPP激光结构示意图及四种不同结构的激光器阈值泵浦功率密度统计结果" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "56", "type": "bibr", "rid": "R56", "data": [ { "name": "text", "data": "56" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "。" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig.6" } ], "title": [ { "name": "text", "data": "（a）-（b）Schematic diagram of SPP laser and laser spectra based on CdS NW- SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "-Ag" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "54", "type": "bibr", "rid": "R54", "data": [ { "name": "text", "data": "54" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": ". （c）-（d）Schematic diagram of SPP laser based on ZnO NW-Al" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "O" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "-Ag and the statistical results of threshold pumping power density of four different laser structures" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "56", "type": "bibr", "rid": "R56", "data": [ { "name": "text", "data": "56" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "." } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818274&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818278&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818277&type=", "width": "130.72363281", "height": "103.84179688", "fontsize": "" } ] } }, { "name": "p", "data": [ { "name": "text", "data": "接下来，介绍以ZnO为增益介质的MIS结构激光器。2014年，英国帝国理工学院Oulton等报道了一种ZnO基纳米线SPP MIS波导激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "23", "type": "bibr", "rid": "R23", "data": [ { "name": "text", "data": "23" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，其中的金属层为Ag膜，绝缘层为LiF。在激射阈值以上，单纯的ZnO基纳米线产生的激光在3.19～3.25 eV之间，对应的波长范围为385～387 nm；而ZnO基纳米线SPP MIS波导所产生的激光位于3.27～3.35 eV之间，对应的波长范围为375～380 nm，均属于多模激光。其泵浦条件为：波长355 nm、脉宽150 fs、重复频率800 kHz。他们采用双泵浦超快动力学表征手段对激光产生的非线性过程进行了测试，结果表明SPP MIS波导产生的激光脉冲宽度小于800 fs。实验中，他们对直径在120 nm以下的ZnO基纳米线SPP MIS波导结构进行泵浦，却未观察到激光产生。他们分析，这是由于SPP器件中载流子的复合过程过快导致坍塌。2020年，Zou等报道了一种ZnO基纳米线SPP MIS波导激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "55", "type": "bibr", "rid": "R55", "data": [ { "name": "text", "data": "55" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。他们首先采用化学气相沉积法，以Au纳米颗粒为催化剂，在SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "基底上制备了ZnO纳米线阵列。接着，从基底上将ZnO纳米线刮下后分散到加载了Al" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "O" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "的Ag膜上。该工作深入探究了由直径为165 nm的ZnO纳米线构成的MIS波导结构的发光特性。研究表明，当泵浦光功率从0.39 μW到1.62 μW增加时，该结构的发射光谱会先从宽变窄，后再增宽。其中，当泵浦光功率为0.66 μW时，发射光谱最窄，FWHM达到0.8 nm，在波长316 nm附近产生了激光（泵浦条件：波长325 nm，脉宽100 fs，重复频率1 kHz）。他们认为此时系统进入了强耦合状态，SPP MIS波导中增强的局域电场是强耦合状态产生的原因，此时出射的光为激子极化激元激光。若泵浦光功率从1.62 μW起继续增加时，该结构的发射光谱会发生一定程度的窄化，但其FWHM明显大于激子极化激元激光的FWHM。他们认为此时由于载流子屏蔽效应的存在，系统中激子与光子之间的耦合作用较弱。2019年，Lu等报道了一种ZnO基纳米线SPP MIS波导激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "56", "type": "bibr", "rid": "R56", "data": [ { "name": "text", "data": "56" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，其具体结构如" }, { "name": "xref", "data": { "text": "图6", "type": "fig", "rid": "F6", "data": [ { "name": "text", "data": "图6" } ] } }, { "name": "text", "data": "（c）所示，绝缘层是Al" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "O" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "，在氧化铝与半导体之间引入了一层石墨烯，底部的金属层为Al或Ag。该结构中石墨烯的引入会改变金属的电子密度，从而影响金属的体等离激元频率，进一步会对SPP MIS波导模的损耗产生影响。Al的功函数为4.22，位于石墨烯功函数之下（4.6），因此Al表面的电子密度增大，使得Al的体等离激元频率增大，所激发的SPP MIS波导模的损耗得到有效抑制，为激光的产生提供了一个良好的平台。而Ag的功函数为4.65，位于石墨烯功函数之上，受石墨烯的影响，Ag表面的电子密度会降低，无法形成SPP MIS波导模损耗降低的效果，不利于激光性能的改善。他们分别对Al基底器件和Ag基底器件在引入石墨烯前后进行光泵浦下的发光特性测试，对比了其阈值。如" }, { "name": "xref", "data": { "text": "图6", "type": "fig", "rid": "F6", "data": [ { "name": "text", "data": "图6" } ] } }, { "name": "text", "data": "（d）所示，在波长为355 nm（脉宽为0.5 ns，重复频率为1 kHz）泵浦源的作用下，含石墨烯的Al基底器件获得了阈值为18.5 MW·cm" }, { "name": "sup", "data": [ { "name": "text", "data": "-2" } ] }, { "name": "text", "data": "的单模激光（中心波长372 nm），其FWHM为0.4 nm。与不加石墨烯的器件相比，含石墨烯的Al基底器件的阈值降低了50％。相比而言，Ag基底器件反而会由于引入石墨烯导致激射阈值升高。" } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "4.2　基于Ⅲ⁃Ⅴ半导体的SPP MIS波导激光器" } ], "level": "2", "id": "s4b" } }, { "name": "p", "data": [ { "name": "text", "data": "用于SPP MIS波导激光器的Ⅲ-Ⅴ半导体主要包括GaN、InGaN、AlGaN、GaAs/AlGaAs、InGaAsP，这些材料具有波长可调、禁带宽、热稳定性好等性能" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "46", "type": "bibr", "rid": "R46", "data": [ { "name": "text", "data": "46" } ] } }, { "name": "text", "data": "," }, { "name": "xref", "data": { "text": "51", "type": "bibr", "rid": "R51", "data": [ { "name": "text", "data": "51" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。研究者们以这些材料为增益介质，研发出了低阈值、波长可调的SPP MIS波导激光器。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "Ⅲ-Ⅴ半导体材料均以纳米线的形式充当SPP MIS波导激光器的增益介质。2012年，Lu等报道了一种以InGaN为核、GaN为壳（简称为InGaN@GaN）的六边形纳米线SPP MIS波导激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "57", "type": "bibr", "rid": "R57", "data": [ { "name": "text", "data": "57" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，纳米线位于加载了SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "的Ag膜上。为了获得原子级平滑的Ag膜，他们首先在90 K低温下沉积了Ag纳米团簇，然后在室温下对其进行退火。InGaN@GaN纳米线结构的生长方法为MBE（分子束外延法），所获得的结构具有十分平整的侧壁。进一步将核长170 nm、壳长480 nm的InGaN@GaN纳米线转移到Ag/SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "膜上后，实现了完美的几何接触，该结构所支撑的杂化SPP间隙模的损耗极低。基于此，实现了阈值为3.7 kW·cm" }, { "name": "sup", "data": [ { "name": "text", "data": "-2" } ] }, { "name": "text", "data": "的多模激光出射，波长范围为500~550 nm，所使用的激发光源为波长405 nm的连续激光。2014年，该课题组在上述实验方案的基础上，进一步实现了单模可调的SPP MIS波导激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "24", "type": "bibr", "rid": "R24", "data": [ { "name": "text", "data": "24" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，具体结构如" }, { "name": "xref", "data": { "text": "图7", "type": "fig", "rid": "F7", "data": [ { "name": "text", "data": "图7" } ] } }, { "name": "text", "data": "（a）所示。他们在Al" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "O" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "/Ag膜上加载了纳米线，通过调节In" }, { "name": "italic", "data": [ { "name": "sub", "data": [ { "name": "text", "data": "x" } ] } ] }, { "name": "text", "data": "Ga" }, { "name": "sub", "data": [ { "name": "text", "data": "1-" } ] }, { "name": "italic", "data": [ { "name": "sub", "data": [ { "name": "text", "data": "x" } ] } ] }, { "name": "text", "data": "N@GaN中" }, { "name": "italic", "data": [ { "name": "text", "data": "x" } ] }, { "name": "text", "data": "的比例可实现发光光谱可调。如" }, { "name": "xref", "data": { "text": "图7", "type": "fig", "rid": "F7", "data": [ { "name": "text", "data": "图7" } ] } }, { "name": "text", "data": "（b）所示，通过调整In" }, { "name": "italic", "data": [ { "name": "sub", "data": [ { "name": "text", "data": "x" } ] } ] }, { "name": "text", "data": "Ga" }, { "name": "sub", "data": [ { "name": "text", "data": "1-" } ] }, { "name": "italic", "data": [ { "name": "sub", "data": [ { "name": "text", "data": "x" } ] } ] }, { "name": "text", "data": "N中In和Ga的不同比例可以实现468~642 nm范围内的调谐，而且该特性的变化与纳米线直径没有关系。2014年，Zhang等报道了一种GaN基纳米线SPP MIS波导激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "29", "type": "bibr", "rid": "R29", "data": [ { "name": "text", "data": "29" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，所使用的绝缘层为SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "，金属层为Al。他们制备的GaN纳米线具有规整的三角形截面且表面可以达到原子级的光滑，基于此，GaN纳米线与基底形成了低散射损耗的面接触，有利于激子将能量传递给SPP，使得GaN纳米线产生的增益得到了充分利用，提高了该结构的各项激光性能。在波长为355 nm（脉宽为10 ns，重复频率为100 kHz）泵浦源的作用下，该激光器在中心波长370 nm处获得了阈值为3.5 MW·cm" }, { "name": "sup", "data": [ { "name": "text", "data": "-2" } ] }, { "name": "text", "data": "的单模激光，FWHM为0.8 nm。2020年，Liu等报道了一种Ⅲ族氮化物基纳米线SPP MIS波导激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "58", "type": "bibr", "rid": "R58", "data": [ { "name": "text", "data": "58" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": ",其结构如" }, { "name": "xref", "data": { "text": "图7", "type": "fig", "rid": "F7", "data": [ { "name": "text", "data": "图7" } ] } }, { "name": "text", "data": "（c）所示。他们制备了两种不同增益介质和金属的SPP MIS波导激光器，并比较了其阈值性能。第一种是将InGaN@GaN纳米线转移到加载了SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "的Ag膜上，第二种是将AlGaN@GaN纳米线转移到加载了SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "的Al膜上。在SPP MIS波导结构中，电磁场局域化提供了很强的SPP耦合，提高了半导体中光生载流子转变成辐射更快的SPP模式的比例，促进了激子-SPP的耦合极化，该器件的性能因此得到了大幅改善。如" }, { "name": "xref", "data": { "text": "图7", "type": "fig", "rid": "F7", "data": [ { "name": "text", "data": "图7" } ] } }, { "name": "text", "data": "（d）所示，在波长为365 nm电泵浦的作用下，InGaN@GaN/SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/Ag结构的SPP MIS波导激光器可在450~550 nm波长之间获得阈值为8 kW·cm" }, { "name": "sup", "data": [ { "name": "text", "data": "-2" } ] }, { "name": "text", "data": "的多模激光出射，与参比器件（制作在SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "基底上的InGaN纳米线）相比，SPP MIS波导激光器的辐射寿命可缩短到123 ps。而AlGaN@GaN/SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/Al结构的SPP MIS波导激光器在270 nm波长处实现了阈值为13 kW·cm" }, { "name": "sup", "data": [ { "name": "text", "data": "-2" } ] }, { "name": "text", "data": "的单模激光出射。" } ] }, { "name": "fig", "data": { "id": "F7", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图7" } ], "title": [ { "name": "text", "data": "（a）～（b）基于In" }, { "name": "italic", "data": [ { "name": "sub", "data": [ { "name": "text", "data": "x" } ] } ] }, { "name": "text", "data": "Ga" }, { "name": "sub", "data": [ { "name": "text", "data": "1-" } ] }, { "name": "italic", "data": [ { "name": "sub", "data": [ { "name": "text", "data": "x" } ] } ] }, { "name": "text", "data": "N@GaN纳米线/Al" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "O" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "/Ag SPP激光结构示意图及激光光谱" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "24", "type": "bibr", "rid": "R24", "data": [ { "name": "text", "data": "24" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "；（c）～（d）基于InGaN/GaN（AlGaN/GaN）纳米线/SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/Ag（Al） SPP激光结构示意图及激光光谱" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "58", "type": "bibr", "rid": "R58", "data": [ { "name": "text", "data": "58" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "。" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig.7" } ], "title": [ { "name": "text", "data": "（a）-（b）Schematic of SPP laser and laser spectra based on In" }, { "name": "italic", "data": [ { "name": "sub", "data": [ { "name": "text", "data": "x" } ] } ] }, { "name": "text", "data": "Ga" }, { "name": "sub", "data": [ { "name": "text", "data": "1-" } ] }, { "name": "italic", "data": [ { "name": "sub", "data": [ { "name": "text", "data": "x" } ] } ] }, { "name": "text", "data": "N@GaN NW/SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/Ag" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "24", "type": "bibr", "rid": "R24", "data": [ { "name": "text", "data": "24" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": ". （c）-（d）Schematic of SPP laser and laser spectra based on InGaN@GaN（AlGaN@GaN） NW/SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/Ag" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "58", "type": "bibr", "rid": "R58", "data": [ { "name": "text", "data": "58" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "." } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818281&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818285&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=39818283&type=", "width": "148.66143799", "height": "118.66839600", "fontsize": "" } ] } } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "title": [ { "name": "text", "data": "4.3　基于钙钛矿的SPP MIS波导激光器" } ], "level": "2", "id": "s4c" } }, { "name": "p", "data": [ { "name": "text", "data": "上述Ⅱ-Ⅵ、Ⅲ-Ⅴ半导体材料均是通过气相沉积法制备得到的，该工艺相对复杂、成本较高。而钙钛矿材料可通过溶液法制备，成本相对较低" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "59", "type": "bibr", "rid": "R59", "data": [ { "name": "text", "data": "59" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "62", "type": "bibr", "rid": "R62", "data": [ { "name": "text", "data": "62" } ] } } ], "rid": [ "R59", "R60", "R61", "R62" ], "text": "59-62", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。用于SPP MIS波导激光器的钙钛矿材料主要包括MAPb" }, { "name": "italic", "data": [ { "name": "text", "data": "X" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "（" }, { "name": "italic", "data": [ { "name": "text", "data": "X" } ] }, { "name": "text", "data": "为I、Br、Cl）、CsPb" }, { "name": "italic", "data": [ { "name": "text", "data": "X" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "（" }, { "name": "italic", "data": [ { "name": "text", "data": "X" } ] }, { "name": "text", "data": "为I、Br、Cl），这些材料在宽光谱范围内具有吸收系数高、光致发光量子产率高、缺陷态密度低、俄歇复合速率低等良好的光学性能" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "63", "type": "bibr", "rid": "R63", "data": [ { "name": "text", "data": "63" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "70", "type": "bibr", "rid": "R70", "data": [ { "name": "text", "data": "70" } ] } } ], "rid": [ "R63", "R64", "R65", "R66", "R67", "R68", "R69", "R70" ], "text": "63-70", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。研究者们以钙钛矿为增益介质材料，研发出了低阈值、高品质因子的SPP MIS波导激光器。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "首先，介绍以MAPb" }, { "name": "italic", "data": [ { "name": "text", "data": "X" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "为增益介质的SPP MIS波导激光器。2012年，Yu等报道了一种MAPbI" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "基纳米线SPP MIS波导激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "21", "type": "bibr", "rid": "R21", "data": [ { "name": "text", "data": "21" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，纳米线位于加载了MgF" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "的Ag膜上。他们在玻璃/聚苯乙烯磺酸盐基底上制备出了端面呈扁平矩形的纳米线，高质量MAPbI" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "纳米线和MgF" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "表面之间的大面积接触减少了散射损耗，确保了激子-SPP的强耦合，这一特征有利于激光性能的改善。该器件在波长为400 nm（脉宽为120 fs，重复频率为1 KHz）泵浦源的作用下，在770 nm波长处获得了阈值为13.5 μJ·cm" }, { "name": "sup", "data": [ { "name": "text", "data": "-2" } ] }, { "name": "text", "data": "的单模激光出射。另外，该器件在43.6 ℃下仍可发出激光。2018年，哈尔滨工业大学肖淑敏团队制备出了MAPb" }, { "name": "italic", "data": [ { "name": "text", "data": "X" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "基纳米片SPP MIS波导激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "30", "type": "bibr", "rid": "R30", "data": [ { "name": "text", "data": "30" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，其具体结构如" }, { "name": "xref", "data": { "text": "图8", "type": "fig", "rid": "F8", "data": [ { "name": "text", "data": "图8" } ] } }, { "name": "text", "data": "（a）所示，纳米片位于加载了SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "的Au膜上。调节MAPb" }, { "name": "italic", "data": [ { "name": "text", "data": "X" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "中" }, { "name": "italic", "data": [ { "name": "text", "data": "X" } ] }, { "name": "text", "data": "卤素的组分可实现发光峰位的移动，他们通过蒸汽辅助的热退火法，将MAPbI" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "钙钛矿置于CH" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "NH" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "Br蒸汽环境中，实现了其PL光谱的发光峰位从MAPbI" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "的~770 nm移动到MAPbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "的~550 nm，而且卤化铅钙钛矿的发光峰位变化是可逆的。当MAPbI" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "在CH" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "NH" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "I蒸汽环境中进一步退火时，其发光峰位可逐渐回到770 nm，成功地实现了发光峰位可来回调整100 nm以上的SPP MIS波导激光器。在波长为400 nm（脉宽为100 fs，重复频率为1 kHz）泵浦源的作用下，SPP MIS波导激光器的发光峰位可从779 nm逐渐变化到740 nm （15 min）、710 nm （30 min）、680 nm （50 min）和662 nm（60 min）。2021年，Jin等报道了一种MAPbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "基纳米线SPP MIS波导激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "71", "type": "bibr", "rid": "R71", "data": [ { "name": "text", "data": "71" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，绝缘层为MgF" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "，金属层为Ag膜。该结构所支撑的杂化SPP间隙模具有超强的模式约束能力，在间隙层内产生了超小的模区，而参比器件（制作在SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "基底上的MAPbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "纳米线）的模式主要集中分布在纳米线内。该器件在波长为400 nm（脉宽为130 fs，重复频率为1 kHz）泵浦源的作用下，在540 nm波长处获得了阈值为300 μJ·cm" }, { "name": "sup", "data": [ { "name": "text", "data": "-2" } ] }, { "name": "text", "data": "的单模激光出射。2021年，Lu等报道了一种MAPbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "基纳米晶体SPP MIS波导激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "72", "type": "bibr", "rid": "R72", "data": [ { "name": "text", "data": "72" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，纳米晶体位于加载了Al" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "O" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "的TiN膜上。通过双光子吸收测试手段，近红外光子可激发MAPbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "纳米晶体中的电子-空穴对，弛豫电子-空穴对的复合在可见光波长内会发射光子，这些光子可以耦合到可调谐TiN纳米腔的SPP模式中，使得激光性能得到大幅改善。该器件在波长为800 nm（脉宽为100 fs，重复频率为80 MHz）泵浦源的作用下，在555 nm波长处获得了阈值为10 μJ·cm" }, { "name": "sup", "data": [ { "name": "text", "data": "-2" } ] }, { "name": "text", "data": "的单模激光出射。" } ] }, { "name": "fig", "data": { "id": "F8", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图8" } ], "title": [ { "name": "text", "data": "（a）～（b）基于MAPbI" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "/SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/Au SPP激光结构示意图及激光光谱" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "30", "type": "bibr", "rid": "R30", "data": [ { "name": "text", "data": "30" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "；（c）～（d）基于CsPbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "/SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/Ag SPP激光结构示意图及激光光谱" }, { "name": "sup", "data": [ { "name": "text", "data": "［" }, { "name": "xref", "data": { "text": "73", "type": "bibr", "rid": "R73", "data": [ { "name": "text", "data": "73" } ] } }, { "name": "text", "data": "］" } ] }, { "name": "text", "data": "。" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig.8" } ], "title": [ { "name": "text", "data": "（a）-（b）Schematic of SPP laser and laser spectra based on MAPbI" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "/SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/Au" }, { "name": "sup", "data": [ { "name": "text", "data": 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"，其具体结构如" }, { "name": "xref", "data": { "text": "图8", "type": "fig", "rid": "F8", "data": [ { "name": "text", "data": "图8" } ] } }, { "name": "text", "data": "（c）所示，绝缘层为SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "，金属层为Ag。他们利用SPP间隙模的强模式约束能力，提高了激子-SPP之间的能量传递效率，进而改善了激光的性能。如" }, { "name": "xref", "data": { "text": "图8", "type": "fig", "rid": "F8", "data": [ { "name": "text", "data": "图8" } ] } }, { "name": "text", "data": "（d）所示，在波长800 nm（重复频率1 kHz，脉冲宽度100 fs）泵浦源的作用下，该激光器在535 nm波长处产生了阈值为6.5 µJ·cm" }, { "name": "sup", "data": [ { "name": "text", "data": "-2" } ] }, { "name": "text", "data": "的单模激光出射，而且激射阈值随着CsPbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "纳米线长度的增加而增大。另外，与参比器件（制作在SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "基底上的CsPbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "纳米线）相比，SPP MIS波导激光器的自发辐射寿命缩短了6倍。2021年，Zhang等报道了一种CsPbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": " 基纳米晶体SPP MIS波导激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "74", "type": "bibr", "rid": "R74", "data": [ { "name": "text", "data": "74" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，纳米晶体位于加载了SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "的Ag膜上。该结构中，CsPbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "辐射的光子与Ag的SPP相互杂化后，将电磁能存储在间隙区（" }, { "name": "text", "data": "<" }, { "name": "italic", "data": [ { "name": "text", "data": "λ" } ] }, { "name": "text", "data": "/100），这不仅实现了有效的光约束，还降低了金属损耗。基于此，激光性能得到了改善。该器件在波长为470 nm（脉宽为190 fs，重复频率为80 MHz）泵浦源的作用下，在538 nm波长处获得了阈值为26 μJ·cm" }, { "name": "sup", "data": [ { "name": "text", "data": "-2" } ] }, { "name": "text", "data": "的单模激光出射。随着SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "层厚度的减小，CsPbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "基SPP MIS波导激光器的Purcell因子呈增加的趋势，厚度为5 nm的器件具有高达209的Purcell因子。同年，Liu等也报道了一种CsPbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "基纳米晶体SPP MIS波导激光器" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "75", "type": "bibr", "rid": "R75", "data": [ { "name": "text", "data": "75" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，纳米晶体位于加载了SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "的Ag膜上。他们将0.2 mol·L" }, { "name": "sup", "data": [ { "name": "text", "data": "-1" } ] }, { "name": "text", "data": " CsBr和PbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "溶液以1∶1的比例混合在DMF（N-二甲基甲酰胺）中，轻轻摇动直至完全溶解，最终形成表面光滑、规则形状的高质量CsPbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "纳米晶体。进一步将CsPbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "纳米晶体转移到加载了不同厚度SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "（10，30，60 nm）的Ag膜上。随着SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "厚度的减小，CsPbBr" }, { "name": "sub", "data": [ { "name": "text", "data": "3" } ] }, { "name": "text", "data": "基SPP MIS波导激光器的阈值呈减小的趋势，厚度为10 nm的器件激射阈值为0.138 μW（激发光源为波长405 nm的连续激光），" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值高达3 907。为了更好地反映SPP MIS波导激光器的研究进展，本文列举了一些激光器的性能，如" }, { "name": "xref", "data": { "text": "表1", "type": "table", "rid": "T1", "data": [ { "name": "text", "data": "表1" } ] } }, { "name": "text", "data": "所示，其中给出了激光器结构、激光阈值、工作环境温度、有效模式体积/面积/长度等性能。" } ] }, { "name": "table", "data": { "id": "T1", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "表1" } ], "title": [ { "name": "text", "data": "不同材料MIS结构表面等离激元激光器性能" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Tab.1" } ], "title": [ { "name": "text", "data": "Performance of MIS surface plasmon lasers of different materials" } ] } ], "note": [], "table": [ { "head": [ [ { "align": "center", "style": "border-top:solid;border-bottom:solid;", "data": [ { "name": "text", "data": "增益材料" } ] }, { "align": "center", "style": "border-top:solid;border-bottom:solid;", "data": [ { "name": "text", "data": "绝缘介质/金属" } ] }, { "align": "center", "style": "border-top:solid;border-bottom:solid;", "data": [ { "name": "text", "data": "波长/nm" } ] }, { "align": "center", "style": "border-top:solid;border-bottom:solid;", "data": [ { "name": "text", "data": "激光器阈值" } ] }, { "align": "center", "style": 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"值越大，代表着整个激光系统的增益越好，相应的激发阈值也较小。" }, { "name": "italic", "data": [ { "name": "text", "data": "F" } ] }, { "name": "text", "data": "与品质因子" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "和模式体积" }, { "name": "italic", "data": [ { "name": "text", "data": "V" } ] }, { "name": "text", "data": "满足以下的比例关系：" }, { "name": "italic", "data": [ { "name": "text", "data": "F" } ] }, { "name": "text", "data": "~" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "/" }, { "name": "italic", "data": [ { "name": "text", "data": "V" } ] }, { "name": "text", "data": "，可以看到" }, { "name": "italic", "data": [ { "name": "text", "data": "Q" } ] }, { "name": "text", "data": "值较大、" }, { "name": "italic", "data": [ { "name": "text", "data": "V" } ] }, { "name": "text", "data": "值较小时，" }, { "name": "italic", "data": [ { "name": "text", "data": "F" } ] }, { "name": "text", "data": "值较大。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "尽管SPP MIS波导激光器在突破衍射极限、实现激光器小型化、降低激光器阈值方面取得了显著成果，但是该种激光器在以下几方面也面临着一些新的挑战。（1）机理：分子中的激子与光子发生强耦合时会形成激子极化激元（Exciton polariton，EP），EP激光的产生不需要粒子数反转，使得其阈值远低于光子模式激光。钙钛矿材料激子束缚能高" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "32", "type": "bibr", "rid": "R32", "data": [ { "name": "text", "data": "32" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "的特性使其成为EP激光良好的增益介质材料，但是该激光的形成需要将钙钛矿材料置于高导热的衬底上（如蓝宝石），而MIS波导结构激光器中的绝缘层导热性能较差，因此还暂未制备出EP MIS波导激光器。（2）材料:目前SPP MIS波导激光器的增益介质材料均为单一的纳米线或者纳米片，周期性纳米线阵列" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "76", "type": "bibr", "rid": "R76", "data": [ { "name": "text", "data": "76" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "78", "type": "bibr", "rid": "R78", "data": [ { "name": "text", "data": "78" } ] } } ], "rid": [ "R76", "R77", "R78" ], "text": "76-78", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "结构中相邻纳米线的耦合可实现对激光方向的调控，周期性阵列还可以加强SPP的近场耦合作用。这些特性使得纳米线或纳米片阵列可能在未来成为SPP MIS波导激光器新颖的增益介质材料。（3）结构:当SPP MIS波导激光器中金属的功函数值比石墨烯小时，在绝缘层中引入石墨烯后，金属的电子密度会发生改变，进而影响了金属的体等离激元频率，使得激光器的阈值等性能发生改变。因此，在绝缘层中引入其他功函数比金属大的材料能否有效改善激光性能具有很大的研究意义。（4）电泵浦：SPP MIS波导激光器体积小，难以在器件上面引入电极进行电泵浦，而且由于金属固有的欧姆损耗使得该类激光器的损耗值较高，这些缺陷都限制了其在电泵浦激励下的应用" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "8", "type": "bibr", "rid": "R8", "data": [ { "name": "text", "data": "8" } ] } }, { "name": "text", "data": "," }, { "name": "xref", "data": { "text": "33", "type": "bibr", "rid": "R33", "data": [ { "name": "text", "data": "33" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。但是，由高折射率材料组成的激光器可以激发Mie共振，与SPP共振类似，Mie共振也可以突破衍射极限，实现纳米级别的局域光场，只是这种共振模式的欧姆损耗值较低。现阶段对Mie共振激光的报道相对较少，若是MIS波导结构可以在Mie共振下产生激光，那么该类激光器有望实现电泵浦激光。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "近几年，半导体集成电路发展趋势呈指数型增长，摩尔定律意味着电子器件要朝着微型化的方向发展，SPP MIS波导激光器可突破衍射极限，使得该激光器光源的物理尺寸与电子器件的大小不相上下，因此以纳米激光为光源的芯片光互联技术有助于填补半导体领域的空白。在SPP MIS波导激光器的探索中，更低阈值、更小型化的激光器一直是科学家们不断追求的更高目标。在未来，如何将SPP MIS波导激光器应用在生物传感、信息传输、数据存储等方面，将是科学家们探索的另一个热点和重点。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "本文专家审稿意见及作者回复内容的下载地址：" }, { "name": "extlink", "data": { "text": [ { "name": "text", "data": "http://cjl.lightpublishing.cn/thesisDetails#10.37188/" } ], "href": "http://cjl.lightpublishing.cn/thesisDetails#10.37188/" } } ] }, { "name": "p", "data": [ { "name": "text", "data": "CJL.20220238." } ] } ] } ], "footnote": [], "reflist": { "title": [ { "name": "text", "data": "参考文献" } ], "data": [ { "id": "R1", "label": "1", "citation": [ { "lang": "en", "text": [ { "name": "text", "data": "KIM J E" }, { "name": "text", "data": "， " }, { "name": "text", "data": "SONG M K" }, { "name": "text", "data": "， " }, { "name": "text", "data": "HAN M S" }, { "name": "text", "data": "， " }, { 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