纸质出版日期:2022-08-05,
收稿日期:2022-04-11,
修回日期:2022-04-21,
扫 描 看 全 文
引用本文
赵晶晶,刘丽华,秦彬皓等.高真空磁控溅射温度对Ga2O3微观结构及光学性能的影响[J].发光学报,2022,43(08):1236-1243.
ZHAO Jing-jing,LIU Li-hua,QIN Bin-hao,et al.Effect of Sputtering Temperature on Microstructural and Optical Properties of Gallium Oxide Deposited by High-vacuum Magnetron Sputtering[J].Chinese Journal of Luminescence,2022,43(08):1236-1243.
赵晶晶,刘丽华,秦彬皓等.高真空磁控溅射温度对Ga2O3微观结构及光学性能的影响[J].发光学报,2022,43(08):1236-1243. DOI: 10.37188/CJL.20220131.
ZHAO Jing-jing,LIU Li-hua,QIN Bin-hao,et al.Effect of Sputtering Temperature on Microstructural and Optical Properties of Gallium Oxide Deposited by High-vacuum Magnetron Sputtering[J].Chinese Journal of Luminescence,2022,43(08):1236-1243. DOI: 10.37188/CJL.20220131.
0
浏览量
55
下载量
0
CSCD
关联资源
相关文章
相关作者
相关机构