Synthesis and Conversion Efficiency Optimization of Quantum Dots Layer for Full-color Micro-LED Display Enhanced Publication

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bszhang2006@sinano.ac.cn", "data": [ { "name": "text", "data": "*E-mail: bszhang2006@sinano.ac.cn" } ] } ], "bio": [ { "lang": "zh", "text": [ "张宝顺(1969-)，男，吉林双辽人，博士，研究员，2003年于中国科学院半导体研究所获得博士学位，主要从事半导体材料生长和器件工艺的研究。E-mail: bszhang2006@sinano.ac.cn" ], "graphic": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657420&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657423&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657429&type=" } ], "data": [ [ { "name": "text", "data": "张宝顺" }, { "name": "text", "data": "(1969-)，男，吉林双辽人，博士，研究员，2003年于中国科学院半导体研究所获得博士学位，主要从事半导体材料生长和器件工艺的研究。E-mail: " }, { "name": "text", "data": "bszhang2006@sinano.ac.cn" } ] ] } ], "email": "bszhang2006@sinano.ac.cn", "deceased": false }, { "name": [ { "lang": "zh", "surname": "张", "givenname": "晶", "namestyle": "eastern", "prefix": "" }, { "lang": "en", "surname": "ZHANG", "givenname": "Jing", 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"aff": [ { "id": "aff1", "intro": [ { "lang": "zh", "label": "1", "text": "长春理工大学　光电工程学院，吉林　长春　130022", "data": [ { "name": "text", "data": "长春理工大学　光电工程学院，吉林　长春　130022" } ] }, { "lang": "en", "label": "1", "text": "School of Opto-Electronic Engineering, Changchun University of Science and Technology, Changchun 130022, China", "data": [ { "name": "text", "data": "School of Opto-Electronic Engineering, Changchun University of Science and Technology, Changchun 130022, China" } ] } ] }, { "id": "aff2", "intro": [ { "lang": "zh", "label": "2", "text": "中国科学院苏州纳米技术与纳米仿生研究所　纳米加工平台，江苏　苏州　215123", "data": [ { "name": "text", "data": "中国科学院苏州纳米技术与纳米仿生研究所　纳米加工平台，江苏　苏州　215123" } ] }, { "lang": "en", "label": "2", "text": "Key Laboratory of Multifunctional Nanomaterials and Smart Systems, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China", "data": [ { "name": "text", "data": "Key Laboratory of Multifunctional Nanomaterials and Smart Systems, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China" } ] } ] }, { "id": "aff3", "intro": [ { "lang": "zh", "label": "3", "text": "中国科学技术大学　纳米技术与纳米仿生学院，安徽　合肥　230026", "data": [ { "name": "text", "data": "中国科学技术大学　纳米技术与纳米仿生学院，安徽　合肥　230026" } ] }, { "lang": "en", "label": "3", "text": "School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China", "data": [ { "name": "text", "data": "School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China" } ] } ] } ] }, "abstracts": [ { "lang": "zh", "data": [ { "name": "p", "data": [ { "name": "text", "data": "将表面配体改性的CdSe/ZnS量子点(Quantum dots)和光刻胶混合，进而采用光刻工艺在InGaN/GaN蓝光Micro-LED上实现了最小尺寸为3 μm的高分辨率、高光效的量子点颜色转换膜层。同时系统研究了不同厚度和混合比例的量子点膜层的吸收/发射光谱及光致发光量子产率(PLQY)。为优化光转换效率，量子点膜层中加入了TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "散射粒子以提高蓝光的吸收效率。更进一步地，经过设计引入分布式布拉格反射镜(DBR)，使得未被吸收的蓝光光子回弹到量子点转换膜层，这不仅提升了蓝光吸收效率，也增强了转换色彩的饱和度。同时采用了热激发方式来提升量子点的光致发光量子产率。为得到更高的显示对比度和色彩饱和度，引入黑色光阻矩阵来削弱临近图形之间的颜色串扰。实验结果表明，该量子点膜层可以用光刻技术实现高分辨率、高光效的颜色转换图层，为单片全彩化Micro-LED显示的发展提供了新颖可靠的技术路线。" } ] } ] }, { "lang": "en", "data": [ { "name": "p", "data": [ { "name": "text", "data": "In this paper, colloidal CdSe/ZnS quantum dots(QDs) with modified ligands are dispersed in photoresist and then patterned on blue InGaN/GaN Micro-LED by lithography process, demonstrating a high-resolution and highly efficient color conversion layer with critical dimension of 3 μm. The absorption/emission spectrum and photoluminescence quantum yield(PLQY) of the QDs color conversion layer(CCL) with different thickness and mixing ratio are systematically studied. To improve the conversion efficiency, TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": " scattering particles are diffused into the QDs CCL to enhance the blue light absorption. Moreover, a tailored distributed Bragg reflector(DBR) is introduced to make the unabsorbed blue photons bounce back to the QDs CCL, which not only amplifies the blue light absorption but also strengthens the saturation of the converted colors. The PLQY of the QDs CCL is even increased after appropriate hard baking. Black matrix material is applied to suppress the light crosstalk among neighboring pixels, thus higher contrast and color saturation are obtained. The promising experimental results prove that the QDs photoresist is feasible to construct a high-resolution and highly efficient color conversion layer by lithography process, paving a novel and reliable pathway to monolithic full-color Micro-LED displays." } ] } ] } ], "keyword": [ { "lang": "zh", "data": [ [ { "name": "text", "data": "Micro-LED" } ], [ { "name": "text", "data": "量子点" } ], [ { "name": "text", "data": "分布式布拉格反射镜(DBR)" } ], [ { "name": "text", "data": "颜色转换" } ], [ { "name": "text", "data": "散射粒子" } ] ] }, { "lang": "en", "data": [ [ { "name": "text", "data": "Micro-LED" } ], [ { "name": "text", "data": "quantum dot" } ], [ { "name": "text", "data": "distributed Bragg reflector(DBR)" } ], [ { "name": "text", "data": "color conversion" } ], [ { "name": "text", "data": "scattering particles" } ] ] } ], "highlights": [], "body": [ { "name": "sec", "data": [ { "name": "sectitle", "data": { "label": [ { "name": "text", "data": "1" } ], "title": [ { "name": "text", "data": "引言" } ], "level": "1", "id": "s1" } }, { "name": "p", "data": [ { "name": "text", "data": "凭借低延时、低功耗、高亮度、高自发光效率和宽工作温度范围等显著特性，微型发光二极管(Micro-LED)被认为是十分具有潜力的显示技术，在微显示产品" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "1", "type": "bibr", "rid": "R1", "data": [ { "name": "text", "data": "1" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "4", "type": "bibr", "rid": "R4", "data": [ { "name": "text", "data": "4" } ] } } ], "rid": [ "R1", "R2", "R3", "R4" ], "text": "1-4", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "、AR(增强现实)/VR(虚拟现实)、光通信、固态照明和军事航天等各领域都有着极其重要的应用。但是，由于受到LED外延材料和工艺上的技术限制，单芯片全彩化Micro-LED显示是制约其研究与应用的瓶颈之一。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "目前，Micro-LED全彩化" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "5", "type": "bibr", "rid": "R5", "data": [ { "name": "text", "data": "5" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "解决方案分为两种：巨量转移RGB三原色LED和蓝光LED配合荧光物质颜色转换。鉴于Micro-LED的更小像素尺寸，巨量转移技术的工艺难度和成本过高导致其很难满足市场需求。以单色Micro-LED阵列作为光源、采用胶体量子点(Quantum dots)的彩色转换技术" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "6", "type": "bibr", "rid": "R6", "data": [ { "name": "text", "data": "6" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "8", "type": "bibr", "rid": "R8", "data": [ { "name": "text", "data": "8" } ] } } ], "rid": [ "R6", "R7", "R8" ], "text": "6-8", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "为全彩色Micro-LED显示提供了另一种有效途径。胶体量子点具有量子产率高、吸收光谱宽、以及较高的色纯度(半宽窄)等优点，通过控制量子点核心尺寸易于调色" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "9", "type": "bibr", "rid": "R9", "data": [ { "name": "text", "data": "9" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "10", "type": "bibr", "rid": "R10", "data": [ { "name": "text", "data": "10" } ] } } ], "rid": [ "R9", "R10" ], "text": "9-10", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，发射波长可以覆盖超宽的色域，且具有溶解工艺，通过配体交换可以与大部分光刻胶进行混溶，实现高分辨率图形化" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "11", "type": "bibr", "rid": "R11", "data": [ { "name": "text", "data": "11" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "16", "type": "bibr", "rid": "R16", "data": [ { "name": "text", "data": "16" } ] } } ], "rid": [ "R11", "R12", "R13", "R14", "R15", "R16" ], "text": "11-16", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。所以它们可以用于颜色转换层(CCL)，取代商业颜色滤光片(CF)，可广泛适用于背光单元(BLU)、液晶显示(LCD)、OLED和LED。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "本文研究了量子点转彩技术，采用官能团为巯基的极性配体的改性CdSe/ZnS厚壳量子点" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "blockXref", "data": { "data": [ { "name": "xref", "data": { "text": "17", "type": "bibr", "rid": "R17", "data": [ { "name": "text", "data": "17" } ] } }, { "name": "text", "data": "-" }, { "name": "xref", "data": { "text": "19", "type": "bibr", "rid": "R19", "data": [ { "name": "text", "data": "19" } ] } } ], "rid": [ "R17", "R18", "R19" ], "text": "17-19", "type": "bibr" } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "进行色转换膜层的制备，得到量子点在Micro-LED上的光致转换性质。实验分析了厚度和质量比等参数对量子点膜层光致发光特性的影响。针对膜层吸收效率" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "20", "type": "bibr", "rid": "R20", "data": [ { "name": "text", "data": "20" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "和转换效率提升设计相应的实验方案，并通过光刻方式实现了量子点膜层的RGB图形化，设计挡光结构，降低RGB颜色光串扰" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "21", "type": "bibr", "rid": "R21", "data": [ { "name": "text", "data": "21" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。以常规膜层制备条件为基础，通过光学设计、材料改性、工艺优化提升吸收转换效率，实现了质量比更低、膜层更薄的高转换效率量子点膜层" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "22", "type": "bibr", "rid": "R22", "data": [ { "name": "text", "data": "22" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "。该技术具有半导体工艺兼容的特性，使得单片全彩化Micro-LED微显示屏可以通过标准且高效的半导体工艺实现，进而为其量产提供了一种可靠的思路。" } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "label": [ { "name": "text", "data": "2" } ], "title": [ { "name": "text", "data": "实验" } ], "level": "1", "id": "s2" } }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "label": [ { "name": "text", "data": "2.1" } ], "title": [ { "name": "text", "data": "样品制备" } ], "level": "2", "id": "s2a" } }, { "name": "p", "data": [ { "name": "text", "data": "本文针对厚壳CdSe/ZnS核壳结构量子点进行研究，其中红色量子点壳厚8 nm，绿色量子点壳厚6 nm，通过配体改性为亲水体系使其溶于丙二醇甲醚醋酸酯(PGMEA)溶液，将其与以PGMEA为溶剂、PMMA为主体树脂的负性透明光刻胶以体积比1∶1比例混合，分别选取质量比为2.5%/5%/10%/15%的不同质量比量子点光刻胶(Quantum dots photoresist)，在550 μm玻璃基底上通过紫外固化制备2~10 μm不同厚度量子点膜层，并测试得到不同数据。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "为在更薄的胶体量子点膜层中得到更高的吸收转换效率，选取直径为30 nm的TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "粒子" }, { "name": "sup", "data": [ { "name": "text", "data": "[" }, { "name": "xref", "data": { "text": "23", "type": "bibr", "rid": "R23", "data": [ { "name": "text", "data": "23" } ] } }, { "name": "text", "data": "]" } ] }, { "name": "text", "data": "，以质量比100%充分扩散在PGMEA溶液中，随后以体积比1∶10混入量子点光刻胶中制备成悬浊液，并以旋涂方式涂敷于Micro-LED表面。随后使用光学镀膜机在量子点膜层上方制备分布布拉格反射镜(DBR)，材料为TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "叠加膜层，室温下TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "、SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "材料折射率分别为2.2和1.3，设计薄层厚度TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "(87 nm)/SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "(52 nm)来实现450 nm波段蓝光最大反射率。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "通过光刻方式在基于蓝宝石衬底的蓝光LED 外延片上实现了微米尺度的量子点图案。并为减少RGB亚像素光串扰，通过光刻黑色负性光刻胶制备挡光结构，进而实现更高对比度和色彩饱和度。" } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "label": [ { "name": "text", "data": "2.2" } ], "title": [ { "name": "text", "data": "实验描述" } ], "level": "2", "id": "s2b" } }, { "name": "p", "data": [ { "name": "text", "data": "在厚度为550 μm的玻璃衬底上旋涂2.5%的红色量子点光刻胶，在200 r/min 100 s的旋涂条件下，厚度为2.0 μm，经过长时间紫外固化后，重复该旋涂步骤，量子点膜层厚度可以相应地线性增加。通过相同的旋涂工艺，可以得到不同质量比下不同厚度的量子点膜层。通过PE分光光度计测量相同厚度(5 μm)的不同质量比(2.5%/5%/10%/15%)红绿两种量子点膜层透过率，并计算最佳吸光度(OD)值。随后选取波长为450 nm蓝光LED光源激发不同质量比、不同厚度的红绿两种量子点膜层，通过积分球测试350~800 nm波段辐射光谱，并计算膜层的光致发光量子产率(PLQY)，分析其随不同条件的变化规律。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "为了提升量子点膜层转换效率，单个像素尺寸的膜层厚度应该尽量小于像素发光面积大小。这就要求必须制备更高质量比、更薄厚度的量子点膜层，从而需考虑在低厚度的情况下如何提升量子点对蓝光的吸收转换效率。本文就该问题从三个方面入手。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "一是通过添加高折射率散射粒子(TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": ")提高蓝光在量子点膜层内的瑞利散射，增加其在量子点膜层内的光程，进而提高吸收效率。其中为了使无机纳米颗粒在PGMEA溶液中充分扩散，使用球磨机降低TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "纳米粒子比表面积，继而降低表面能使其更好地在PGMEA中扩散，再结合物理超声，解决因TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "颗粒比表面积较大而产生表面能导致的团聚问题。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "二是通过光学镀膜机在较低温度生长三种不同厚度组合的DBR薄层，针对膜层上方未被吸收的蓝光光子设计DBR厚度为1 μm的7层TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "膜层，将450 nm波段蓝光全反射回膜层，增加光源在膜层内的光程，以进行量子点膜层对激发蓝光的二次吸收，继而提高膜层吸收效率。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "三是针对转换膜层曝光后的不同固化处理方式对转换效率的影响，测试分析UV固化和热板固化在不同条件下的坚膜效果。测试量子点热激发对其PLQY的提升，通过光电测试设备测试辐射光谱，计算出PLQY进行横向对比，得到最佳固化处理方式。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "在图形结构方面采用光刻方式实现下转换膜层的图形化以及黑色挡光矩阵的图形化，使用紫外光刻机 SUSS MA6(光源功率9.8 mW/cm" }, { "name": "sup", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": ")对不同颜色量子点膜层进行曝光。其中由于红色量子点对紫外光的吸收优于绿色量子点，这严重影响光刻胶中感光剂和固化剂的作用速率，因而为避免过度曝光，红色量子点膜层曝光时间明显高于绿色量子点膜层。" } ] } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "label": [ { "name": "text", "data": "3" } ], "title": [ { "name": "text", "data": "结果与讨论" } ], "level": "1", "id": "s3" } }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "label": [ { "name": "text", "data": "3.1" } ], "title": [ { "name": "text", "data": "吸收转换测试分析" } ], "level": "2", "id": "s3a" } }, { "name": "p", "data": [ { "name": "text", "data": "分别测得红色、绿色CdSe/ZnS 量子点膜层在5 μm厚度的标准下，不同质量比的可见光波段透过率，如" }, { "name": "xref", "data": { "text": "图1(a)、(b)", "type": "fig", "rid": "F1", "data": [ { "name": "text", "data": "图1(a)、(b)" } ] } }, { "name": "text", "data": "所示。" } ] }, { "name": "fig", "data": { "id": "F1", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图1" } ], "title": [ { "name": "text", "data": "5 μm的红色(a)和绿色(b)量子点膜层透过率" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig. 1" } ], "title": [ { "name": "text", "data": "Transmittance of 5 μm thick red(a) and green(b) QDs CCL" } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657442&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657446&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657444&type=" } ] } }, { "name": "p", "data": [ { "name": "text", "data": "随着量子点膜层中量子点质量比的上升，450 nm 蓝光波段整体透过率逐步下降。而536 nm与631 nm左右的绿红光波段，均能达到95%以上透过率，可见该量子点膜层对其自身产生的转换光具有较低的自吸收。根据量子点膜层在峰值波长450 nm蓝光Micro-LED上的透过率，计算出红/绿量子点膜层在5 μm厚度时对蓝光的最高吸光度(OD)值分别是1.15/0.13。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "选取450 nm波长蓝光光源，其中光源采用稳流0.334 mA、功率为1 W的供电方式，蓝光辐射通量为360 mW，光通量为16.27 lm，利用积分球测试方法，激发红/绿CdSe/ZnS量子点膜层。 在不同质量比、不同厚度下PLQY变化如" }, { "name": "xref", "data": { "text": "图2", "type": "fig", "rid": "F2", "data": [ { "name": "text", "data": "图2" } ] } }, { "name": "text", "data": "所示。" } ] }, { "name": "fig", "data": { "id": "F2", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图2" } ], "title": [ { "name": "text", "data": "不同厚度的红色(a)和绿色(b)量子点膜层的PLQY，以及不同厚度的红色(c)和绿色(d)量子点膜层的吸收效率。" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig. 2" } ], "title": [ { "name": "text", "data": "PLQY of the red(a) and green(b) QDs CCL with different thickness, absorption efficiency of the red(c) and green(b) QDs CCL with different thickness." } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657449&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657457&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657454&type=" } ] } }, { "name": "p", "data": [ { "name": "text", "data": "PLQY的计算方法如下：" }, { "name": "dispformula", "data": { "label": [ { "name": "text", "data": "(1)" } ], "data": [ { "name": "math", "data": { "graphicsData": { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657461&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657465&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657469&type=" } } } ], "id": "DF1" } }, { "name": "text", "data": "其中，" }, { "name": "italic", "data": [ { "name": "text", "data": "η" } ] }, { "name": "text", "data": "为PLQY," }, { "name": "italic", "data": [ { "name": "text", "data": "N" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "1" } ] }, { "name": "text", "data": "为转换光光子数量，" }, { "name": "italic", "data": [ { "name": "text", "data": "N" } ] }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "为被量子点吸收的光子数量。由PLQY计算公式可知作为分母的光子数量中不包括未被量子点吸收的光源光子，" }, { "name": "italic", "data": [ { "name": "text", "data": "η" } ] }, { "name": "text", "data": "仅为转换光的光子数量与被量子点吸收掉的蓝色光子数量的比值，所以该值只反映膜层内量子点颗粒转换效率。即使转换光子数量很低，如果吸收的蓝光光子数量不多，即吸收效率很低，也会得到很高的PLQY。则当蓝光完全吸收、吸收效率达到100%时，膜层对光源的转换效率将和PLQY相等。换言之，PLQY标定了当前量子点膜层转换效率的上限。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "从" }, { "name": "xref", "data": { "text": "图2(a)", "type": "fig", "rid": "F2", "data": [ { "name": "text", "data": "图2(a)" } ] } }, { "name": "text", "data": "可以看出，随着红光量子点膜层厚度变厚，质量比升高，PLQY在厚度从低到高的变化中呈现衰减的趋势。这是由于CdSe/ZnS量子点材料的吸收光谱与发射光谱重合导致部分转换光在量子点膜层中出现自吸收现象。如" }, { "name": "xref", "data": { "text": "图3(a)", "type": "fig", "rid": "F3", "data": [ { "name": "text", "data": "图3(a)" } ] } }, { "name": "text", "data": "，红色重合区域为量子点自吸收区域，随着膜层内量子点数量的增加，由于蓝光光子数有限，越来越少的蓝光光子转换为红光光子，使其蓝光转换为红光光子增长速度低于量子点自吸收红光光子速度，导致红光转换光功率增长速率下降，继而导致PLQY下降。" } ] }, { "name": "fig", "data": { "id": "F3", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图3" } ], "title": [ { "name": "text", "data": "红色(a)和绿色(b)CdSe/ZnS量子点吸收和转换光谱" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig. 3" } ], "title": [ { "name": "text", "data": "Absorption and conversion spectrum of red(a) and green(b) CdSe/ZnS QDs" } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657472&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657481&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657476&type=" } ] } }, { "name": "p", "data": [ { "name": "text", "data": "从" }, { "name": "xref", "data": { "text": "图2(a)", "type": "fig", "rid": "F2", "data": [ { "name": "text", "data": "图2(a)" } ] } }, { "name": "text", "data": "还能观察到红光量子点膜层的PLQY随质量比上升而下降的情况。随着质量比的增大，量子点膜层中PMMA内量子点数量逐步提高直至饱和，部分量子点间距进一步缩短，甚至产生团聚情况，大量团聚的量子点受到荧光共振能量转移(FRET)的影响产生转换光猝灭，导致转换光功率下降，继而呈现了随质量比升高而PLQY递减的现象。" } ] }, { "name": "p", "data": [ { "name": "xref", "data": { "text": "图2(b)", "type": "fig", "rid": "F2", "data": [ { "name": "text", "data": "图2(b)" } ] } }, { "name": "text", "data": "中由于绿光量子点内核尺寸要小于红色量子点，根据量子尺寸效应其禁带宽度大于红色量子点，需要更高能量光子将其激发，所以绿色量子点对450nm波段的蓝光吸收能力要明显弱于红色量子点。这导致绿色量子点膜层在质量比偏低或者厚度过低时存在严重的蓝光低吸收现象，大量蓝色光子未被吸收转换，厚度增加的前期量子点膜层对蓝光光子的吸收转换效率远高于绿光光子的自吸收，所以PLQY首先处于上升趋势。但是从" }, { "name": "xref", "data": { "text": "图3(b)", "type": "fig", "rid": "F3", "data": [ { "name": "text", "data": "图3(b)" } ] } }, { "name": "text", "data": "阴影部分可见绿光吸收光谱中出现的第一吸收峰处于其转换光谱之中，这严重地增加了膜层对转换光自吸收的效率，使得厚度(主要参数)增加到6 μm左右时转换出的绿光光子数量低于绿色量子点膜层自吸收的绿色光子数量，导致PLQY出现骤降的现象，所以绿色量子点膜层产生PLQY先升后降的情况。量子点的自吸收现象无法完全避免，通过优化量子点结构从而改善量子点的吸收特性可以改善自吸收现象，同时量子点和散射粒子的浓度也可以进一步优化使转换效率最大化。" } ] }, { "name": "p", "data": [ { "name": "xref", "data": { "text": "图2(c)、(d)", "type": "fig", "rid": "F2", "data": [ { "name": "text", "data": "图2(c)、(d)" } ] } }, { "name": "text", "data": "中展示了不同条件下的红/绿量子点膜层对蓝光的吸收效率。随着厚度增厚或质量比增大，均能提高量子点膜层对蓝光的吸收效率，但是随着红光量子点膜层吸收效率达到90%，其吸收效率增长速度明显变缓，吸收达到了饱和。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "因此，CdSe/ZnS量子点转换膜层在提升转换效率方面并不是质量比和厚度越大越好。质量比与厚度的提升伴随着PLQY的衰减和吸收效率的增加，在PLQY持续下降的情况下找出与吸收效率增长的交界点才能使更多的光源光子转换为转换光子。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "根据积分球实验测得Micro-LED光源蓝光与CdSe/ZnS量子点膜层转换光辐射光谱数据，如" }, { "name": "xref", "data": { "text": "图4", "type": "fig", "rid": "F4", "data": [ { "name": "text", "data": "图4" } ] } }, { "name": "text", "data": "所示。得到红色量子点膜层发射峰值为631 nm，光谱半峰全宽(FWHM)为32.72 nm；绿色量子点膜层发射峰值为536 nm,FWHM为22.56 nm。可以清晰地观察到在同辐射功率的蓝光照射下，在蓝色波段红色量子点膜层漏光明显小于绿色量子点膜层，而其对蓝光吸收要远高于绿色量子点膜层，并且转换光辐射光谱也远高于绿色量子点膜层。考虑到绿色量子点本身也具有较高的PLQY，为更好地发挥绿色量子点转换特性，则要考虑实现其对蓝光的充分吸收。" } ] }, { "name": "fig", "data": { "id": "F4", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图4" } ], "title": [ { "name": "text", "data": "红/绿量子点膜层转换光谱" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig. 4" } ], "title": [ { "name": "text", "data": "The conversion spectrum of red and green QDs CCL under blue light illumination" } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657485&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657491&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657488&type=" } ] } } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "label": [ { "name": "text", "data": "3.2" } ], "title": [ { "name": "text", "data": "膜层吸收转换效率提升" } ], "level": "2", "id": "s3b" } }, { "name": "p", "data": [ { "name": "text", "data": "本文针对提升PLQY和增加吸收效率采用了三种解决办法优化转换效率。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "第一，针对光刻实验后的膜层固化方式设计了一系列对比实验，选取PLQY与吸收效率都相对较高的质量比为10%的量子点光刻胶制备量子点膜层，通过相同的旋涂、前烘、曝光、显影后在最后的坚膜固化阶段选取UV固化和热板固化两种方式，测试得到吸收转换对比数据。可见耐热性不好的红/绿色量子点在PMMA介质的保护下均产生了热激发现象，我们称这现象为膜层的正向老化，这依赖于一个高温对膜层内量子点的外壳钝化现象，明显减少了量子点表面缺陷，继而提高了整体转换光的辐射功率。从" }, { "name": "xref", "data": { "text": "表1", "type": "table", "rid": "T1", "data": [ { "name": "text", "data": "表1" } ] } }, { "name": "text", "data": "中可见，红色量子点由于具有更大的尺寸致使热板固化要比UV固化PLQY提高了10%，而更小尺寸、吸收效率更差的绿色量子点PLQY也得到了2%的提升。在保证红绿量子点吸收效率为68%、26%不变的情况下，量子点膜层对整体光源产生的转换效率提升了7%与1%。" } ] }, { "name": "table", "data": { "id": "T1", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "表1" } ], "title": [ { "name": "text", "data": "量子点膜层不同坚膜条件下转换效率对比" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Tab. 1" } ], "title": [ { "name": "text", "data": "Comparison of conversion efficiencies of red and green QDs CCL using different curing conditions" } ] } ], "note": [], "table": [ { "head": [ [ { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-top:1px solid #000;border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "样品种类" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-top:1px solid #000;border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "PLQY/%" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-top:1px solid #000;border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "吸收效率/%" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-top:1px solid #000;border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "转换效率/%" } ] } ] ], "body": [ [ { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "Red 10% UV固化" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "32.65" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "68.67" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "22.42" } ] } ], [ { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "Red 10% 热固化" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "42.37" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "68.59" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "29.06" } ] } ], [ { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "Green 10% UV固化" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "32.83" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "26.01" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "8.54" } ] } ], [ { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "Green 10% 热固化" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "34.90" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "26.19" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "9.14" } ] } ] ], "foot": [] } ] } }, { "name": "p", "data": [ { "name": "text", "data": "第二，针对绿色量子点对蓝光吸收较差的问题，选取吸收效率较差的质量比为5%的量子点光胶进行膜层制备，在光胶中混入尺寸为30 nm的TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "散射粒子。从" }, { "name": "xref", "data": { "text": "表2", "type": "table", "rid": "T2", "data": [ { "name": "text", "data": "表2" } ] } }, { "name": "text", "data": "可见，在混入TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "散射粒子后，蓝光由于膜层中的纳米粒子不断散射，增加了膜层内蓝光的有效光程，使得量子点吸收时间变长，从而使红绿色量子点膜层吸收效率提升2倍和3倍，在量子点的PLQY保持不变的情况下转换效率也相应地提升2倍和3倍。" } ] }, { "name": "table", "data": { "id": "T2", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "表2" } ], "title": [ { "name": "text", "data": "量子点膜层内有无TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "散射粒子的转换效率对比" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Tab. 2" } ], "title": [ { "name": "text", "data": "Comparison of conversion efficiencies of the QDs CCL with and without TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": " scattering particles" } ] } ], "note": [], "table": [ { "head": [ [ { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-top:1px solid #000;border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "样品种类" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-top:1px solid #000;border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "PLQY/%" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-top:1px solid #000;border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "吸收效率/%" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-top:1px solid #000;border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "转换效率/%" } ] } ] ], "body": [ [ { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "Red 5%" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "41.0" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "39.8" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "16.3" } ] } ], [ { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "Red 5%(TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": ")" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "42.2" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "80.8" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "34.1" } ] } ], [ { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "Green 5%" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "28.7" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "19.5" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "5.6" } ] } ], [ { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "Green 5%(TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": ")" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "27.8" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "63.5" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "17.7" } ] } ] ], "foot": [] } ] } }, { "name": "p", "data": [ { "name": "text", "data": "第三，在量子点膜层顶部设计反射峰波长为450 nm的DBR，将膜层内未被吸收的蓝光反射回膜层内进行重复吸收，继而增加膜层吸收效率。其中DBR结构为TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "/SiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "连续叠加，因为量子点膜层对蓝光的吸收仅有两次，则选取吸收系数较好的质量比为10%量子点膜层。" } ] }, { "name": "p", "data": [ { "name": "xref", "data": { "text": "图5", "type": "fig", "rid": "F5", "data": [ { "name": "text", "data": "图5" } ] } }, { "name": "text", "data": "是不同角度下反射率测试结果，可见入射光在入射角为0°、30°、45°时，反射率均能达到90%以上。但是，由于增加角度会使膜层内光程增加，使得反射曲线发生明显蓝移。" } ] }, { "name": "fig", "data": { "id": "F5", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图5" } ], "title": [ { "name": "text", "data": "DBR在不同角度下的反射光谱" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig. 5" } ], "title": [ { "name": "text", "data": "Reflection spectra of DBR at different angles" } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657494&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657500&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657497&type=" } ] } }, { "name": "p", "data": [ { "name": "text", "data": "由" }, { "name": "xref", "data": { "text": "表3", "type": "table", "rid": "T3", "data": [ { "name": "text", "data": "表3" } ] } }, { "name": "text", "data": "中可知膜层上方加入DBR后，红色量子点膜层吸收效率进一步上升，但是由于DBR在红色波段出现的反射峰抑制了转换光的发射，导致转换光功率随吸收效率的增长速度变慢，PLQY小幅下降。但是整体来看，DBR反射回膜层的蓝光光子转换出的红光光子数量要大于DBR反射的红光光子数量，所以整体红色转换光辐射功率仍然是上升的，这就使整体转换效率提高了3%。" } ] }, { "name": "table", "data": { "id": "T3", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "表3" } ], "title": [ { "name": "text", "data": "量子点膜层上有无DBR的转换效率对比" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Tab. 3" } ], "title": [ { "name": "text", "data": "Comparison of conversion efficiencies of QDs CCL with or without DBR" } ] } ], "note": [], "table": [ { "head": [ [ { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-top:1px solid #000;border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "样品种类" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-top:1px solid #000;border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "PLQY/%" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-top:1px solid #000;border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "吸收效率/%" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "style": "border-top:1px solid #000;border-bottom:1px solid #000;", "data": [ { "name": "text", "data": "转换效率/%" } ] } ] ], "body": [ [ { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "Red 10%" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "36.79" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "78.12" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "28.74" } ] } ], [ { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "Red 10%(DBR)" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "33.69" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "91.99" } ] }, { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "30.99" } ] } ], [ { "colspan": "1", "rowspan": "1", "align": "center", "data": [ { "name": "text", "data": "Green 10%" } ] }, { 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"绿色量子点膜层的PLQY在加入DBR后出现明显下降，分析有三种原因导致其产生该情况。首先，DBR在535 nm波段的反射峰有高达20%的反射率，导致量子点膜层内产生的部分绿色光子被DBR反射回膜层内，使转换光辐射功率增长速度变慢；其次，绿光量子点膜层仅有34.90%的PLQY，被DBR反射的大部分蓝光未被量子点膜层吸收而反射回光源，导致大部分蓝色光子未被量子点膜层二次吸收；最后，由于绿色量子点膜层在吸收效率增加的过程中膜层内量子点会产生很强的自吸收现象，也会直接导致转换光辐射功率下降。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "由于绿色量子点膜层对转换光子的自吸收数量和DBR反射转换光的光子数量要明显小于绿色量子点二次吸收产生转换光光子数，所以增加DBR产生的二次吸收也会对绿色量子点膜层带来4%左右的转换效率的提升。" } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "label": [ { "name": "text", "data": "3.3" } ], "title": [ { "name": "text", "data": "高分辨率实验结果" } ], "level": "2", "id": "s3c" } }, { "name": "p", "data": [ { "name": "text", "data": "由于无机TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "在量子点膜层内的比表面积较大，会产生很高的表面能，导致产生明显的团聚情况，在通过球磨机与PGMEA溶液进行表面改性后混入量子点溶液，可实现良好的扩散。量子点光刻胶内混入的TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "对紫外光存在较强的散射性，导致图形会出现很强的横向曝光，经过对旋涂方式、曝光时间、显影液质量比的一系列控制调整得到了图形形貌最大改善。" }, { "name": "xref", "data": { "text": "图6(a)、(b)", "type": "fig", "rid": "F6", "data": [ { "name": "text", "data": "图6(a)、(b)" } ] } }, { "name": "text", "data": "显示了混入TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "前后量子点阵列的表面形貌。可以清楚地看到，未混入TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "之前所有量子点膜层图形都是有序排列的，并且相同尺寸下所有单颗量子点膜层表面形貌是相同的；在混入TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "后还是出现小部分团聚情况，但是能表现出每个量子点膜层的独立性。这表明混入少量TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "的量子点膜层在形状和尺寸上具有良好的均匀性和一致性，与预期设计相符。" } ] }, { "name": "fig", "data": { "id": "F6", "caption": [ { "lang": "zh", "label": [ { "name": "text", "data": "图6" } ], "title": [ { "name": "text", "data": "(a)常规量子点膜层曝光图形；(b)混入TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": "量子点膜层曝光图形；(c)黑色光刻胶分辨率；(d)常规膜层RGB图形；(e)常规膜层圆形图形；(f)常规膜层方形图形。" } ] }, { "lang": "en", "label": [ { "name": "text", "data": "Fig. 6" } ], "title": [ { "name": "text", "data": "Patterns of QDs CCL with(a) and without(b) TiO" }, { "name": "sub", "data": [ { "name": "text", "data": "2" } ] }, { "name": "text", "data": " . (c)Opening of black matrix photoresist. (d)RGB strip patterns. Circle patterns(e) and square patterns(f) of QD CCL on micro-LED." } ] } ], "subcaption": [], "note": [], "graphics": [ { "print": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657503&type=", "small": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657508&type=", "big": "http://html.publish.founderss.cn/rc-pub/api/common/picture?pictureId=25657506&type=" } ] } }, { "name": "p", "data": [ { "name": "text", "data": "在挡光结构设计上通过光刻显影方式将黑色光刻胶分辨率达到最小3 μm×7 μm尺寸图形，如" }, { "name": "xref", "data": { "text": "图6(c)", "type": "fig", "rid": "F6", "data": [ { "name": "text", "data": "图6(c)" } ] } }, { "name": "text", "data": "所示。使用无混入散射粒子的常规量子点膜层先进行红色量子点图案的制作，紫外固化后，再进行绿色量子点图案的制作，最后进行黑色光刻胶的图形化，从而实现面向蓝光Micro-LED的、具备RGB亚像素的全彩转换膜层。 " }, { "name": "xref", "data": { "text": "图6(d)、(e)、(f)", "type": "fig", "rid": "F6", "data": [ { "name": "text", "data": "图6(d)、(e)、(f)" } ] } }, { "name": "text", "data": "分别展示了亚像素尺寸为3 μm×7 μm的RGB图形，直径为6.5 μm的圆形亚像素图形和边长为6.5 μm的方形亚像素图形，其对应的最高分辨率可以达到2 008像素/英寸(ppi)。" } ] } ] } ] }, { "name": "sec", "data": [ { "name": "sectitle", "data": { "label": [ { "name": "text", "data": "4" } ], "title": [ { "name": "text", "data": "结论" } ], "level": "1", "id": "s4" } }, { "name": "p", "data": [ { "name": "text", "data": "本文将表面配体改性的CdSe/ZnS量子点和以PGMEA为溶剂、PMMA为主体树脂的负性透明光刻胶混合，通过旋涂和固化得到量子点膜层并研究了其对蓝光的吸收和转换性能。通过标准的光刻工艺实现了适配InGaN/GaN蓝光Micro-LED、最小尺寸为3 μm的高分辨率高光效的量子点颜色转换膜层。通过系统的测试得到该量子点膜层在5 μm厚度下红/绿量子点膜层对Micro-LED所发蓝光的光密度可达到1.15和0.13。红/绿量子点膜层PLQY最高可达到47%和37%，吸收效率达到98%与65%。在吸收转换效率提升上，量子点膜层中加入散射粒子提高了红/绿量子点膜层蓝光吸收效率，为原膜层的2倍和3倍。经过设计DBR使蓝光光子回弹到量子点转换膜层，将绿色量子点膜层吸收效率从26%提升至74%。采用了热激发方式将红色量子点膜层PLQY从32%提升至43%。引入黑色光阻矩阵来减少临近不同图形之间的颜色串扰，得到最小黑色矩阵线宽仅为3 μm。所有实验数据表明，光刻技术完全可以将该量子点膜层应用于Micro-LED，实现高效率的颜色转换图层，为实现单片全彩化Micro-LED显示的发展提供了一个稳定可靠的技术方案。" } ] }, { "name": "p", "data": [ { "name": "text", "data": "本文专家审稿意见及作者回复内容的下载地址：http://cjl.lightpublishing.cn/thesisDetails#10.37188/CJL.20210368." } ] } ] } ], "footnote": [], "reflist": { "title": [ { "name": "text", "data": "参考文献：" } ], "data": [ { "id": "R1", "label": "[1]", "citation": [ { "lang": "en", "text": [ { "name": "text", "data": "CHONG W C" }, { "name": "text", "data": ", " }, { "name": "text", "data": "CHO W K" }, { "name": "text", "data": ", " }, { "name": "text", "data": "LIU Z J" }, { "name": "text", "data": ", " }, { "name": "text", "data": "et al" }, { "name": "text", "data": ". 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