Synthesis and Conversion Efficiency Optimization of Quantum Dots Layer for Full-color Micro-LED Display

Zi-yuan LU; Wing-cheung CHONG; Xu ZHANG; Tao WANG; Yi TAN; Qian-jing WANG; Xiao-dong ZHANG; Yong CAI; Bao-shun ZHANG; Jing ZHANG

doi:10.37188/CJL.20210368

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Synthesis and Conversion Efficiency Optimization of Quantum Dots Layer for Full-color Micro-LED Display

Luminescence Industry and Technology Frontier | 更新时间：2022-04-07

- Synthesis and Conversion Efficiency Optimization of Quantum Dots Layer for Full-color Micro-LED Display
  增强出版
- Chinese Journal of Luminescence Vol. 43, Issue 3, Pages: 421-429(2022)
- 作者机构：
  
  1.长春理工大学　光电工程学院，吉林　长春　130022
  2.中国科学院苏州纳米技术与纳米仿生研究所　纳米加工平台，江苏　苏州　215123
  3.中国科学技术大学　纳米技术与纳米仿生学院，安徽　合肥　230026
- 作者简介：
- 基金信息：
  
  National Natural Science Foundation of China(U1830112);Natural Science Foundation of Jiangsu Province(BK20191195)
- DOI：10.37188/CJL.20210368
  CLC：
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Zi-yuan LU, Wing-cheung CHONG, Xu ZHANG, et al. Synthesis and Conversion Efficiency Optimization of Quantum Dots Layer for Full-color Micro-LED Display. [J]. Chinese Journal of Luminescence 43(3):421-429(2022)
DOI：

Zi-yuan LU, Wing-cheung CHONG, Xu ZHANG, et al. Synthesis and Conversion Efficiency Optimization of Quantum Dots Layer for Full-color Micro-LED Display. [J]. Chinese Journal of Luminescence 43(3):421-429(2022) DOI： 10.37188/CJL.20210368.

摘要

将表面配体改性的CdSe/ZnS量子点(Quantum dots)和光刻胶混合，进而采用光刻工艺在InGaN/GaN蓝光Micro-LED上实现了最小尺寸为3 μm的高分辨率、高光效的量子点颜色转换膜层。同时系统研究了不同厚度和混合比例的量子点膜层的吸收/发射光谱及光致发光量子产率(PLQY)。为优化光转换效率，量子点膜层中加入了TiO,2,散射粒子以提高蓝光的吸收效率。更进一步地，经过设计引入分布式布拉格反射镜(DBR)，使得未被吸收的蓝光光子回弹到量子点转换膜层，这不仅提升了蓝光吸收效率，也增强了转换色彩的饱和度。同时采用了热激发方式来提升量子点的光致发光量子产率。为得到更高的显示对比度和色彩饱和度，引入黑色光阻矩阵来削弱临近图形之间的颜色串扰。实验结果表明，该量子点膜层可以用光刻技术实现高分辨率、高光效的颜色转换图层，为单片全彩化Micro-LED显示的发展提供了新颖可靠的技术路线。

Abstract

In this paper, colloidal CdSe/ZnS quantum dots(QDs) with modified ligands are dispersed in photoresist and then patterned on blue InGaN/GaN Micro-LED by lithography process, demonstrating a high-resolution and highly efficient color conversion layer with critical dimension of 3 μm. The absorption/emission spectrum and photoluminescence quantum yield(PLQY) of the QDs color conversion layer(CCL) with different thickness and mixing ratio are systematically studied. To improve the conversion efficiency, TiO,2, scattering particles are diffused into the QDs CCL to enhance the blue light absorption. Moreover, a tailored distributed Bragg reflector(DBR) is introduced to make the unabsorbed blue photons bounce back to the QDs CCL, which not only amplifies the blue light absorption but also strengthens the saturation of the converted colors. The PLQY of the QDs CCL is even increased after appropriate hard baking. Black matrix material is applied to suppress the light crosstalk among neighboring pixels, thus higher contrast and color saturation are obtained. The promising experimental results prove that the QDs photoresist is feasible to construct a high-resolution and highly efficient color conversion layer by lithography process, paving a novel and reliable pathway to monolithic full-color Micro-LED displays.

关键词

Micro-LED量子点分布式布拉格反射镜(DBR)颜色转换散射粒子

Keywords

Micro-LEDquantum dotdistributed Bragg reflector(DBR)color conversionscattering particles

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