用粉末靶在玻璃和PI衬底上制备AZO/Ag/AZO薄膜

用粉末靶在玻璃和PI衬底上制备AZO/Ag/AZO薄膜 Preparation of AZO/Ag/AZO Transparent Conductive Films Deposited on Glass and Polyimide Substrates Using Powder Targets 刘思宁 LIU Si-ning first-author 周艳文 ZHOU Yan-wen 沙天怡 SHA Tian-yi 辽宁科技大学 材料与冶金学院,辽宁 鞍山,114051 辽宁科技大学 材料与冶金学院,辽宁 鞍山,114051 School of Materials and Metallurgy, University of Science and Technology Liaoning, Anshan 114051, China School of Materials and Metallurgy, University of Science and Technology Liaoning, Anshan 114051, China 室温下在玻璃和聚酰亚胺两种不同衬底上, 采用射频磁控溅射法溅射掺铝氧化锌(AZO)粉末靶和固体Ag靶, 制备了两组AZO/Ag/AZO 3层透明导电薄膜, 研究了AZO层厚度对不同衬底3层膜结构和光电性能的影响.结果表明:不同衬底的两组AZO/Ag/AZO薄膜均为多晶膜.当Ag层厚度不变时, 随着AZO层厚度的增加, 两组薄膜电学性能变化不大, 透射峰向长波方向移动.玻璃和PI衬底上制备的AZO(30 nm)/Ag(14 nm)/AZO(30 nm)薄膜, 在550 nm处的透光率分别为85%和70%, 方块电阻分别为2.6 /□和4.6 /□. The sandwich films composed of aluminum ions doped zinc oxide (AZO)/silver(Ag)/AZO films were prepared on polyimide (PI) and glass substrates by RF magnetron sputtering using the powder AZO target and the solid Ag target at room temperature. The effect of the thicknesses of AZO layers on the structure, optical and electrical properties of the sandwich films was investigated. The results show that the as-deposited films are polycrystalline on both PI and glass substrates. The changes of the electrical properties of the sandwich films are not obvious, and the positions of the highest transmittance shift towards the long wavelength region with the increasing of AZO thickness. When the thicknesses of the films are 30 nm of AZO and 14 nm of Ag, the sheet resistances are as low as 2.6 /□ and 4.6 /□ on glass and PI substrates, respectively. The transmittances of the films at 550 nm are 85% on glass and 70% on PI substrates. 粉末靶 有机衬底 多层透明导电薄膜 磁控溅射 powder target organic substrate TCO multilayer film magnetron sputtering Zhang F, Tao J, Dong X. Development and preparation of flexible transparent conductive film [J]. Mater. Rev.(材料导报), 2007, 21(3):119-122 (in Chinese). Zhuang T J, Su Z S, Liu Y D, et al. 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