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基于Ag微孔阵列结构电极的MgZnO紫外探测器制备和特性
Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode
- 发光学报 2021年42卷第2期 页码：201-207
- 作者机构：
1.中国科学院长春光学精密机械与物理研究所 发光学及应用国家重点实验室, 吉林 长春 130033
2.中国科学院大学 材料科学与光电工程研究中心, 北京 100049
- 作者简介：
[ "王丽嫣(1995-), 女, 黑龙江哈尔滨人, 硕士, 2021年于中国科学院长春光学精密机械与物理研究所获得硕士学位, 主要从事宽禁带半导体材料与器件的研究。E-mail:53681111@qq.com" ]
[ "刘可为(1981-), 男, 辽宁铁岭人, 博士, 研究员, 博士研究生导师, 2008年于中国科学院长春光学精密机械与物理研究所获得博士学位, 主要从事宽禁带半导体光电材料与器件方面的研究。E-mail:liukw@ciomp.ac.cn" ]
[ "陈星(1984-), 男, 湖北荆门人, 博士, 副研究员, 硕士研究生导师, 2012年于中国科学院大连化学物理研究所获得博士学位, 主要从事宽禁带半导体光电材料与器件方面的研究。E-mail:chenxing@ciomp.ac.cn" ]
- 基金信息：中国科学院百人计划，吉林省优秀青年科学基金(20180520173JH);中国科学院青年创新促进会(2020225);国家自然科学基金(62074148);国家自然科学基金(61605200);国家自然科学基金(61875194);国家自然科学基金(11727902);国家自然科学基金(61425021);国家自然科学基金(61525404);国家自然科学基金(61427901);发光学及应用国家重点实验室开放基金(SKLA-2018-05);发光学及应用国家重点实验室开放基金(SKLA-2020-06);中英合作交流项目(英国皇家学会-中国自然科学基金委)(IECNSFC170345)
DOI：10.37188/CJL.20200362
中图分类号： O472.8;TN36纸质出版日期：2021-2，
收稿日期：2020-11-29，
录用日期：2020-12-10
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王丽嫣, 刘可为, 陈星, 等. 基于Ag微孔阵列结构电极的MgZnO紫外探测器制备和特性[J]. 发光学报, 2021,42(2):201-207.
Li-yan WANG, Ke-wei LIU, Xing CHEN, et al. Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode[J]. Chinese Journal of Luminescence, 2021,42(2):201-207.
王丽嫣, 刘可为, 陈星, 等. 基于Ag微孔阵列结构电极的MgZnO紫外探测器制备和特性[J]. 发光学报, 2021,42(2):201-207. DOI： 10.37188/CJL.20200362.
Li-yan WANG, Ke-wei LIU, Xing CHEN, et al. Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode[J]. Chinese Journal of Luminescence, 2021,42(2):201-207. DOI： 10.37188/CJL.20200362.
摘要
通过金属有机化合物化学气相沉积(MOCVD)方法在蓝宝石衬底上生长了MgZnO薄膜，结合光刻和聚苯乙烯(PS)小球模板技术，制备了基于Ag微孔阵列电极结构的MgZnO紫外探测器。与基于常规金属薄膜电极的器件相比，基于微孔阵列叉指电极的MgZnO基紫外探测器的光电流提高近6倍，同时其暗电流和响应时间基本保持不变。通过紫外-可见透射光谱和电学性质等表征，讨论了Ag微孔阵列结构电极对MgZnO薄膜紫外光电探测性能的影响机制。本研究为制备高性能紫外探测器提供了一条可行的途径。
Abstract
The MgZnO film was grown on the sapphire substrate by the metal organic compound chemical vapor deposition(MOCVD) method. Combined with photolithography and polystyrene(PS) microsphere template technology
the MgZnO ultraviolet detector based on the Ag microporous array electrode structure was fabricated.Compared with devices based on conventional metal film electrodes
the photocurrent of the MgZnO ultraviolet detector based on the microporous array interdigital electrode is increased by nearly 6 times
while its dark current and response time remain basically unchanged. Through the characterization of ultraviolet-visible transmission spectra and electrical properties
the mechanism of the influence of the microporous array structure Ag electrode on the UV photodetection performance of the MgZnO film was discussed. This study provides a feasible way to prepare high-performance UV detectors.
关键词
MgZnO紫外探测器聚苯乙烯微孔阵列
Keywords
MgZnOultraviolet detectorpolystyrenemicroporous array
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