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DC magnetron-sputtered VO2 thin films: towards high-performance near-infrared photodetectors
更新时间:2025-06-05
    • DC magnetron-sputtered VO2 thin films: towards high-performance near-infrared photodetectors

    • In the field of near-infrared photodetection, a monoclinic VO2 thin film was successfully prepared using a direct current magnetron sputtering metal vanadium target combined with annealing process. The MSM structured near-infrared photodetector exhibited excellent photoelectric response performance, providing a new direction for research in this field.
    • Chinese Journal of Luminescence   Pages: 1-10(2025)
    • DOI:10.37188/CJL.20250148    

      CLC: O482.31
    • CSTR:32170.14.CJL.20250148    
    • Published Online:05 June 2025

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  • YANG Qi,ZENG Ming,ZHOU Wen-qi,et al.DC magnetron-sputtered VO2 thin films: towards high-performance near-infrared photodetectors[J].Chinese Journal of Luminescence, DOI:10.37188/CJL.20250148 CSTR: 32170.14.CJL.20250148.

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DING Ran
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Related Institution

State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University
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