DC magnetron-sputtered VO2 thin films: towards high-performance near-infrared photodetectors
|更新时间:2025-06-05
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DC magnetron-sputtered VO2 thin films: towards high-performance near-infrared photodetectors
“In the field of near-infrared photodetection, a monoclinic VO2 thin film was successfully prepared using a direct current magnetron sputtering metal vanadium target combined with annealing process. The MSM structured near-infrared photodetector exhibited excellent photoelectric response performance, providing a new direction for research in this field.”