53 Gbit/s High Speed Single Mode 940 nm Vertical-cavity Surface-emitting Laser

Han-yang XU; Si-cong TIAN; Sai-yi HAN; Shao-chi PAN; Ahamed MANSOOR; Cun-zhu TONG; Li-jun WANG; Dieter BIMBERG

doi:10.37188/CJL.20220106

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53 Gbit/s High Speed Single Mode 940 nm Vertical-cavity Surface-emitting Laser

Device Fabrication and Physics | 更新时间：2022-08-01

- 53 Gbit/s High Speed Single Mode 940 nm Vertical-cavity Surface-emitting Laser
  增强出版
- Chinese Journal of Luminescence Vol. 43, Issue 7, Pages: 1114-1120(2022)
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所 Bimberg中德绿色光子学研究中心，吉林长春　130033
  2.中国科学院大学，北京　100049
  3.中国科学院长春光学精密机械与物理研究所发光学及应用国家重点实验室，吉林长春　130033
  4.柏林工业大学固体物理研究所纳米光学中心，德国柏林　D‐10623
- 作者简介：
- 基金信息：
  
  Sino-German Center for Research Promotion(2018249);Sino⁃German Center for Research Promotion
- DOI：10.37188/CJL.20220106
  CLC： TN248.4;TP394.1;TH691.9
- Published：05 July 2022，
  
  Received：26 March 2022，
  
  Revised：10 April 2022，
扫描看全文
徐汉阳,田思聪,韩赛一等.53 Gbit/s高速单模940 nm垂直腔面发射激光器[J].发光学报,2022,43(07):1114-1120.

XU Han-yang,TIAN Si-cong,HAN Sai-yi,et al.53 Gbit/s High Speed Single Mode 940 nm Vertical-cavity Surface-emitting Laser[J].Chinese Journal of Luminescence,2022,43(07):1114-1120.
徐汉阳,田思聪,韩赛一等.53 Gbit/s高速单模940 nm垂直腔面发射激光器[J].发光学报,2022,43(07):1114-1120. DOI： 10.37188/CJL.20220106.

XU Han-yang,TIAN Si-cong,HAN Sai-yi,et al.53 Gbit/s High Speed Single Mode 940 nm Vertical-cavity Surface-emitting Laser[J].Chinese Journal of Luminescence,2022,43(07):1114-1120. DOI： 10.37188/CJL.20220106.

摘要

制备了不同氧化孔径的940 nm垂直腔面发射激光器（VCSEL），选取氧化孔径为3，6，9 μm的VCSEL进行了测试表征分析。氧化孔径为3，6，9 μm的VCSEL的最高输出功率分别为2.92，6.79，10.49 mW，调制带宽分别为27.65，23.34，20.56 GHz。此外，氧化孔径为3 μm的VCSEL在整个工作电流下都可实现单模工作，氧化孔径为6 μm和9 μm的VCSEL在较大电流下呈现少模和多模特性。最后，选取3 μm氧化孔径的VCSEL进行数据传输测试，在非归零（NRZ）码下实现了传输速率53 Gbit/s。

Abstract

940 nm vertical cavity surface emitting lasers（VCSELs） with different oxidation apertures were prepared. VCSELs with oxidation apertures of 3， 6，9 μm were tested and characterized. The maximum output power of VCSELs with oxidation aperture of 3， 6，9 μm is 2.92， 6.79，10.49 mW， respectively， and the modulation bandwidth of them is 27.65， 23.34， 20.56 GHz， respectively. In addition， VCSELs with an oxidation aperture of 3 μm can achieve single-mode operation under the whole working current， and VCSELs with an oxidation aperture of 6 μm and 9 μm show few mode and multi-mode characteristics under large current.Finally

VCSEL with oxidation apertures of 3 μm is selected for data transmission test

and the transmission rate of 53 Gbit/s under not return to zero(NRZ) is realized.

关键词

垂直腔面发射激光器高速单模

Keywords

vertical cavity surface emitting laser（VCSEL）high speedsingle mode

references

HUANG C Y， TSAI C T，WENG J H，et al. Temperature and noise dependence of tri-mode VCSEL carried 120-Gbit/s QAM-OFDM data in back-to-back and OM5-MMF links ［J］. J. Lightwave Technol.， 2020，38（24）：6746-6758. doi: 10.1109/jlt.2020.3017798http://dx.doi.org/10.1109/jlt.2020.3017798

MANGASER R，ROSE K. Estimating interconnect performance for a new national technology roadmap for semiconductors ［C］. Proceedings of IEEE 1998 International Interconnect Technology Conference，San Francisco，CA，USA， 1998：253-255.

GUSTAVSSON J S，LARSSON A，HAGLUND Å，et al. High speed 850 nm VCSELs for >40 Gb/s transmission ［C］. Proceedings of 2013 Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference，Anaheim，CA，USA， 2013：1-3. doi: 10.1364/ofc.2013.oth4h.4http://dx.doi.org/10.1364/ofc.2013.oth4h.4

CHENG C H，SHEN C C，KAO H Y，et al. 850/940-nm VCSEL for optical communication and 3D sensing ［J］. Opto-Electron. Adv.， 2018，1（3）：180005-1-11. doi: 10.29026/oea.2018.180005http://dx.doi.org/10.29026/oea.2018.180005

LIU A J，WOLF P，LOTT J A，et al. Vertical-cavity surface-emitting lasers for data communication and sensing ［J］. Photonics Res.， 2019，7（2）：121-136. doi: 10.1364/prj.7.000121http://dx.doi.org/10.1364/prj.7.000121

LAVRENCIK J，VARUGHESE S，THOMAS V A，et al. 2λ × 100 Gbps PAM-4 wideband fiber 100 m links using 850 nm and 940 nm VCSELs ［C］. Proceedings of 2016 Photonics Conference，Waikoloa，HI，USA， 2016：751-752. doi: 10.1109/ipcon.2016.7831299http://dx.doi.org/10.1109/ipcon.2016.7831299

CHI K L，XIE Z T，SHI J W. High-speed Zn-diffusion/oxide-relief VCSELs with stable high-temperature performance at 940 nm wavelength ［C］. Proceedings of 2017 IEEE Photonics Conference，Orlando，FL，USA， 2017：63-64. doi: 10.1109/ipcon.2017.8116008http://dx.doi.org/10.1109/ipcon.2017.8116008

AGUSTIN M，LEDENTSOV JR N，KROPP J R，et al. 50 Gb/s NRZ and 4-PAM data transmission over OM5 fiber in the SWDM wavelength range ［C］. Proceedings of SPIE 10552，Vertical-cavity Surface-emitting Lasers ⅩⅩⅡ，San Francisco，California，United States， 2018：1055202-1-8. doi: 10.1117/12.2289823http://dx.doi.org/10.1117/12.2289823

LAVRENCIK J，VARUGHESE S，THOMAS V A，et al. Scaling VCSEL-MMF links to 1 Tb/s using short wavelength division multiplexing ［J］. J. Lightwave Technol.， 2018，36（18）：4138-4145. doi: 10.1109/jlt.2018.2858208http://dx.doi.org/10.1109/jlt.2018.2858208

CHENG C L，LEDENTSOV N，AGUSTIN M，et al. Ultra-fast Zn-diffusion/oxide-relief 940 nm VCSELs ［C］. Proceedings of 2019 Optical Fiber Communications Conference and Exhibition，San Diego，CA，USA， 2019：1-3. doi: 10.1364/ofc.2019.w3a.2http://dx.doi.org/10.1364/ofc.2019.w3a.2

KHAN Z，LEDENTSOV N，CHORCHOS L，et al. Single-mode 940 nm VCSELs with narrow divergence angles and high-power performances for fiber and free-space optical communications ［J］. IEEE Access， 2020，8：72095-72101. doi: 10.1109/access.2020.2987818http://dx.doi.org/10.1109/access.2020.2987818

GHOLAMI A，MOLIN D，SILLARD P. Compensation of chromatic dispersion by modal dispersion in MMF- and VCSEL-based gigabit Ethernet transmissions ［J］. IEEE Photonics Technol. Lett.， 2009，21（10）：645-647. doi: 10.1109/lpt.2009.2015891http://dx.doi.org/10.1109/lpt.2009.2015891

LARISCH G，ROSALES R，LOTT J A，et al. Energy-efficient VCSELs for 200+ Gb/s optical interconnects ［C］. Proceedings of CLEO：Science and Innovations 2019，San Jose，California，United States， 2019：SM4N.7. doi: 10.1364/cleo_si.2019.sm4n.7http://dx.doi.org/10.1364/cleo_si.2019.sm4n.7

LARISCH G，JUAREZ A A，CHEN X，et al. 910 nm single-mode VCSELs and its application for few-mode transmission over graded-index single-mode fibers ［C］. Proceedings of the 2020 22nd International Conference on Transparent Optical Networks （ICTON），Bari，Italy，2020：1-4. doi: 10.1109/icton51198.2020.9203345http://dx.doi.org/10.1109/icton51198.2020.9203345

WANG H L，QIU J Y，YU X，et al. The modal effect of VCSELs on transmitting data rate over distance in OM4 fiber ［J］. IEEE J. Quantum Electron.， 2020，56（6）：8000106-1-6. doi: 10.1109/jqe.2020.3022360http://dx.doi.org/10.1109/jqe.2020.3022360

刘安金. 单模直调垂直腔面发射激光器研究进展［J］. 中国激光， 2020，47（7）：0701005-1-22. doi: 10.3788/cjl202047.0701005http://dx.doi.org/10.3788/cjl202047.0701005

LIU A J. Progress in single-mode and directly modulated vertical-cavity surface-emitting lasers ［J］. Chin. J. Lasers， 2020，47（7）：0701005-1-22. （in Chinese）. doi: 10.3788/cjl202047.0701005http://dx.doi.org/10.3788/cjl202047.0701005

LIU M，WANG C Y，FENG M，et al. 50 Gb/s error-free data transmission of 850 nm oxide-confined VCSELs ［C］. Proceedings of 2016 Optical Fiber Communications Conference and Exhibition，Anaheim，CA，USA， 2016：1-3. doi: 10.1364/ofc.2016.tu3d.2http://dx.doi.org/10.1364/ofc.2016.tu3d.2

QIU P P，WU B，FU P，et al. Fabrication and characterization of low-threshold single fundamental mode VCSELs with dielectric DBR mirror ［J］. IEEE Photonics J.， 2021，13（4）：1500106-1-6. doi: 10.1109/jphot.2021.3089710http://dx.doi.org/10.1109/jphot.2021.3089710

LARSSON A，WESTBERGH P，GUSTAVSSON J，et al. High-speed VCSELs for short reach communication ［J］. Semicond. Sci. Technol.， 2011，26（1）：014017-1-5. doi: 10.1088/0268-1242/26/1/014017http://dx.doi.org/10.1088/0268-1242/26/1/014017

MOSER P，WOLF P，LARISCH G，et al. Energy-efficient oxide-confined high-speed VCSELs for optical interconnects ［C］. Proceedings of SPIE 9001，Vertical-cavity Surface-emitting Lasers ⅩⅤⅢ，San Francisco，California，United States， 2014：9001-1-8. doi: 10.1117/12.2044319http://dx.doi.org/10.1117/12.2044319

李秀山. 垂直腔面发射激光器高阶模式及偏振控制［D］. 长春：中国科学院长春光学精密机械与物理研究所，2015.

LI X S. Polarization and High-order Mode Control of Vertical Cavity Surface Emitting Lasers ［D］. Changchun：Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences， 2015. （in Chinese）

刘莹莹. 垂直腔面发射激光器的偏振控制及两模面发射激光器的研究［D］. 长春：中国科学院长春光学精密机械与物理研究所，2019.

LIU Y Y. Study on Polarization Control of Vertical-cavity Surface-emitting Lasers and Two-modes VCSEL ［D］. Changchun：Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences， 2019. （in Chinese）

CHOQUETTE K D，GEIB K M，ASHBY C I H，et al. Advances in selective wet oxidation of AlGaAs alloys ［J］. IEEE J. Sel. Top. Quantum Electron.， 1997，3（3）：916-926. doi: 10.1109/2944.640645http://dx.doi.org/10.1109/2944.640645

PENG C Y，TSAO K，CHENG H T，et al. Investigation of the current influence on near-field and far-field beam patterns for an oxide-confined vertical-cavity surface-emitting laser ［J］. Opt. Express， 2020，28（21）：30748-30759. doi: 10.1364/oe.397878http://dx.doi.org/10.1364/oe.397878

TAUBER D，WANG G，GEELS R S，et al. Large and small signal dynamics of vertical cavity surface emitting lasers ［J］. Appl. Phys. Lett.， 1993，62（4）：325-327. doi: 10.1063/1.108947http://dx.doi.org/10.1063/1.108947

杨卓凯，田思聪，LARISCH Gunter，等. 基于PAM4调制的高速垂直腔面发射激光器研究进展［J］. 发光学报， 2020，41（4）：399-413. doi: 10.3788/fgxb20204104.0399http://dx.doi.org/10.3788/fgxb20204104.0399

YANG Z K，TIAN S C，LARISCH G，et al. High-speed vertical-cavity surface-emitting lasers based on PAM4 modulation ［J］. Chin. J. Lumin.， 2020，41（4）：399-413. （in Chinese）. doi: 10.3788/fgxb20204104.0399http://dx.doi.org/10.3788/fgxb20204104.0399

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