53 Gbit/s High Speed Single Mode 940 nm Vertical-cavity Surface-emitting Laser

Han-yang XU; Si-cong TIAN; Sai-yi HAN; Shao-chi PAN; Ahamed MANSOOR; Cun-zhu TONG; Li-jun WANG; Dieter BIMBERG

doi:10.37188/CJL.20220106

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53 Gbit/s High Speed Single Mode 940 nm Vertical-cavity Surface-emitting Laser

Device Fabrication and Physics | 更新时间：2022-08-01

- 53 Gbit/s High Speed Single Mode 940 nm Vertical-cavity Surface-emitting Laser
  增强出版
- Chinese Journal of Luminescence Vol. 43, Issue 7, Pages: 1114-1120(2022)
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所 Bimberg中德绿色光子学研究中心，吉林长春　130033
  2.中国科学院大学，北京　100049
  3.中国科学院长春光学精密机械与物理研究所发光学及应用国家重点实验室，吉林长春　130033
  4.柏林工业大学固体物理研究所纳米光学中心，德国柏林　D‐10623
- 作者简介：
- 基金信息：
  
  Sino-German Center for Research Promotion(2018249);Sino⁃German Center for Research Promotion
- DOI：10.37188/CJL.20220106
  CLC： TN248.4;TP394.1;TH691.9
- Published：05 July 2022，
  
  Received：26 March 2022，
  
  Revised：10 April 2022，
- 稿件说明：
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徐汉阳,田思聪,韩赛一等.53 Gbit/s高速单模940 nm垂直腔面发射激光器[J].发光学报,2022,43(07):1114-1120.

XU Han-yang,TIAN Si-cong,HAN Sai-yi,et al.53 Gbit/s High Speed Single Mode 940 nm Vertical-cavity Surface-emitting Laser[J].Chinese Journal of Luminescence,2022,43(07):1114-1120.
徐汉阳,田思聪,韩赛一等.53 Gbit/s高速单模940 nm垂直腔面发射激光器[J].发光学报,2022,43(07):1114-1120. DOI： 10.37188/CJL.20220106.

XU Han-yang,TIAN Si-cong,HAN Sai-yi,et al.53 Gbit/s High Speed Single Mode 940 nm Vertical-cavity Surface-emitting Laser[J].Chinese Journal of Luminescence,2022,43(07):1114-1120. DOI： 10.37188/CJL.20220106.

摘要

制备了不同氧化孔径的940 nm垂直腔面发射激光器（VCSEL），选取氧化孔径为3，6，9 μm的VCSEL进行了测试表征分析。氧化孔径为3，6，9 μm的VCSEL的最高输出功率分别为2.92，6.79，10.49 mW，调制带宽分别为27.65，23.34，20.56 GHz。此外，氧化孔径为3 μm的VCSEL在整个工作电流下都可实现单模工作，氧化孔径为6 μm和9 μm的VCSEL在较大电流下呈现少模和多模特性。最后，选取3 μm氧化孔径的VCSEL进行数据传输测试，在非归零（NRZ）码下实现了传输速率53 Gbit/s。

Abstract

940 nm vertical cavity surface emitting lasers（VCSELs） with different oxidation apertures were prepared. VCSELs with oxidation apertures of 3， 6，9 μm were tested and characterized. The maximum output power of VCSELs with oxidation aperture of 3， 6，9 μm is 2.92， 6.79，10.49 mW， respectively， and the modulation bandwidth of them is 27.65， 23.34， 20.56 GHz， respectively. In addition， VCSELs with an oxidation aperture of 3 μm can achieve single-mode operation under the whole working current， and VCSELs with an oxidation aperture of 6 μm and 9 μm show few mode and multi-mode characteristics under large current.Finally

VCSEL with oxidation apertures of 3 μm is selected for data transmission test

and the transmission rate of 53 Gbit/s under not return to zero(NRZ) is realized.

关键词

垂直腔面发射激光器高速单模

Keywords

vertical cavity surface emitting laser（VCSEL）high speedsingle mode

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